Devices with crack stops
View Patent ↗An apparatus that comprises a device on a substrate and a crack stop in the substrate. Methods of forming a device are also disclosed. The methods may include providing a device, such as a semiconductor device, on a substrate having a first thickness, reducing the thickness of the substrate to a second thickness, and providing a crack stop in the substrate. Reducing the thickness of the substrate may include mounting the substrate to a carrier substrate for support and then removing the carrier substrate. The crack stop may prevent a crack from reaching the device.
1. A method of making an apparatus comprising:
providing at least two devices on a substrate wherein the substrate has an overall thickness;
reducing the overall thickness of the substrate; and
thereafter providing at least one crack stop in the substrate.
2. The method of claim 1 , wherein the crack stop is located separate from the at least two devices.
3. The method of claim 1 , further comprising singulating the at least two devices.
4. The method of claim 1 , further comprising mounting a carrier to the at least two devices on a side opposite the substrate.
5. The method of claim 1 , wherein reducing the overall thickness of the substrate comprises etching, polishing, or grinding the substrate.
6. The method of claim 1 , wherein providing at least one crack stop comprises dry etching or wet etching.
7. The method of claim 1 , wherein providing a crack stop in the substrate is performed at the same time as providing one or more via holes through the substrate and at least one of the devices.
8. The method of claim 4 , further comprising removing the carrier substrate and sawing or breaking the substrate.
9. The method of claim 6 , wherein providing a crack stop in the substrate comprises dry etching or wet etching through a patterned mask.
10. The method of claim 7 , further comprising forming an ohmic contact to the substrate.
11. A method of making an apparatus comprising:
providing a device on a substrate;
reducing an overall thickness of the substrate; and
thereafter providing at least one crack stop in the substrate, wherein the at least one crack stop extends completely through the substrate and is aligned in a circular pattern along the perimeter of the substrate.
12. The method of claim 11 , further comprising providing at least two devices on the substrate.
13. The method of claim 11 , further comprising providing multiple crack stops aligned in one or more rows around the device.
14. The method of claim 11 , wherein providing a crack stop in the substrate is performed at the same time as providing one or more via holes through the substrate and the device.
15. The method of claim 11 , wherein the device is provided on the substrate before reducing an overall thickness of the substrate.
16. The method of claim 12 , further comprising singulating the at least two devices.
17. The method of claim 14 , further comprising forming an ohmic contact to the substrate.
18. A method of making an apparatus comprising:
providing a substrate;
providing a device on the substrate;
reducing an overall thickness of the substrate; and
thereafter providing a crack stop that is separate from the device and extends completely through the substrate.
19. The method of claim 18 , wherein providing at least one crack stop comprises dry etching or wet etching.
20. The method of claim 18 , wherein providing a crack stop in the substrate is performed at the same time as providing one or more via holes through the substrate and the device.
21. The method of claim 18 , further comprising providing at least two devices on the substrate.
22. The method of claim 18 , wherein the device is provided on the substrate before reducing an overall thickness of the substrate.
23. The method of claim 19 , wherein providing a crack stop in the substrate comprises dry etching or wet etching through a patterned mask.
24. The method of claim 20 , further comprising forming an ohmic contact to the substrate.
25. The method of claim 21 , further comprising singulating the at least two devices.