Semiconductor devices with replacement gate structures having conductive contacts positioned therebetween
View Patent ↗Disclosed herein are various methods of forming replacement gate structures and conductive contacts on semiconductor devices and devices incorporating the same. One exemplary device includes a plurality of gate structures positioned above a semiconducting substrate, at least one sidewall spacer positioned proximate respective sidewalls of the gate structures, and a metal silicide region in a source/drain region of the semiconducting substrate, the metal silicide region extending laterally so as to contact the sidewall spacer positioned proximate each of the gate structures. Furthermore, the device also includes, among other things, a conductive contact positioned between the plurality of gate structures, the conductive contact having a lower portion that conductively contacts the metal silicide region and an upper portion positioned above the lower portion, wherein the lower portion is laterally wider than the upper portion and extends laterally so as to contact the sidewall spacers positioned proximate each of the gate structures.
1. A device, comprising:
a plurality of gate structures positioned above a semiconducting substrate, each of said plurality of gate structures comprising a gate electrode;
a metal silicide region in a source/drain region formed in said semiconducting substrate, said metal silicide region extending laterally so as to contact a first sidewall spacer positioned proximate a first one of said plurality of gate structures and a second sidewall spacer positioned proximate a second one of said plurality of gate structures; and
a conductive contact positioned between said plurality of gate structures, said conductive contact comprising a lower portion that conductively contacts said metal silicide region and an upper portion positioned above said lower portion, wherein said lower portion is laterally wider than said upper portion and extends laterally so as to contact each of said first and second sidewall spacers and at least part of said upper portion is positioned between said first and second sidewall spacers and below an upper surface of said gate electrode of each of said first and second gate structures.
2. The device of claim 1 , wherein said upper portion of said conductive contact has a lateral width that ranges from approximately 15-25 nm and said lower portion has a lateral width that ranges from approximately 30-50 nm.
3. The device of claim 1 , wherein each of said plurality of gate structures comprises at least one metal layer.
4. The device of claim 3 , wherein each of said plurality of gate structures comprises a high-k dielectric material.
5. The device of claim 1 , wherein each of said plurality of gate structures comprise a transistor element having a same conductivity type.
6. The device of claim 1 , wherein said lower portion of said contact element contacts a substantially vertical lower sidewall surface portion of each of said first and second sidewall spacers.
7. The device of claim 6 , further comprising a dielectric material contacting a substantially vertical upper sidewall surface portion of each of said first and second sidewall spacers, wherein said dielectric material is positioned between said upper portion of said contact element and said first and second sidewall spacers.
8. A device, comprising:
a first gate structure positioned above a semiconducting substrate;
a first sidewall spacer positioned proximate sidewalls of said first gate structure;
a second gate structure positioned above said semiconducting substrate;
a second sidewall spacer positioned proximate sidewalls of said second gate structure;
a metal silicide region positioned in a contact region of said semiconducting substrate between said first and second gate structures, said metal silicide region extending laterally between and contacting each of said first sidewall spacer and said second sidewall spacer; and
a contact element contacting said metal silicide region, said contact element comprising an upper portion and a lower portion having a greater lateral width than said upper portion, wherein said lower portion extends laterally so as to contact each of said first and second sidewall spacers.
9. The device of claim 8 , wherein each of said first and second gate structures comprise a gate insulation layer comprising a high-k dielectric material and a gate electrode comprising at least one layer of metal gate electrode material.
10. The device of claim 8 , wherein said lateral width of said lower portion of said contact element is in the range of approximately 30-50 nm.
11. The device of claim 8 , wherein said lateral width of said upper portion of said contact element is in the range of approximately 15-25 nm.
12. The device of claim 8 , wherein each of said first gate structure comprises a first transistor element and said second gate structure comprises a second transistor element having a same conductivity type as said first transistor element.
13. The device of claim 8 , wherein said contact region comprises a source/drain region in said semiconducting substrate.
14. The device of claim 8 , wherein said contact element comprises a conductive metal.
15. The device of claim 8 , wherein said contact element comprises a void region.
16. The device of claim 8 , wherein said lower portion of said contact element contacts a substantially vertical lower sidewall surface portion of each of said first and second sidewall spacers.
17. The device of claim 16 , further comprising a dielectric material contacting a substantially vertical upper sidewall surface portion of at least one of said first and second sidewall spacers, wherein said dielectric material is positioned between said upper portion of said contact element and said at least one of said first and second sidewall spacers.
18. A device, comprising:
a first gate structure positioned above a semiconducting substrate;
a first vertical sidewall spacer structure positioned proximate sidewalls of said first gate structure;
a second gate structure positioned above said semiconducting substrate;
a second vertical sidewall spacer structure positioned proximate sidewalls of said second gate structure;
a metal silicide region positioned in a contact region of said semiconducting substrate between said first and second gate structures, said metal silicide region extending laterally between and contacting each of said first and second vertical sidewall spacer structures; and
a contact element positioned between said first and second vertical sidewall spacer structures and contacting said metal silicide region, said contact element comprising a lower contact portion that extends laterally so as to contact a lower sidewall surface portion of each of said first and second vertical sidewall spacer structures and upper contact portion that is narrower than said lower contact portion.
19. The device of claim 18 , further comprising a dielectric material positioned above said lower contact portion, wherein said dielectric material contacts an upper sidewall surface portion of at least one of said first and second vertical sidewall spacer structures and is positioned between said upper contact portion and said upper sidewall surface portion of said at least one of said first and second vertical sidewall spacer structures.
20. The device of claim 18 , further comprising a dielectric material positioned above said lower contact portion, wherein said dielectric material contacts an upper sidewall surface portion each of said first and second vertical sidewall spacer structures and is positioned between said upper contact portion and said upper sidewall surface portion of each of said first and second vertical sidewall spacer structures.