Reducing MEMS stiction by introduction of a carbon barrier
View Patent ↗A mechanism for reducing stiction in a MEMS device by decreasing an amount of carbon from TEOS-based silicon oxide films that can accumulate on polysilicon surfaces during fabrication is provided. A carbon barrier material film is deposited between one or more polysilicon layer in a MEMS device and the TEOS-based silicon oxide layer. This barrier material blocks diffusion of carbon into the polysilicon, thereby reducing accumulation of carbon on the polysilicon surfaces. By reducing the accumulation of carbon, the opportunity for stiction due to the presence of the carbon is similarly reduced.
1. A method for manufacturing a microelectromechanical systems (MEMS) device, the method comprising:
forming a first polysilicon layer over a substrate;
forming a sacrificial layer over the first polysilicon layer, wherein the sacrificial layer comprises silicon oxide deposited using tetraethyl orthosilicate (TEOS) gas;
forming a second polysilicon layer over the sacrificial layer;
annealing the second polysilicon layer wherein said annealing comprises heating the first and second polysilicon layers and the sacrificial layer to a temperature sufficient to relieve stress in the second polysilicon layer; and
forming a carbon barrier layer between the sacrificial layer and one or more of the first and second polysilicon layers, wherein
the carbon barrier layer prevents diffusion of carbon into an adjacent polysilicon layer from the sacrificial layer during said annealing, and
said forming the carbon barrier layer further comprises
forming a first carbon barrier layer over and in contact with at least a portion of the first polysilicon layer, wherein the first carbon barrier layer is formed prior to said forming the sacrificial layer; and
forming a second carbon barrier layer over and in contact with the sacrificial layer, wherein
the second carbon barrier layer is formed prior to said forming the second polysilicon layer, and
at least a portion of the second polysilicon layer is formed in contact with the second carbon barrier layer.
2. The method of claim 1 wherein the carbon barrier layer comprises one of silicon nitride or silicon-germanium-carbon.
3. The method of claim 1 wherein said forming the carbon barrier layer comprises:
depositing the carbon barrier layer to a thickness of about 45 nm or greater.
4. The method of claim 1 wherein said forming the carbon barrier layer comprises:
forming the carbon barrier layer over and in contact with at least a portion of the first polysilicon layer, wherein said forming the carbon barrier layer is performed prior to forming the sacrificial layer.
5. The method of claim 1 wherein said forming the carbon barrier layer comprises:
forming the carbon barrier layer over and in contact with the sacrificial layer, wherein
forming the carbon barrier layer is performed prior to said forming the second polysilicon layer, and
at least a portion of the second polysilicon layer is formed in contact with the carbon barrier layer.
6. The method of claim 1 further comprising:
removing the sacrificial layer subsequent to said annealing, wherein said removing uses a wet etch.
7. The method of claim 6 further comprising:
removing the carbon barrier layer subsequent to said annealing.
8. The method of claim 1 further comprising:
forming a first insulating layer over the substrate, wherein the first polysilicon layer is formed over the first insulating layer; and
forming a second insulating layer over at least a portion of the first polysilicon layer.
9. A method of manufacturing a microelectromechanical systems (MEMS) device, the method comprising:
forming a fixed surface comprising a first layer of polysilicon;
forming a movable body providing a major surface facing the fixed surface, wherein at least a portion of the major surface is configured to contact at least a portion of the fixed surface and the at least a portion of the major surface comprises a second layer of polysilicon;
forming a sacrificial layer between the fixed surface and the movable body, wherein the sacrificial layer comprises silicon oxide deposited using tetraethyl orthosilicate (TEOS) gas; and
forming the first layer of polysilicon and the second layer of polysilicon such that carbon from the sacrificial layer does not diffuse into the first layer and second layer of polysilicon, wherein said forming the first and second layers of polysilicon such that carbon from the sacrificial layer does not diffuse into the first and second layers of polysilicon further comprises
forming a first carbon barrier layer over and in contact with at least a portion of the first layer of polysilicon wherein the first carbon barrier layer is formed prior to said forming the sacrificial layer, and
forming a second carbon barrier layer over and in contact with the sacrificial layer wherein the second carbon barrier layer is formed prior to said forming the second layer of polysilicon an at least a portion of the second layer of polysilicon is formed in contact with the second carbon barrier layer.
10. The method of claim 9 wherein the carbon barrier layer comprises one of silicon nitride or silicon-germanium-carbon.
11. The method of 9 wherein said forming the carbon barrier layer comprises depositing the carbon barrier layer to a thickness of at least about 45 nm.
12. A method for manufacturing a microelectromechanical systems (MEMS) device, the method comprising:
forming a first polysilicon layer over a substrate;
forming a sacrificial layer over the first polysilicon layer, wherein the sacrificial layer comprises silicon oxide deposited using tetraethyl orthosilicate (TEOS) gas;
forming a second polysilicon layer over the sacrificial layer;
annealing the second polysilicon layer wherein said annealing comprises heating the first and second polysilicon layers and the sacrificial layer to a temperature sufficient to relieve stress in the second polysilicon layer;
forming a carbon barrier layer between the sacrificial layer and one or more of the first and second polysilicon layers, wherein
the carbon barrier layer prevents diffusion of carbon into an adjacent polysilicon layer from the sacrificial layer during said annealing;
removing the sacrificial layer subsequent to said annealing, wherein said removing uses a wet etch; and
removing the carbon barrier layer subsequent to said annealing.