Wiring board and probe card using the same
View Patent ↗A wiring board 3 according to the present invention includes a first resin layer 18 a formed of a thermoplastic resin; a conductive layer 16 formed partially on the first resin layer 18 a ; a through hole P for insertion of a screw formed in a region where the conductive layer 16 is not formed and penetrating through the first resin layer 18 a in a thickness direction thereof; and a dummy via hole D formed in a region between the through hole P and the conductive layer 16 and penetrating through the first resin layer 18 a.
1. A wiring board comprising:
a first resin layer formed of a thermoplastic resin;
a conductive layer formed partially on the first resin layer;
a through hole for insertion of a screw formed in a region where the conductive layer is not formed and penetrating through the first resin layer in a thickness direction thereof; and
a dummy via hole for alleviating a transmission of an entangling stress formed in a region between the through hole and the conductive layer and penetrating through the first resin layer.
2. The wiring board according to claim 1 , further comprising a resin portion filled in the dummy via hole.
3. The wiring board according to claim 1 ,
wherein, as the dummy via hole, there are provided a plurality of dummy via holes, and
the plurality of dummy via holes are arranged to surround the through hole.
4. The wiring board according to claim 1 ,
wherein the dummy via hole is formed in an annular pattern surrounding the through hole.
5. A wiring board comprising:
a core substrate; and
a buildup portion formed on one principal surface of the core substrate,
wherein the buildup portion comprises:
an insulating layer having a first resin layer formed of a thermoplastic resin;
a conductive layer formed partially on the first resin layer;
a through hole for insertion of a screw formed in a region where the conductive layer is not formed and penetrating through the first resin layer in a thickness direction thereof; and
a dummy via hole for alleviating a transmission of an entangling stress formed in a region between the through hole and the conductive layer and penetrating through the first resin layer.
6. The wiring board according to claim 5 ,
wherein a plurality of the insulating layers and a plurality of the conductive layers are stacked on the one principal surface of the core substrate.
7. The wiring board according to claim 5 ,
wherein other buildup portion is stacked on other principal surface of the core substrate, and
wherein the other buildup portion includes:
an insulating layer having a first resin layer formed of a thermoplastic resin;
a conductive layer formed partially on the first resin layer; and
a through hole for insertion of a screw formed in a region where the conductive layer is not formed and penetrating through the first resin layer in a thickness direction thereof.
8. The wiring board according to claim 7 ,
wherein each of the buildup portion and the other buildup portion includes a via hole penetrating therethrough in a thickness direction thereof, and
the via hole is filled with a via conductor to be connected to the conductive layer formed in the buildup portion, and to be connected to the conductive layer formed in the other buildup portion, and
wherein the core substrate includes:
a substrate having a through hole formed therein and penetrating through the core substrate in a thickness direction thereof; and
a through hole conductor formed on an inner wall of the through hole and electrically connecting the via conductor formed in the buildup portion to the via conductor formed in the other buildup portion.
9. A probe card comprising:
the wiring board according to claim 1 ;
a probe head connected to one principal surface of the wiring board and including a probe;
a main board connected to other principal surface of the wiring board and including a screw hole formed therein; and
a screw connecting the wiring board and the main board to each other, and
wherein a screw head of the screw makes contact with the one principal surface of the wiring board, and
a threaded shaft of the screw is inserted into both the through hole and the screw hole.
10. A probe card comprising:
the wiring board according to claim 5 ;
a probe head connected to one principal surface of the wiring board and including a probe;
a main board connected to other principal surface of the wiring board and including a screw hole formed therein; and
a screw connecting the wiring board and the main board to each other, and
wherein a screw head of the screw makes contact with the one principal surface of the wiring board, and
a threaded shaft of the screw is inserted into both the through hole and the screw hole.