IP Library › Granted Patent US 9,159,695
Granted Patent B2
US 9,159,695 · App. 13/735,750 · Granted Oct 13, 2015

Elongated bump structures in package structure

Inventors: Yao-Chun Chuang (Hsin-Chu, TW); Chita Chuang (Kaohsiung, TW); Ming Hung Tseng (Toufen Township, TW); Chen-Shien Chen (Zhubei, TW)
Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
H01L24/81H01L23/49811H01L24/13H01L24/14H01L24/16H01L2224/0345H01L2224/0401H01L2224/05022H01L2224/05124H01L2224/05139H01L2224/05147H01L2224/05572H01L2224/1145H01L2224/1146H01L2224/13005H01L2224/13013H01L2224/13014H01L2224/13082H01L2224/13109H01L2224/13111H01L2224/13139H01L2224/13144H01L2224/13147H01L2224/13155H01L2224/13164H01L2224/13169H01L2224/14155H01L2224/16237H01L2224/814H01L2224/81024H01L2224/81191H01L2224/81203H01L2224/81385H01L2224/81424H01L2224/81444H01L2224/81447H01L2224/81455H01L2224/81464H01L2224/81484H01L2224/81815H01L2924/1305H01L2924/1306H01L2924/13091
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Quick Facts
Patent No.
US 9,159,695
App. No.
13/735,750
Granted
Oct 13, 2015
Kind
B2
Abstract

A package structure includes a chip attached to a substrate. The chip includes a bump structure including a conductive pillar having a length (L) measured along a long axis of the conductive pillar and a width (W) measured along a short axis of the conductive pillar. The substrate includes a pad region and a mask layer overlying the pad region, wherein the mask layer has an opening exposing a portion of the pad region. The chip is attached to the substrate to form an interconnection between the conductive pillar and the pad region. The opening has a first dimension (d1) measured along the long axis and a second dimension (d2) measured along the short axis. In an embodiment, L is greater than d1, and W is less than d2.

Claims (34)

1. A package structure, comprising:

a chip comprising a bump structure, wherein the bump structure comprises a conductive pillar having a length (L) measured along a long axis of the conductive pillar and a width (W) measured along a short axis of the conductive pillar, wherein L is different from W, wherein the bump structure further comprises an under bump metallurgy layer; and

a substrate comprising a pad region and a mask layer overlying the pad region, wherein the mask layer has an opening exposing a portion of the pad region,

wherein the conductive pillar of the chip is attached to the pad region of the substrate via a solder joint region to form an interconnection between the conductive pillar and the pad region,

wherein the solder joint region contacts a center of a major top surface of the conductive pillar along the long axis of the conductive pillar,

wherein the opening has a first dimension (d1) measured along the long axis and a second dimension (d2) measured along the short axis; and

wherein L is greater than d1, and W is less than d2.

2. The package structure of claim 1 , wherein the mask layer is formed of a solder resist material layer.

3. The package structure of claim 1 , wherein the conductive pillar comprises copper or copper alloy.

4. The package structure of claim 1 , wherein the long axis of the conductive pillar is perpendicular to an edge of the chip.

5. The package structure of claim 1 , wherein the long axis of the conductive pillar is along a direction toward a central area of the chip.

6. The package structure of claim 1 , wherein the difference between L and d1 is greater than 20 μm.

7. The package structure of claim 1 , wherein the difference between d2 and W is greater than 2 μm.

8. The package structure of claim 1 , wherein d1 is substantially equal to d2.

9. A package structure, comprising:

a chip comprising a bump structure, wherein the bump structure comprises a conductive pillar having a length (L) measured along a long axis of the conductive pillar and a width (W) measured along a short axis of the conductive pillar, wherein the bump structure further comprises an under bump metallurgy layer; and

a substrate comprising a mask layer overlying the substrate and having an opening, and a conductive region filling the opening of the mask layer and protruding from a top surface of the mask layer;

wherein the conductive pillar of the chip is attached to the conductive region of the substrate through a solder joint region to form an interconnection between the conductive pillar and the conductive region,

wherein the solder joint region contacts a center of a major top surface of the conductive pillar along the long axis of the conductive pillar,

wherein the opening has a first dimension (d1) measured along the long axis and a second dimension (d2) measured along the short axis; and

wherein L is different from W, L is greater than d1, and W is less than d2.

10. The package structure of claim 9 , wherein the mask layer is formed of a solder resist material layer.

11. The package structure of claim 9 , wherein the conductive pillar comprises copper or copper alloy.

12. The package structure of claim 9 , wherein the long axis of the conductive pillar is perpendicular to an edge of the chip.

13. The package structure of claim 9 , wherein the long axis of the conductive pillar is along a direction toward a central area of the chip.

14. The package structure of claim 9 , wherein the difference between L and d1 is greater than 20 μm.

15. The package structure of claim 9 , wherein the difference between d2 and W is greater than 2 μm.

16. The package structure of claim 9 , wherein d1 is substantially equal to d2.

17. A method of forming a package structure, comprising:

forming a bump structure on a semiconductor device, wherein the bump structure comprises a conductive pillar having a length (L) measured along a long axis of the conductive pillar and a width (W) measured along a short axis of the conductive pillar, L being different from W, wherein the bump structure further comprises an under bump metallurgy layer;

forming a solder resist layer on a package substrate having a pad region,

forming an opening in the solder resist layer, wherein the opening has a first dimension (d1) measured along the long axis and a second dimension (d2) measured along the short axis, and wherein L is greater than d1, and W is less than d2; and

attaching the conductive pillar of the semiconductor device to the pad region of the package substrate via a solder joint region to form an interconnection between the conductive pillar and the pad region, the solder joint region contacting a center of a major top surface of the conductive pillar along the long axis of the conductive pillar.

18. The method of claim 17 , further comprising forming a solder layer on at least one of the conductive pillar and the pad region.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jan 7, 2013
From: CHUANG, YAO-CHUN; CHUANG, CHITA; TSENG, MING HUNG; CHEN, CHEN-SHIEN
To: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
Reel/Frame 029580/0502 →
Continuity (1)
Related Publication 20140191391A1 · Jul 10, 2014