Semiconductor device and manufacturing method thereof
View Patent ↗A semiconductor device and a manufacturing method thereof are disclosed. A first insulation layer is formed on a semiconductor die, a redistribution layer electrically connected to a bond pad is formed on the first insulation layer, and a second insulation layer covers the redistribution layer. The second insulation layer is made of a cheap, non-photosensitive material. Accordingly, the manufacturing cost of the semiconductor device can be reduced.
1. A manufacturing method of a semiconductor device, comprising:
providing a semiconductor die comprising:
a first surface;
a bond pad formed on the first surface; and
a passivation layer on the first surface, the passivation layer comprising an opening exposing the bond pad;
forming a redistribution layer electrically connected to the bond pad and extended over the first surface of the semiconductor die;
attaching a conductive ball onto the redistribution layer; and
after said attaching the conductive ball, forming an insulation layer on the redistribution layer using a non-photosensitive material that exposes the conductive ball upward, wherein the entirety of the insulation layer is formed after said attaching the conductive ball, and wherein a portion of the insulation layer is directly under the conductive ball.
2. The manufacturing method of claim 1 , wherein the forming an insulation layer comprises applying epoxy flux on the redistribution layer by printing before said attaching the conductive ball, and curing the printed epoxy flux after said attaching the conductive ball.
3. The manufacturing method of claim 1 , wherein said forming an insulation layer comprises attaching an insulative dry film by laminating.
4. The manufacturing method of claim 1 further comprising, prior to said forming an insulation layer, forming a prior insulation layer on the passivation layer, the prior insulation layer comprising an opening exposing the bond pad.
5. The manufacturing method of claim 1 , wherein the insulation layer is formed directly on the redistribution layer and the passivation layer.
6. A manufacturing method of a semiconductor device, comprising:
providing a semiconductor die comprising:
a first surface; and
a bond pad formed on the first surface;
forming a redistribution layer electrically connected to the bond pad and extended over the first surface of the semiconductor die;
attaching a conductive ball onto the redistribution layer; and
after said attaching the conductive ball, forming an insulation layer on the redistribution layer using a non-photosensitive material that exposes the conductive ball upward, wherein the entirety of the insulation layer is formed after said attaching the conductive ball, and wherein a portion of the insulation layer is directly under the conductive ball.
7. The manufacturing method of claim 6 wherein the semiconductor die further comprises:
a passivation layer formed on the first surface, the passivation layer comprising an opening exposing the bond pad.
8. The manufacturing method of claim 7 further comprising forming a redistribution seed layer between the redistribution layer and the bond pad and between the redistribution layer and the passivation layer.
9. The manufacturing method of claim 6 , wherein said forming an insulation layer comprises forming the insulation layer directly on the redistribution layer.
10. The manufacturing method of claim 7 , further comprising forming a redistribution seed layer between the redistribution layer and the passivation layer.
11. The manufacturing method of claim 6 , wherein the conductive ball comprises a spherical solder ball, and said attaching a conductive ball comprises fusing the spherical solder ball onto the redistribution layer.
12. The manufacturing method of claim 6 , wherein said forming an insulation layer comprises attaching an insulative dry film onto the redistribution layer.
13. The manufacturing method of claim 6 , wherein said forming an insulation layer comprises spin coating the insulation layer on the redistribution layer.
14. The manufacturing method of claim 6 , wherein the insulation layer covers a portion of the redistribution layer and is formed to have the same planar shape as that of the redistribution layer.
15. The manufacturing method of claim 6 , wherein the insulation layer has a smaller area than the first surface of the semiconductor die, a periphery of the first surface of the semiconductor die being exposed from the insulation layer.
16. The manufacturing method of claim 6 , wherein the redistribution layer comprises:
a line-shaped trace; and
a ball pad connected to the trace, the conductive ball being attached to the ball pad.
17. The manufacturing method of claim 16 wherein a line width of the trace is 50% or less of a diameter of the ball pad.
18. The manufacturing method of claim 6 , wherein:
the conductive ball is attached to the redistribution layer at a base of the conductive ball; and
said forming an insulation layer comprises applying molding compound around a perimeter of the base of the conductive ball.
19. The manufacturing method of claim 6 , wherein said forming an insulation layer comprises, after said attaching the conductive ball, attaching an insulative dry film by laminating.
20. The manufacturing method of claim 6 , wherein said insulation layer only contacts the conductive ball at a level below half of a height of the conductive ball.