IP Library Granted Patent US 9,070,653
Granted Patent B2
US 9,070,653 · App. 13/741,743 · Granted Jun 30, 2015

Microelectronic assembly having a heat spreader for a plurality of die

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Quick Facts
Patent No.
US 9,070,653
App. No.
13/741,743
Granted
Jun 30, 2015
Kind
B2
Abstract

A microelectronic assembly ( 100 ) and a microelectronic device ( 4100 ) include a stacked structure ( 101 ). The stacked structure includes a heat spreader ( 104 ), at least one die ( 106 ) thermally coupled to at least a portion of one side of the heat spreader, at least one other die ( 108 ) thermal coupled to at least a portion of an opposite side of the heat spreader, at least one opening ( 401 ) in the heat spreader located in a region of between the two die, an insulator ( 603 ) disposed in the at least one opening, and electrically conductive material ( 1308, 1406 ) in an insulated hole ( 705 ) in the insulator. The heat spreader allows electrical communication between the two die through the opening while the insulator isolates the electrically conductive material and the heat spreader from each other.

Claims (41)

1. A microelectronic assembly, comprising:

a heat spreader having a first major surface and a second major surface opposite the first major surface;

at least one die located with respect to the first major surface of the heat spreader and thermally coupled to at least a portion of the heat spreader;

at least one other die located with respect to the second major surface of the heat spreader and thermally coupled to at least a portion of the heat spreader;

an opening in the heat spreader, the opening located in a region of the heat spreader between the at least one die and the at least one other die;

an insulator located in the opening; and

electrically conductive material located in an electrically insulated through hole in the insulator,

wherein the insulator electrically isolates the electrically conductive material and the heat spreader from each other.

2. The microelectronic assembly of claim 1 , wherein the at least one die and the at least one other die are electrically coupled by the electrically conductive material in the electrically insulated through hole in the insulator disposed in the opening of the heat spreader.

3. The microelectronic assembly of claim 1 , wherein the heat spreader comprises an electrically conductive material.

4. The microelectronic assembly of claim 3 , wherein the heat spreader and the electrically conductive material in the electrically insulated through hole in the insulator includes a same material.

5. The microelectronic assembly of claim 1 , wherein the electrically conductive material in the electrically insulated through hole in the insulator is one of a conductive epoxy and a B-staged conductive polymer.

6. The microelectronic assembly of claim 1 , wherein the electrically conductive material in the electrically insulated through hole is solder.

7. The microelectronic assembly of claim 1 , wherein the insulator is one of silicon dioxide, silicon nitride, and a non-electrically conductive polymer.

8. The microelectronic assembly of claim 1 , wherein the at least one die includes an active side that faces the first major surface of the heat spreader, and wherein the at least one other die includes an active side that faces the second major surface of the heat spreader.

9. The microelectronic assembly of claim 1 , wherein the at least one die and the at least one other die each includes at least one through via and an electrically conductive substance therein, and wherein the electrically conductive material in the electrically insulated through hole of the heat spreader is coupled to the electrically conductive substance in the through via of the at least one die and to the electrically conductive substance in the through via of the at least one other die.

10. The microelectronic assembly of claim 9 , wherein at least a portion of the through via of the at least one die, at least a portion of the electrically insulated through hole in the heat spreader, and at least a portion of the through via of the at least one other die, are aligned.

11. The microelectronic assembly of claim 1 , wherein one or both of the at least one die and the at least one other die each comprises a stack of die.

12. A microelectronic assembly, comprising:

a heat spreader having a first major surface and a second major surface opposite the first major surface;

at least one die located with respect to the first major surface of the heat spreader and thermally coupled to at least a portion of the heat spreader;

at least one other die located with respect to the second major surface of the heat spreader and thermally coupled to at least a portion of the heat spreader;

a plurality of openings in the heat spreader, each opening located in a region of the heat spreader between the at least one die and the at least one other die;

a solid insulator located in at least one opening; and

electrically conductive material located in an electrically insulated through hole in the solid insulator,

wherein the solid insulator electrically isolates the electrically conductive material and the heat spreader from each other.

13. The microelectronic assembly of claim 12 , wherein the solid insulator is silicon dioxide.

14. The microelectronic assembly of claim 12 , wherein the solid insulator is silicon nitride.

15. The microelectronic assembly of claim 12 , wherein the solid insulator is a non-electrically conductive polymer.

16. The microelectronic assembly of claim 12 , wherein the electrically conductive material in the electrically insulated through hole in the insulator is a conductive epoxy.

17. The microelectronic assembly of claim 12 , wherein the electrically conductive material in the electrically insulated through hole in the insulator is a B-staged conductive polymer.

18. A microelectronic assembly, comprising:

a heat spreader having a first major surface and a second major surface opposite the first major surface;

at least one die located with respect to the first major surface of the heat spreader and thermally coupled to at least a portion of the heat spreader;

at least one other die located with respect to the second major surface of the heat spreader and thermally coupled to at least a portion of the heat spreader;

a plurality of openings in the heat spreader, each opening located in a region of the heat spreader between the at least one die and the at least one other die;

an insulator comprising one of silicon dioxide, silicon nitride, and a non-electrically conductive polymer, located in at least one opening; and

electrically conductive material located in an electrically insulated through hole in the insulator,

wherein the insulator electrically isolates the electrically conductive material and the heat spreader from each other.

19. The microelectronic assembly of claim 18 , wherein the electrically conductive material in the electrically insulated through hole in the insulator is a conductive epoxy.

20. The microelectronic assembly of claim 18 , wherein the electrically conductive material in the electrically insulated through hole in the insulator is a B-staged conductive polymer.

Assignments (30)
CORRECTIVE ASSIGNMENT TO CORRECT THE REMOVE APPLICATION 11759915 AND REPLACE IT WITH APPLICATION 11759935 PREVIOUSLY RECORDED ON REEL 040925 FRAME 0001. ASSIGNOR(S) HEREBY CONFIRMS THE RELEASE OF SECURITY INTEREST. Recorded Feb 17, 2020
From: MORGAN STANLEY SENIOR FUNDING, INC.
To: NXP, B.V. F/K/A FREESCALE SEMICONDUCTOR, INC.
Reel/Frame 052917/0001 →
CORRECTIVE ASSIGNMENT TO CORRECT THE REMOVE APPLICATION 11759915 AND REPLACE IT WITH APPLICATION 11759935 PREVIOUSLY RECORDED ON REEL 040928 FRAME 0001. ASSIGNOR(S) HEREBY CONFIRMS THE RELEASE OF SECURITY INTEREST. Recorded Jan 17, 2020
From: MORGAN STANLEY SENIOR FUNDING, INC.
To: NXP B.V.
Reel/Frame 052915/0001 →
CORRECTIVE ASSIGNMENT TO CORRECT THE REMOVE APPLICATION 11759915 AND REPLACE IT WITH APPLICATION 11759935 PREVIOUSLY RECORDED ON REEL 037486 FRAME 0517. ASSIGNOR(S) HEREBY CONFIRMS THE ASSIGNMENT AND ASSUMPTION OF SECURITY INTEREST IN PATENTS. Recorded Dec 10, 2019
From: CITIBANK, N.A.
To: MORGAN STANLEY SENIOR FUNDING, INC.
Reel/Frame 053547/0421 →
CORRECTIVE ASSIGNMENT TO CORRECT THE REMOVE APPLICATION 12298143 PREVIOUSLY RECORDED ON REEL 042985 FRAME 0001. ASSIGNOR(S) HEREBY CONFIRMS THE SECURITY AGREEMENT SUPPLEMENT. Recorded Oct 22, 2019
From: NXP B.V.
To: MORGAN STANLEY SENIOR FUNDING, INC.
Reel/Frame 051029/0001 →
CORRECTIVE ASSIGNMENT TO CORRECT THE REMOVE APPLICATION 12298143 PREVIOUSLY RECORDED ON REEL 042762 FRAME 0145. ASSIGNOR(S) HEREBY CONFIRMS THE SECURITY AGREEMENT SUPPLEMENT. Recorded Oct 22, 2019
From: NXP B.V.
To: MORGAN STANLEY SENIOR FUNDING, INC.
Reel/Frame 051145/0184 →
CORRECTIVE ASSIGNMENT TO CORRECT THE REMOVE APPLICATION 12298143 PREVIOUSLY RECORDED ON REEL 038017 FRAME 0058. ASSIGNOR(S) HEREBY CONFIRMS THE SECURITY AGREEMENT SUPPLEMENT. Recorded Oct 22, 2019
From: NXP B.V.
To: MORGAN STANLEY SENIOR FUNDING, INC.
Reel/Frame 051030/0001 →
CORRECTIVE ASSIGNMENT TO CORRECT THE REMOVE APPLICATION 12298143 PREVIOUSLY RECORDED ON REEL 039361 FRAME 0212. ASSIGNOR(S) HEREBY CONFIRMS THE SECURITY AGREEMENT SUPPLEMENT. Recorded Oct 22, 2019
From: NXP B.V.
To: MORGAN STANLEY SENIOR FUNDING, INC.
Reel/Frame 051029/0387 →
RELEASE OF SECURITY INTEREST Recorded Sep 10, 2019
From: MORGAN STANLEY SENIOR FUNDING, INC.
To: NXP B.V.
Reel/Frame 050744/0097 →
RELEASE OF SECURITY INTEREST Recorded Sep 10, 2019
From: MORGAN STANLEY SENIOR FUNDING, INC.
To: NXP B.V.
Reel/Frame 050745/0001 →
CORRECTIVE ASSIGNMENT TO CORRECT THE TO CORRECT THE APPLICATION NO. FROM 13,883,290 TO 13,833,290 PREVIOUSLY RECORDED ON REEL 041703 FRAME 0536. ASSIGNOR(S) HEREBY CONFIRMS THE THE ASSIGNMENT AND ASSUMPTION OF SECURITY INTEREST IN PATENTS.. Recorded Feb 20, 2019
From: MORGAN STANLEY SENIOR FUNDING, INC.
To: SHENZHEN XINGUODU TECHNOLOGY CO., LTD.
Reel/Frame 048734/0001 →
CORRECTIVE ASSIGNMENT TO CORRECT THE REMOVE APPLICATION 12681366 PREVIOUSLY RECORDED ON REEL 038017 FRAME 0058. ASSIGNOR(S) HEREBY CONFIRMS THE SECURITY AGREEMENT SUPPLEMENT. Recorded May 9, 2017
From: NXP B.V.
To: MORGAN STANLEY SENIOR FUNDING, INC.
Reel/Frame 042985/0001 →
CORRECTIVE ASSIGNMENT TO CORRECT THE REMOVE APPLICATION 12681366 PREVIOUSLY RECORDED ON REEL 039361 FRAME 0212. ASSIGNOR(S) HEREBY CONFIRMS THE SECURITY AGREEMENT SUPPLEMENT. Recorded May 9, 2017
From: NXP B.V.
To: MORGAN STANLEY SENIOR FUNDING, INC.
Reel/Frame 042762/0145 →
CORRECTIVE ASSIGNMENT TO CORRECT THE REMOVE PATENTS 8108266 AND 8062324 AND REPLACE THEM WITH 6108266 AND 8060324 PREVIOUSLY RECORDED ON REEL 037518 FRAME 0292. ASSIGNOR(S) HEREBY CONFIRMS THE ASSIGNMENT AND ASSUMPTION OF SECURITY INTEREST IN PATENTS. Recorded Feb 1, 2017
From: CITIBANK, N.A.
To: MORGAN STANLEY SENIOR FUNDING, INC.
Reel/Frame 041703/0536 →
MERGER Recorded Jan 3, 2017
From: FREESCALE SEMICONDUCTOR, INC.
To: NXP USA, INC.
Reel/Frame 041144/0363 →
RELEASE OF SECURITY INTEREST Recorded Nov 7, 2016
From: MORGAN STANLEY SENIOR FUNDING, INC.
To: NXP B.V.
Reel/Frame 040928/0001 →
RELEASE OF SECURITY INTEREST Recorded Sep 21, 2016
From: MORGAN STANLEY SENIOR FUNDING, INC.
To: NXP, B.V., F/K/A FREESCALE SEMICONDUCTOR, INC.
Reel/Frame 040925/0001 →
CORRECTIVE ASSIGNMENT TO CORRECT THE REMOVE APPLICATION 12092129 PREVIOUSLY RECORDED ON REEL 038017 FRAME 0058. ASSIGNOR(S) HEREBY CONFIRMS THE SECURITY AGREEMENT SUPPLEMENT. Recorded Jul 14, 2016
From: NXP B.V.
To: MORGAN STANLEY SENIOR FUNDING, INC.
Reel/Frame 039361/0212 →
SUPPLEMENT TO THE SECURITY AGREEMENT Recorded Jun 16, 2016
From: FREESCALE SEMICONDUCTOR, INC.
To: MORGAN STANLEY SENIOR FUNDING, INC.
Reel/Frame 039138/0001 →
SECURITY AGREEMENT SUPPLEMENT Recorded Mar 7, 2016
From: NXP B.V.
To: MORGAN STANLEY SENIOR FUNDING, INC.
Reel/Frame 038017/0058 →
ASSIGNMENT AND ASSUMPTION OF SECURITY INTEREST IN PATENTS Recorded Jan 13, 2016
From: CITIBANK, N.A.
To: MORGAN STANLEY SENIOR FUNDING, INC.
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ASSIGNMENT AND ASSUMPTION OF SECURITY INTEREST IN PATENTS Recorded Jan 12, 2016
From: CITIBANK, N.A.
To: MORGAN STANLEY SENIOR FUNDING, INC.
Reel/Frame 037486/0517 →
PATENT RELEASE Recorded Dec 21, 2015
From: CITIBANK, N.A., AS COLLATERAL AGENT
To: FREESCALE SEMICONDUCTOR, INC.
Reel/Frame 037357/0704 →
PATENT RELEASE Recorded Dec 21, 2015
From: CITIBANK, N.A., AS COLLATERAL AGENT
To: FREESCALE SEMICONDUCTOR, INC.
Reel/Frame 037357/0744 →
PATENT RELEASE Recorded Dec 21, 2015
From: CITIBANK, N.A., AS COLLATERAL AGENT
To: FREESCALE SEMICONDUCTOR, INC.
Reel/Frame 037357/0725 →
SECURITY AGREEMENT Recorded Nov 6, 2013
From: FREESCALE SEMICONDUCTOR, INC.
To: CITIBANK, N.A., AS NOTES COLLATERAL AGENT
Reel/Frame 031591/0266 →
SECURITY AGREEMENT Recorded Jun 18, 2013
From: FREESCALE SEMICONDUCTOR, INC.
To: CITIBANK, N.A., AS NOTES COLLATERAL AGENT
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SUPPLEMENT TO IP SECURITY AGREEMENT Recorded May 20, 2013
From: FREESCALE SEMICONDUCTOR, INC.
To: CITIBANK, N.A., AS COLLATERAL AGENT
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SUPPLEMENT TO IP SECURITY AGREEMENT Recorded May 20, 2013
From: FREESCALE SEMICONDUCTOR, INC.
To: CITIBANK, N.A., AS NOTES COLLATERAL AGENT
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SUPPLEMENT TO IP SECURITY AGREEMENT Recorded May 20, 2013
From: FREESCALE SEMICONDUCTOR, INC.
To: CITIBANK, N.A., AS NOTES COLLATERAL AGENT
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ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jan 15, 2013
From: STEPHENS, TAB A.; MCSHANE, MICHAEL B.; PELLEY, PERRY H.
To: FREESCALE SEMICONDUCTOR, INC.
Reel/Frame 029630/0825 →