Hardmask surface treatment
View Patent ↗Methods of treating the surface of a metal-containing hardmask used in the manufacture of semiconductors by contacting the hardmask surface with a composition capable of adjusting the water contact angle so as to substantially match that of subsequently applied organic coatings are provided.
1. A hardmask layer disposed on an electronic device substrate, the hardmask layer comprising a majority of inorganic domains having (-M-O—) n linkages, where M is a Group 3 to Group 14 metal and n>1, and having a surface having a water contact angle of ≧60°.
2. A process for treating a surface of a hardmask layer comprising inorganic domains having (-M-O—) n linkages, where M is a Group 3 to Group 14 metal and n>1 comprising: contacting a surface of the hardmask with a surface treating composition to coat the hardmask surface, wherein the surface treating composition comprises an organic solvent and a surface treating agent comprising one or more surface treating moieties, wherein the hardmask surface has a first water contact angle before contact with the surface treating composition, and a has a second water contact angle after such contact, where the second water contact angle is greater than the first water contact angle.
3. The process of claim 2 wherein M is chosen from titanium, zirconium, hafnium, tungsten, tantalum, molybdenum, and aluminum.
4. The process of claim 2 wherein the process further comprises the step of heating the coated hardmask surface.
5. The process of claim 4 wherein the hardmask surface after heating has a water contact angle of 60 to 70°.
6. The process of claim 4 further comprising a rinsing step after the heating step.
7. The process of claim 2 wherein the surface treating agent is polymeric and comprises one or more of pendant groups comprising the one or more surface treating moieties, terminal groups comprising the one or more surface treating moieties, or a polymer backbone comprising the one or more surface treating moieties.
8. The process of claim 2 wherein the one or more surface treating moieties are chosen from hydroxyl, thiol, carboxyl, betadiketo, protected carboxyl, and protected hydroxyl groups.
9. The process of claim 2 wherein the oligomer comprises as polymerized units a monomer chosen from (meth)acrylic acid, (meth)acrylate esters, and hydroxystyrene monomers.
10. The process of claim 2 wherein the hardmask layer is disposed on an electronic device substrate.
11. A process of forming a patterned hardmask layer comprising: providing a substrate having an oxymetal hardmask layer; coating the hardmask surface with a surface treating composition comprising an organic solvent and a surface treating agent comprising a surface treating moiety chosen from protected hydroxyl and protected carboxyl; subjecting the surface treating composition coating to conditions sufficient to form a hardmask layer having a pattern of first regions of relatively lower surface energy and second regions of relatively higher surface energy.