FinFET device formation
View Patent ↗A method includes patterning a fin on a semiconductor substrate, depositing a local trench isolation (LTI) layer on the semiconductor substrate, patterning a gate stack over a channel region of the fin and over a portion of the LTI layer, depositing a first capping layer over exposed portions of the LTI layer, performing an etching process to remove oxide material from exposed portions of the fin, and epitaxially growing a semiconductor material from exposed portions of the fin to define active regions.
1. A method comprising:
patterning a fin on a semiconductor substrate;
depositing a local trench isolation (LTI) layer on the semiconductor substrate;
patterning a gate stack over a channel region of the fin and over a portion of the LTI layer;
depositing a first capping layer over exposed portions of the LTI layer;
performing an etching process to remove oxide material from exposed portions of the fin; and
epitaxially growing a semiconductor material from exposed portions of the fin to define active regions.
2. The method of claim 1 , wherein the depositing the first capping layer does not appreciably dispose capping layer material on sidewalls of the fin.
3. The method of claim 1 , wherein the depositing the first capping layer results in a first capping layer having a first thickness in regions of the first capping layer that are disposed above and in contact with the LTI layer and a second thickness in regions of the first capping layer that are disposed on sidewalls of the fin, wherein the first thickness is greater than the second thickness.
4. The method of claim 1 , further comprising forming spacers adjacent to the gate stack prior to depositing the first capping layer.
5. The method of claim 1 , wherein the LTI layer includes an oxide material.
6. The method of claim 1 , wherein the first capping layer includes a nitride material.
7. The method of claim 1 , further comprising removing exposed portions of the LTI layer to reduce the thickness of the LTI layer prior to depositing the first capping layer.
8. A method comprising:
patterning a fin on a semiconductor substrate;
depositing a local trench isolation (LTI) layer on the semiconductor substrate;
patterning a dummy gate stack over a channel region of the fin and over a portion of the LTI layer;
forming spacers adjacent to the dummy gate stack;
depositing a first capping layer over exposed portions of the LTI layer;
performing an etching process to remove oxide material from exposed portions of the fin;
epitaxially growing a semiconductor material from exposed portions of the fin to define active regions;
removing the dummy gate stack to expose the channel region of the fin and a portion of the LTI layer; and
forming a gate stack over the channel region of the fin and the exposed portion of the LTI layer.
9. The method of claim 8 , wherein the depositing the first capping layer does not appreciably dispose capping layer material on sidewalls of the fin.
10. The method of claim 8 , wherein the depositing the first capping layer results in a first capping layer having a first thickness in regions of the first capping layer that are disposed above and in contact with the LTI layer and a second thickness in regions of the first capping layer that are disposed on sidewalls of the fin, wherein the first thickness is greater than the second thickness.
11. The method of claim 8 , further comprising forming spacers adjacent to the gate stack prior to depositing the first capping layer.
12. The method of claim 8 , wherein the LTI layer includes an oxide material.
13. The method of claim 8 , wherein the first capping layer includes a nitride material.
14. The method of claim 8 , further comprising removing exposed portions of the LTI layer to reduce the thickness of the LTI layer prior to depositing the first capping layer.
15. The method of claim 8 , further comprising depositing a second capping layer over exposed portions of the active regions prior to removing the dummy gate stack.
16. The method of claim 15 , wherein the second capping layer includes a nitride material.
17. The method of claim 8 , further comprising removing exposed portions of the LTI layer to define a recess in the LTI layer prior to forming the gate stack.