IP Library Granted Patent US 9,111,878
Granted Patent B2
US 9,111,878 · App. 13/755,904 · Granted Aug 18, 2015

Method for forming a semiconductor device assembly having a heat spreader

Inventors: Leo M. Higgins, III (Austin, TX); Burton J. Carpenter (Austin, TX)
Assignee: FREESCALE SEMICONDUCTOR, INC
H01L23/3121H01L21/565H01L23/36H01L23/42H01L2224/48091H01L2224/73265
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Quick Facts
Patent No.
US 9,111,878
App. No.
13/755,904
Granted
Aug 18, 2015
Kind
B2
Abstract

A method includes providing an integrated circuit (IC) die assembly that includes a substrate and an IC die mounted on a portion of a major surface of the substrate, dispensing an interface material on the IC die, positioning a portion of a heat spreader in contact with the interface material, and dispensing an adhesive between one side of the heat spreader facing the IC die assembly and exposed portions of a major surface of an encapsulant on the substrate.

Claims (34)

1. A method comprising:

providing an integrated circuit (IC) die assembly that includes a substrate and an IC die mounted on a portion of a major surface of the substrate;

dispensing a thermal interface material on the IC die;

positioning a portion of a heat spreader in contact with the thermal interface material; and

after the positioning the portion of the heat spreader in contact with the thermal interface, dispensing an adhesive between one side of the heat spreader facing the IC die assembly and exposed portions of a major surface of an encapsulant on the substrate wherein the dispensing the adhesive is performed so that the adhesive is in contact with the major surface of the encapsulant on the substrate and at least a portion of the one side of the heat spreader.

2. The method of claim 1 , further comprising curing the adhesive.

3. The method of claim 1 , further comprising curing the adhesive and the interface material.

4. The method of claim 1 , wherein the dispensing the adhesive is dispensed around edges of the heat spreader.

5. The method of claim 1 , wherein the heat spreader includes:

a pedestal that contacts the thermal interface material, and

at least one vent through the heat spreader around an outer perimeter of the pedestal.

6. The method of claim 4 , wherein the dispensing the adhesive is performed using a nozzle that dispenses the adhesive through the vent of the heat spreader.

7. The method of claim 1 , wherein the portion of the heat spreader in contact with the interface material is a downset portion, the downset portion is positioned over the IC die inside a perimeter of wire bonds attached between the IC die and the substrate.

8. A method comprising:

attaching a semiconductor die to a substrate;

forming wire bonds between the die and the substrate;

encapsulating the wire bonds with a mold compound, wherein the mold compound is configured to expose a top surface of the die that does not include the wire bonds;

after the encapsulating, applying a first adhesive over the top surface of the die;

after the applying the first adhesive, contacting a portion of a heat spreader to the first adhesive; and

dispensing a second adhesive so that the second adhesive fills a gap between a first side of the mold compound and a first side of the heat spreader.

9. The method of claim 8 , wherein the contacting the portion of the heat spreader includes applying pressure to between the heat spreader and the substrate to establish a predetermined thickness of the first adhesive.

10. The method of claim 8 , wherein the first adhesive is a thermal interface material and the second adhesive is a material flowable by capillary action.

11. The method of claim 8 , wherein the dispensing the second adhesive includes dispensing the second adhesive around a perimeter of the heat spreader so that the second adhesive flows in the gap and is in contact with the first side of the mold compound and the first side of the heat spreader.

12. The method of claim 8 wherein the heat spreader includes a vent through a cross-section that is outside the portion of the heat spreader that is in contact with the first adhesive.

13. The method of claim 12 , wherein the dispensing the second adhesive includes dispensing the second adhesive in the vent so that the second adhesive flows in the gap and is in contact with the first side of the mold compound and the first side of the heat spreader.

14. The method of claim 8 , further comprising curing the first and second adhesives.

15. The method of claim 12 , wherein the portion of the heat spreader that is in contact with the first adhesive is a downset portion that extends toward the die from the first side of the heat spreader.

16. A method comprising:

applying a first interface material on an exposed portion of an integrated circuit (IC) die mounted on a substrate;

mounting a first portion of a heat spreader on the IC die using an interface material, the heat spreader having an opening through a second portion of the heat spreader that is outside of the first portion of the heat spreader, wherein the heat spreader has a first major surface facing the IC die and a second major surface opposite the first major surface, and wherein the opening extends through the first and second major surfaces of the heat spreader; and

dispensing an adhesive between a first side of the heat spreader and a surface of an encapsulant on the substrate, wherein the interface material is different than the adhesive.

17. The method of claim 16 , wherein the interface material has one of a group consisting of: different thermal properties than the adhesive and different mechanical properties than the adhesive.

18. The method of claim 16 , wherein the adhesive is dispensed by one of a group consisting of: around an edge of the heat spreader, and through the opening of the heat spreader.

19. The method of claim 16 , further comprising using capillary action to move the adhesive between the encapsulant and the first side of the heat spreader.

Assignments (22)
CORRECTIVE ASSIGNMENT TO CORRECT THE REMOVE APPLICATION 11759915 AND REPLACE IT WITH APPLICATION 11759935 PREVIOUSLY RECORDED ON REEL 040925 FRAME 0001. ASSIGNOR(S) HEREBY CONFIRMS THE RELEASE OF SECURITY INTEREST. Recorded Feb 17, 2020
From: MORGAN STANLEY SENIOR FUNDING, INC.
To: NXP, B.V. F/K/A FREESCALE SEMICONDUCTOR, INC.
Reel/Frame 052917/0001 →
CORRECTIVE ASSIGNMENT TO CORRECT THE REMOVE APPLICATION 11759915 AND REPLACE IT WITH APPLICATION 11759935 PREVIOUSLY RECORDED ON REEL 040928 FRAME 0001. ASSIGNOR(S) HEREBY CONFIRMS THE RELEASE OF SECURITY INTEREST. Recorded Jan 17, 2020
From: MORGAN STANLEY SENIOR FUNDING, INC.
To: NXP B.V.
Reel/Frame 052915/0001 →
CORRECTIVE ASSIGNMENT TO CORRECT THE REMOVE APPLICATION 11759915 AND REPLACE IT WITH APPLICATION 11759935 PREVIOUSLY RECORDED ON REEL 037486 FRAME 0517. ASSIGNOR(S) HEREBY CONFIRMS THE ASSIGNMENT AND ASSUMPTION OF SECURITY INTEREST IN PATENTS. Recorded Dec 10, 2019
From: CITIBANK, N.A.
To: MORGAN STANLEY SENIOR FUNDING, INC.
Reel/Frame 053547/0421 →
RELEASE OF SECURITY INTEREST Recorded Sep 10, 2019
From: MORGAN STANLEY SENIOR FUNDING, INC.
To: NXP B.V.
Reel/Frame 050744/0097 →
CORRECTIVE ASSIGNMENT TO CORRECT THE TO CORRECT THE APPLICATION NO. FROM 13,883,290 TO 13,833,290 PREVIOUSLY RECORDED ON REEL 041703 FRAME 0536. ASSIGNOR(S) HEREBY CONFIRMS THE THE ASSIGNMENT AND ASSUMPTION OF SECURITY INTEREST IN PATENTS.. Recorded Feb 20, 2019
From: MORGAN STANLEY SENIOR FUNDING, INC.
To: SHENZHEN XINGUODU TECHNOLOGY CO., LTD.
Reel/Frame 048734/0001 →
CORRECTIVE ASSIGNMENT TO CORRECT THE NATURE OF CONVEYANCE PREVIOUSLY RECORDED AT REEL: 040632 FRAME: 0001. ASSIGNOR(S) HEREBY CONFIRMS THE MERGER AND CHANGE OF NAME. Recorded Sep 21, 2017
From: FREESCALE SEMICONDUCTOR INC.
To: NXP USA, INC.
Reel/Frame 044209/0047 →
CORRECTIVE ASSIGNMENT TO CORRECT THE REMOVE PATENTS 8108266 AND 8062324 AND REPLACE THEM WITH 6108266 AND 8060324 PREVIOUSLY RECORDED ON REEL 037518 FRAME 0292. ASSIGNOR(S) HEREBY CONFIRMS THE ASSIGNMENT AND ASSUMPTION OF SECURITY INTEREST IN PATENTS. Recorded Feb 1, 2017
From: CITIBANK, N.A.
To: MORGAN STANLEY SENIOR FUNDING, INC.
Reel/Frame 041703/0536 →
CHANGE OF NAME Recorded Nov 8, 2016
From: FREESCALE SEMICONDUCTOR, INC.
To: NXP USA, INC.
Reel/Frame 040632/0001 →
RELEASE OF SECURITY INTEREST Recorded Nov 7, 2016
From: MORGAN STANLEY SENIOR FUNDING, INC.
To: NXP B.V.
Reel/Frame 040928/0001 →
RELEASE OF SECURITY INTEREST Recorded Sep 21, 2016
From: MORGAN STANLEY SENIOR FUNDING, INC.
To: NXP, B.V., F/K/A FREESCALE SEMICONDUCTOR, INC.
Reel/Frame 040925/0001 →
SUPPLEMENT TO THE SECURITY AGREEMENT Recorded Jun 16, 2016
From: FREESCALE SEMICONDUCTOR, INC.
To: MORGAN STANLEY SENIOR FUNDING, INC.
Reel/Frame 039138/0001 →
ASSIGNMENT AND ASSUMPTION OF SECURITY INTEREST IN PATENTS Recorded Jan 13, 2016
From: CITIBANK, N.A.
To: MORGAN STANLEY SENIOR FUNDING, INC.
Reel/Frame 037518/0292 →
ASSIGNMENT AND ASSUMPTION OF SECURITY INTEREST IN PATENTS Recorded Jan 12, 2016
From: CITIBANK, N.A.
To: MORGAN STANLEY SENIOR FUNDING, INC.
Reel/Frame 037486/0517 →
PATENT RELEASE Recorded Dec 21, 2015
From: CITIBANK, N.A., AS COLLATERAL AGENT
To: FREESCALE SEMICONDUCTOR, INC.
Reel/Frame 037357/0704 →
PATENT RELEASE Recorded Dec 21, 2015
From: CITIBANK, N.A., AS COLLATERAL AGENT
To: FREESCALE SEMICONDUCTOR, INC.
Reel/Frame 037357/0725 →
PATENT RELEASE Recorded Dec 21, 2015
From: CITIBANK, N.A., AS COLLATERAL AGENT
To: FREESCALE SEMICONDUCTOR, INC.
Reel/Frame 037357/0744 →
SECURITY AGREEMENT Recorded Nov 6, 2013
From: FREESCALE SEMICONDUCTOR, INC.
To: CITIBANK, N.A., AS NOTES COLLATERAL AGENT
Reel/Frame 031591/0266 →
SECURITY AGREEMENT Recorded Jun 18, 2013
From: FREESCALE SEMICONDUCTOR, INC.
To: CITIBANK, N.A., AS NOTES COLLATERAL AGENT
Reel/Frame 030633/0424 →
SUPPLEMENT TO IP SECURITY AGREEMENT Recorded May 20, 2013
From: FREESCALE SEMICONDUCTOR, INC.
To: CITIBANK, N.A., AS NOTES COLLATERAL AGENT
Reel/Frame 030445/0581 →
SUPPLEMENT TO IP SECURITY AGREEMENT Recorded May 20, 2013
From: FREESCALE SEMICONDUCTOR, INC.
To: CITIBANK, N.A., AS COLLATERAL AGENT
Reel/Frame 030445/0737 →
SUPPLEMENT TO IP SECURITY AGREEMENT Recorded May 20, 2013
From: FREESCALE SEMICONDUCTOR, INC.
To: CITIBANK, N.A., AS NOTES COLLATERAL AGENT
Reel/Frame 030445/0709 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jan 31, 2013
From: HIGGINS III, LEO M.; CARPENTER, BURTON J.
To: FREESCALE SEMICONDUCTOR, INC.
Reel/Frame 029734/0526 →
Continuity (1)
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