Methods of forming copper-based nitride liner/passivation layers for conductive copper structures and the resulting device
View Patent ↗One illustrative method disclosed herein includes forming a trench/via in a layer of insulating material, forming a barrier layer in the trench/via, forming a copper-based seed layer on the barrier layer, converting at least a portion of the copper-based seed layer into a copper-based nitride layer, depositing a bulk copper-based material on the copper-based nitride layer so as to overfill the trench/via and performing at least one chemical mechanical polishing process to remove excess materials positioned outside of the trench/via to thereby define a copper-based conductive structure. A device disclosed herein includes a layer of insulating material, a copper-based conductive structure positioned in a trench/via within the layer of insulating material and a copper-based silicon or germanium nitride layer positioned between the copper-based conductive structure and the layer of insulating material.
1. A method, comprising:
forming a trench/via in a layer of insulating material;
forming a barrier layer in at least said trench/via;
forming a copper-based seed layer on said barrier layer;
converting at least a portion of a thickness of said copper-based seed layer into a copper-based nitride layer;
depositing a bulk copper-based material above said copper-based nitride layer so as to overfill said trench/via; and
performing at least one chemical mechanical polishing process to remove excess materials positioned outside of said trench/via to thereby define a copper-based conductive structure.
2. The method of claim 1 , wherein converting said at least a portion of a thickness of said copper-based seed layer into said copper-based nitride layer comprises converting substantially an entire thickness of said copper-based seed layer into said copper-based nitride layer.
3. The method of claim 1 , wherein said copper-based nitride layer is positioned between said copper-based conductive structure and said barrier layer.
4. The method of claim 1 , wherein said barrier layer is comprised of one of tantalum, tantalum nitride, titanium, titanium nitride, cobalt or ruthenium.
5. The method of claim 1 , wherein said copper-based nitride layer is comprised of one of copper germanium nitride (Cu x GeN y ) or copper silicon nitride (Cu x SiN y ).
6. The method of claim 1 , wherein converting said at least a portion of said thickness of said copper-based seed layer into said copper-based nitride layer comprises reacting one of trigermylamine ((H 3 Ge) 3 N) or trisilylamine ((H 3 Si) 3 N) with said copper-based seed layer.
7. The method of claim 6 , wherein reacting one of trigermylamine ((H 3 Ge) 3 N) or trisilylamine ((H 3 Si) 3 N) with said copper-based seed layer comprises performing one of a thermal or plasma based process that is performed at a temperature that falls within the range of about 40-500° C.
8. The method of claim 1 , wherein converting said at least a portion of said thickness of said copper-based seed layer into said copper-based nitride layer comprises performing a plasma process in the presence of one of germane (GeH 4 ) or silane (SiH 4 ) and a nitrogen-containing gas.
9. The method of claim 1 , wherein converting said at least a portion of said thickness of said copper-based seed layer into said copper-based nitride layer comprises performing a plasma doping process whereby germanium or silicon and nitrogen are introduced into said copper-based seed layer.
10. The method of claim 9 , wherein said plasma doping process is performed at a temperature that falls within the range of about 40-500° C.
11. A method, comprising:
forming a trench/via in a layer of insulating material;
forming a barrier layer in at least said trench/via;
performing a copper deposition process to form a copper-based seed layer on said barrier layer;
forming a copper-based nitride layer on said copper-based seed layer by introducing a germanium-containing gas or a silicon-containing gas and a nitrogen-containing gas during at least a portion of said copper deposition process;
depositing a bulk copper-based material on said copper-based nitride layer so as to overfill said trench/via; and
performing at least one chemical mechanical polishing process to remove excess materials positioned outside of said trench/via to thereby define a copper-based conductive structure.
12. The method of claim 11 , wherein forming said copper-based nitride layer comprises converting substantially an entire thickness of said copper-based seed layer into said copper-based nitride layer.
13. The method of claim 11 , wherein said copper-based nitride layer is positioned between said copper-based conductive structure and said barrier layer.
14. The method of claim 11 , wherein said barrier layer is comprised of one of tantalum, tantalum nitride, titanium, titanium nitride, cobalt or ruthenium.
15. The method of claim 11 , wherein said copper-based nitride layer is comprised of one of copper germanium nitride (Cu x GeN y ) or copper silicon nitride (Cu x SiN y ).