Trap rich layer with through-silicon-vias in semiconductor devices
View Patent ↗An integrated circuit chip is formed with a circuit layer, a trap rich layer and through-semiconductor-vias. The trap rich layer is formed above the circuit layer. The through-semiconductor-vias are also formed above the circuit layer. In some embodiments, the circuit layer is included in a wafer, and the trap rich layer and through-semiconductor-vias are included in another wafer. The two wafers are bonded together after formation of the trap rich layer and through-semiconductor-vias. Additionally, in some embodiments, yet another wafer may also be bonded to the wafer that includes the trap rich layer and through-semiconductor-vias. Furthermore, in some embodiments, another circuit layer may be formed in the wafer that includes the trap rich layer and through-semiconductor-vias.
1. An integrated circuit chip comprising:
a first circuit layer;
a trap-rich layer located above the first circuit layer;
a substrate having a first surface and a second surface, the substrate comprising:
a via hole having an inside surface extending from the first surface of the substrate to its second surface; and
a conductor disposed inside the via hole;
a second circuit layer located above the substrate;
wherein the substrate is located above the trap-rich layer; and
wherein the first circuit layer is electrically coupled with the conductor to the second circuit layer.
2. The integrated circuit chip of claim 1 further comprising:
a second trap-rich layer disposed between the substrate and the second circuit layer.
3. The integrated circuit chip of claim 1 further comprising:
a second trap-rich layer disposed between the inside surface of the via hole and the conductor.
4. The integrated circuit chip of claim 3 wherein the first and second trap-rich layers comprise polycrystalline semiconductor material or a layer of high-resistivity silicon.
5. The integrated circuit chip of claim 1 wherein the first circuit layer comprises:
an insulating layer having a first surface and a second surface; and
a first circuit-element layer contacting the first surface of the insulating layer.
6. The integrated circuit chip of claim 5 further comprising:
a metal bond pad formed on the second surface of the insulating layer, the metal bond pad being electrically connected to the first circuit layer.
7. The integrated circuit chip of claim 6 further comprising:
a passive layer coupled to the second surface of the insulating layer.
8. The integrated circuit chip of claim 1 wherein the second circuit layer comprises active and passive devices.
9. The integrated circuit chip of claim 1 wherein the second circuit layer comprises passive devices and does not comprise active devices.
10. The integrated circuit chip of claim 1 wherein the first circuit layer is directly electrically connected with the conductor to the second circuit layer.
11. The integrated circuit chip of claim 1 , further comprising:
a second substrate comprising the first circuit layer; and
a metal pad located inside a second via hole, the metal pad being electrically connected to the first circuit layer;
wherein the second via hole extends through said second substrate.
12. The integrated circuit chip of claim 11 , further comprising:
an insulating layer having a first surface and a second surface;
wherein the first circuit layer is in contact with the first surface of the insulating layer; and
wherein the first circuit layer and insulating layer are part of a layer transfer structure.
13. The integrated circuit chip of claim 11 , further comprising: a passivation layer in contact with the second surface of the insulating layer.
14. The integrated circuit chip of claim 11 , wherein the substrate comprises a polycrystalline semiconductor.