IP Library Granted Patent US 8,822,615
Granted Patent B1
US 8,822,615 · App. 13/762,749 · Granted Sep 2, 2014

Block copolymer composition and methods relating thereto

View Patent ↗
Loading inventors, assignments & file history…
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this patent's details
Quick Facts
Patent No.
US 8,822,615
App. No.
13/762,749
Granted
Sep 2, 2014
Kind
B1
Abstract

A copolymer composition is provided including a block copolymer having a poly(acrylate) block and a poly(silyl acrylate) block; wherein the block copolymer exhibits a number average molecular weight, M N , of 1 to 1,000 kg/mol; and, wherein the block copolymer exhibits a polydispersity, PD, of 1 to 2. Also provided are substrates treated with the copolymer composition.

Claims (38)

1. A copolymer composition, comprising:

a block copolymer having a poly(acrylate) block and a poly(silyl acrylate) block; and,

an antioxidant;

wherein the block copolymer exhibits a number average molecular weight, M N , of 1 to 1,000 kg/mol; wherein the copolymer composition contains ≧2 wt % antioxidant (based on the weight of the block copolymer) and,

wherein the block copolymer exhibits a polydispersity, PD, of 1 to 2.

2. The copolymer composition of claim 1 , wherein the copolymer composition contains 5 to 30 wt % antioxidant (based on the weight of the block copolymer).

3. The copolymer composition of claim 1 , wherein the antioxidant is selected from the group consisting of:

an antioxidant containing at least one 2,6-di-tert-butylphenol moiety;

an antioxidant containing at least one moiety according to the formula

an antioxidant containing at least one moiety according to the formula

an antioxidants containing at least one moiety according to the formula

mixtures thereof.

4. The copolymer composition of claim 1 , wherein the antioxidant is selected from the group consisting of

mixtures thereof.

5. The copolymer composition of claim 1 ,

wherein the poly(acrylate) block includes residues from at least one of an acrylate monomer, a deuterated acrylate monomer, an acrylate block modifying monomer and a deuterated acrylate block modifying monomer; wherein the poly(acrylate) block includes >75 wt % of acrylate monomer derived units; wherein the acrylate monomer is selected from the group consisting of C 6-14 aryl (C 1-5 alkyl)acrylate; C 1-5 alkyl (C 1-5 alkyl)acrylate; wherein the deuterated acrylate monomer is selected from the group consisting of deuterated C 6-14 aryl (C 1-5 alkyl)acrylate; deuterated C 1-5 alkyl (C 1-5 alkyl)acrylate; wherein the acrylate block modifying monomer is selected from the group consisting of a C 1-5 alkene and a C 3-7 cycloalkene; wherein the deuterated acrylate block modifying monomer is selected from a deuterated C 1-5 alkene and deuterated a C 3-7 cycloalkene; and,

wherein the poly(silyl acrylate) block includes residues from at least one of a silyl acrylate monomer, a deuterated silyl acrylate monomer, a silyl acrylate block modifying monomer and a deuterated silyl acrylate block modifying monomer; wherein the poly(silyl acrylate) block includes >75 wt % silyl acrylate monomer derived units; wherein the silyl acrylate monomer is according to the following formula

(R 1 )(R 2 )(R 3 )Si) r R 4 x OOCC(R 5 )═CR 6 2

wherein each R 1 , R 2 and R 3 is independently selected from the group consisting of a C 1-6 alkyl group, a silylated C 1-6 alkyl group, an oxy C 1-6 alkyl group, an oxy silylated C 1-6 alkyl group, a C 6-10 aryl group, an oxy C 6-10 aryl group, a silylated C 6-10 aryl group, an oxy silylated C 6-10 aryl group, a C 1-10 arylalkyl group, an oxy C 1-10 arylalkyl group, a silylated C 1-10 arylalkyl group, an oxy silylated C 1-10 arylalkyl group, a C 6-10 alkylaryl group, an oxy C 6-10 alkylaryl group, a silylated C 6-10 alkylaryl group, an oxy silylated C 6-10 alkylaryl group; wherein r is selected from the group consisting of 0, 1, 2 and 3; wherein R 4 is selected from the group consisting of a C 1-3 alkyl; wherein x is selected from the group consisting of 0 and 1; wherein R 5 is selected from the group consisting of a hydrogen and a methyl group; wherein each R 6 is a hydrogen; wherein the silyl acrylate monomer includes at least one Si atom; wherein the deuterated silyl acrylate monomer is according to the following formula

(R 7 (R 8 )(R 9 )Si) t R 10 y OOCC(R 11 )═CR 12 2

wherein each R 7 , R 8 and R 9 is independently selected from a C 1-6 alkyl group, a silylated C 1-6 alkyl group, an oxy C 1-6 alkyl group, an oxy silylated C 1-6 alkyl group, a C 6-10 aryl group, an oxy C 6-10 aryl group, a silylated C 6-10 aryl group, an oxy silylated C 6-10 aryl group, a C 1-10 arylalkyl group, an oxy C 1-10 arylalkyl group, a silylated C 1-10 arylalkyl group, an oxy silylated C 1-10 arylalkyl group, a C 6-10 alkylaryl group, an oxy C 6-10 alkylaryl group, a silylated C 6-10 alkylaryl group, an oxy silylated C 6-10 alkylaryl group, a deuterated C 1-6 alkyl group, a deuterated silylated C 1-6 alkyl group, a deuterated oxy C 1-6 alkyl group, a deuterated oxy silylated C 1-6 alkyl group, a deuterated C 6-10 aryl group, a deuterated oxy C 6-10 aryl group, a deuterated silylated C 6-10 aryl group, a deuterated oxy silylated C 6-10 aryl group, a deuterated C 1-10 arylalkyl group, a deuterated oxy C 1-10 arylalkyl group, a deuterated silylated C 1-10 arylalkyl group, a deuterated oxy silylated C 1-10 arylalkyl group, a deuterated C 6-10 alkylaryl group, a deuterated oxy C 6-10 alkylaryl group, a deuterated silylated C 6-10 alkylaryl group and a deuterated oxy silylated C 6-10 alkylaryl group; wherein t is selected from the group consisting of 0, 1, 2 and 3; wherein R 10 is selected from the group consisting of a C 1-3 alkyl group, and a deuterated C 1-3 alkyl; wherein y is 0 or 1; wherein R 11 is selected from the group consisting of a hydrogen, a deuterium, a methyl group and a deuterated methyl group; wherein each R 12 is selected from a hydrogen and a deuterium; wherein the deuterated silyl acrylate monomer contains at least one Si atom; and, wherein the deuterated silyl acrylate monomer contains at least one deuterium; wherein the silyl acrylate block modifying monomer is selected from the group consisting of an alkene and a cycloalkene; and, wherein the deuterated silyl acrylate block modifying monomer is selected from the group consisting of a deuterated alkene and a deuterated cycloalkene.

6. The copolymer composition of claim 5 , wherein the copolymer composition contains 5 to 30 wt % antioxidant (based on the weight of the block copolymer).

7. The copolymer composition of claim 5 ,

wherein the acrylate monomer is selected from the group consisting of butyl (meth)acrylate, propyl (meth)acrylate), ethyl (meth)acrylate, methyl (meth)acrylate; wherein the deuterated acrylate monomer is selected from the group consisting of deuterated butyl (meth)acrylate, deuterated propyl (meth)acrylate), deuterated ethyl (meth)acrylate, deuterated methyl (meth)acrylate; wherein the acrylate block modifying monomer is ethylene; and, wherein the deuterated acrylate block modifying monomer is deuterated ethylene; and,

wherein the silyl acrylate monomer is selected from the group consisting of (trimethylsilyl)methyl (meth)acrylate, (triethylsilyl)methyl (meth)acrylate, (tripropylsilyl)methyl (meth)acrylate, (triisopropylsilyl)methyl (meth)acrylate, (tributylsilyl)methyl (meth)acrylate, (tri-sec-butylsilyl)methyl (meth)acrylate, (triisobutylsilyl)methyl (meth)acrylate, (sec-butylmethylsilyl)methyl (meth)acrylate, (sec-butyldimethylsilyl)methyl (meth)acrylate, (dimethylpropylsilyl)methyl (meth)acrylate, (monomethyldipropylsilyl)methyl (meth)acrylate, (methylethylpropylsilyl)methyl (meth)acrylate, bis(trimethylsilyl)methyl (meth)acrylate, tris(trimethylsilyl)methyl (meth)acrylate, (pentamethyldisilyl)methyl (meth)acrylate, tris(trimethylsiloxy)methyl (meth)acrylate, tris(trimethylsiloxy)propyl (meth)acrylate), (pentamethyldisiloxy)methyl (meth)acrylate, (pentamethyldisiloxy)propyl (meth)acrylate, (trimethoxysilyl)propyl (meth)acrylate and (triethoxysilyl)propyl (meth)acrylate; wherein the deuterated silyl acrylate monomer is selected from the group consisting of deuterated (trimethylsilyl)methyl (meth)acrylate, deuterated (triethylsilyl)methyl (meth)acrylate, deuterated (tripropylsilyl)methyl (meth)acrylate, deuterated (triisopropylsilyl)methyl (meth)acrylate, deuterated (tributylsilyl)methyl (meth)acrylate, deuterated (tri-sec-butylsilyl)methyl (meth)acrylate, deuterated (triisobutylsilyl)methyl (meth)acrylate, deuterated (sec-butylmethylsilyl)methyl (meth)acrylate, deuterated (sec-butyldimethylsilyl)methyl (meth)acrylate, deuterated (dimethylpropylsilyl)methyl (meth)acrylate, deuterated (monomethyldipropylsilyl)methyl (meth)acrylate, deuterated (methylethylpropylsilyl)methyl (meth)acrylate, deuterated bis(trimethylsilyl)methyl (meth)acrylate, deuterated tris(trimethylsilyl)methyl (meth)acrylate, deuterated (pentamethyldisilyl)methyl (meth)acrylate, deuterated tris(trimethylsiloxy)methyl (meth)acrylate, deuterated tris(trimethylsiloxy)propyl (meth)acrylate), deuterated (pentamethyldisiloxy)methyl (meth)acrylate, deuterated (pentamethyldisoloxy)propyl (meth)acrylate, deuterated (trimethoxysilyl)propyl (meth)acrylate and deuterated (triethoxysilyl)propyl (meth)acrylate; wherein silyl acrylate block modifying monomer is ethylene; and, wherein the deuterated silyl acrylate block modifying monomer is selected from a deuterated ethylene.

8. The copolymer composition of claim 7 ,

wherein the poly(acrylate) block includes >95 wt % of acrylate monomer derived units, wherein the acrylate monomer is methyl (meth)acrylate; and,

wherein the poly(silyl acrylate) block includes >95 wt % of silyl acrylate monomer derived units, wherein the silyl acrylate monomer is (trimethylsilyl)methyl methacrylate.

9. The copolymer composition of claim 8 , wherein the copolymer composition contains 5 to 30 wt % antioxidant (based on the weight of the block copolymer).

10. A method comprising:

providing a substrate;

providing a copolymer composition according to claim 1 ;

applying a film of the copolymer composition to the substrate;

optionally, baking the film;

annealing the film, leaving a pattern of poly(acrylate) domains and poly(silyl acrylate) domains;

treating the annealed film to remove the poly(acrylate) domains from the annealed film and to convert the poly(silyl acrylate) domains in the annealed film to SiO x .

11. A copolymer composition, comprising: a block copolymer having a poly(acrylate) block and a poly(silyl acrylate) block; wherein the block copolymer exhibits a number average molecular weight, M N , of 1 to 1,000 kg/mol; wherein the block copolymer exhibits a polydispersity, PD, of 1 to 2; and, wherein the block copolymer contains ≦75 wt % of a poly(methyl methacrylate)-block-poly((trimethylsilyl)methyl methacrylate) diblock copolymer.

12. The copolymer composition of claim 11 , wherein the block copolymer contains <0.001 wt % of a poly(methyl methacrylate)-block-poly((trimethylsilyl)methyl methacrylate) diblock copolymer.

Assignments (6)
SECURITY INTEREST Recorded Nov 3, 2025
From: QNITY ELECTRONICS, INC.
To: JPMORGAN CHASE BANK, N.A., AS COLLATERAL AGENT
Reel/Frame 073515/0243 →
SECURITY INTEREST Recorded Nov 3, 2025
From: QNITY ELECTRONICS, INC.
To: U.S. BANK TRUST COMPANY, NATIONAL ASSOCIATION, AS NOTES COLLATERAL AGENT
Reel/Frame 073517/0298 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Sep 17, 2024
From: DOW GLOBAL TECHNOLOGIES LLC
To: THE DOW CHEMICAL COMPANY
Reel/Frame 068971/0226 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Sep 17, 2024
From: THE DOW CHEMICAL COMPANY
To: DDP SPECIALTY ELECTRONIC MATERIALS US, INC
Reel/Frame 068971/0362 →
CHANGE OF LEGAL ENTITY Recorded Sep 17, 2024
From: DDP SPECIALTY ELECTRONIC MATERIALS US, INC
To: DDP SPECIALTY ELECTRONIC MATERIALS US, LLC
Reel/Frame 068972/0210 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jul 21, 2014
From: HUSTAD, PHILLIP D.; GU, XINYU; VOGEL, ERIN B.; GINZBURG, VALERIY V.; MURRAY, DANIEL J.; TREFONAS, PETER; CHANG, SHIH-WEI
To: ROHM AND HAAS ELECTRONIC MATERIALS LLC; DOW GLOBAL TECHNOLOGIES LLC
Reel/Frame 033354/0502 →