Granted Patent B2

US 8,951,863 · App. 13/780,591 · Granted Feb 10, 2015

Abstract

Claims (66)

1. A method of forming an NVM cell and a logic transistor using a semiconductor substrate, comprising:

in a non-volatile memory (NVM) region, forming over the semiconductor substrate a first thermally-grown oxygen-containing layer, a select gate of a first material, and a first dielectric layer, wherein the select gate is on the first thermally-grown oxygen-containing layer, a top surface of the first dielectric layer is substantially aligned with a top surface of the select gate, and the first dielectric layer has a first opening in which the select gate is present in the first opening;

in a logic region, after forming the first thermally-grown oxygen-containing layer, forming over the semiconductor substrate a high-k dielectric layer, a work-function-setting layer over the high-k dielectric layer, a dummy gate on the work-function-setting layer, source/drains in the semiconductor substrate, a sidewall spacer around the dummy gate, and a second dielectric layer, wherein a top surface of the second dielectric layer is substantially aligned with a top surface of the dummy gate, and the second dielectric layer has a second opening in which the dummy gate is present in the second opening;

replacing the dummy gate with a metal gate;

removing the first dielectric layer in the NVM region while leaving the second dielectric layer in the logic region;

forming a charge storage layer over the NVM region including over the select gate;

forming a conductive layer over the charge storage layer;

etching the conductive layer to form a control gate; and

etching the charge storage layer to leave a remaining portion of the charge storage layer aligned to the control gate.

2. The method of claim 1 , wherein:

the forming the charge storage layer is further characterized by forming nanocrystals over the second dielectric layer and the metal gate; and

the etching the charge storage layer is further characterized by removing the charge storage layer over the second dielectric layer and the metal gate.

3. The method of claim 2 , wherein:

the step of forming the conductive layer is further characterized by forming the conductive layer over the logic region; and

the step of patterning the conductive layer is further characterized by removing the conductive layer over the logic region.

4. The method of claim 3 , wherein the forming the first dielectric layer and forming the second dielectric layer are further characterized as forming the first dielectric and the second dielectric layers simultaneously of a same material.

5. The method of claim 1 , further comprising forming a first silicide region on the source and a second silicide region on the drain of the logic transistor prior to the forming of the second dielectric layer.

6. The method of claim 5 , further comprising:

forming a first source/drain adjacent the control gate, a second source/drain ( 66 ) adjacent the select gate, and siliciding the first and second source/drains.

7. The method of claim 1 , further comprising:

forming a liner around the dummy gate prior to the forming the sidewall spacer.

8. The method of claim 7 , further comprising:

forming a hard mask over the NVM region and the logic region prior to the removing the first dielectric layer.

9. The method of claim 8 , further comprising removing the hard mask from over the NVM region while leaving the hard mask over the logic region prior to removing the first dielectric layer.

10. The method of claim 1 , wherein the first material comprises polysilicon.

11. The method of claim 1 , wherein:

the forming the metal gate comprises removing the dummy gate to form an opening, filling the opening with metal, and performing chemical mechanical polishing.

12. The method of claim 1 , wherein the forming the charge storage layer comprises forming a layer of silicon nitride.

13. The method of claim 1 , wherein the forming the charge storage layer comprises:

forming a base dielectric layer;

forming nanocrystals on the base dielectric layer; and

forming a fill dielectric layer around and over the nanocrystals.

14. The method of claim 1 , wherein the forming the charge storage layer comprises forming a layer of silicon nitride.

15. A method of forming a non-volatile memory (NVM) cell and a logic transistor using a semiconductor substrate, comprising:

forming a polysilicon select gate over a first thermally-grown oxygen-containing layer, a work-function-setting layer over a high-k dielectric, and a dummy gate over the work-function-setting layer;

after forming the first thermally-grown oxygen-containing layer, forming a sidewall spacer around the dummy gate;

forming source/drains in the semiconductor substrate adjacent to the dummy gate;

forming a dielectric layer around the polysilicon select gate and the dummy gate wherein a top surface of the dielectric layer is substantially aligned with a top surface of the polysilicon select gate and a top surface of the dummy gate;

removing the dummy gate;

replacing the dummy gate with a metal gate to form a logic gate comprising the work-function-setting material and the metal gate;

forming a hard mask over the logic gate;

removing the dielectric layer from around the polysilicon select gate while leaving the dielectric layer around the logic gate;

forming a charge storage layer over the semiconductor substrate;

forming a conductive layer over the charge storage layer;

etching the conductive layer to form a control gate over a portion of the charge storage layer and removing the conductive layer from over the hard mask;

etching the charge storage layer to leave a portion of the charge storage layer under the control gate and removing the charge storage layer from over the hard mask; and

forming second source/drains in the substrate adjacent to the select gate and control gate.

16. The method of claim 15 , further comprising removing the hard mask.

17. The method of claim 16 further comprising siliciding the second source/drains prior to the removing the hard mask.

18. The method of claim 17 further comprising siliciding the first source/drains prior to the forming the dielectric layer.

19. The method of claim 15 , wherein the forming a charge storage layer comprises forming a nanocrystal-containing charge storage layer.

20. A method, comprising:

in an NVM region of the semiconductor substrate, forming a polysilicon select gate of a non-volatile memory (NVM) cell on a first thermally-grown oxygen-containing layer, and in a logic region of a semiconductor substrate, forming a work-function-setting material on a high-k gate dielectric and a polysilicon dummy gate on the work-function-setting material;

forming a sidewall spacer around the polysilicon dummy gate and silicided source/drains adjacent the sidewall spacer;

forming a dielectric having a top surface that is substantially aligned to a top surface of the polysilicon select gate and a top surface of the polysilicon dummy gate;

replacing the polysilicon dummy gate with a metal gate;

removing the dielectric from around the polysilicon select gate;

forming a charge storage layer over the logic region and the NVM region;

forming a conductive layer over the logic region and the NVM region;

etching the conductive layer over the NVM region to form a control gate over the charge storage layer and removing the conductive layer from the logic region;

etching the charge storage layer to leave the charge storage layer under and aligned with the control gate and to remove the charge storage layer over the logic region; and

forming source/drain regions in the substrate in the NVM region adjacent to the control gate and to the polysilicon select gate.

21. The method of claim 20 further comprising:

forming a hard mask over the logic region prior to the removing the dielectric from around the polysilicon select gate;

siliciding the source/drain regions in the substrate in the NVM region; and

removing the hard mask after the siliciding the source/drain regions in the substrate in the NVM region.

Assignments (30)