IP Library Granted Patent US 8,907,337
Granted Patent B2
US 8,907,337 · App. 13/791,599 · Granted Dec 9, 2014

Inorganic-organic hybrid thin-film transistors using inorganic semiconducting films

Inventors: Tobin J. Marks (Evanston, IL); Antonio Facchetti (Chicago, IL); Lian Wang (Evanston, IL); Myung-Han Yoon (Evanston, IL); Yu Yang (Santa Clara, CA)
Assignee: Northwestern University
H01L51/0562B82Y30/00H01L29/78681H01L29/7869B82Y10/00
View Patent ↗
Loading inventors, assignments & file history…
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this patent's details
Quick Facts
Patent No.
US 8,907,337
App. No.
13/791,599
Granted
Dec 9, 2014
Kind
B2
Abstract

Inorganic semiconducting compounds, composites and compositions thereof, and related device structures.

Claims (20)

1. A metal oxide thin film transistor device comprising a substrate, a gate conductor, source-drain contacts, and an inorganic-organic hybrid thin film composition comprising an inorganic semiconductor layer coupled to an organic layer, wherein the inorganic semiconductor layer is a channel layer and comprises a metal oxide comprising indium.

2. The device of claim 1 , wherein the inorganic semiconductor layer comprises a metal oxide comprising indium and one or more metals independently selected from a Group 12 metal, a Group 13 metal, and a Group 14 metal.

3. The device of claim 1 , wherein the organic layer comprises chemical moieties that can promote substrate sorption, condensation, or intermolecular crosslinking.

4. The device of claim 1 , wherein the organic layer comprises hydrolyzable moieties.

5. The device of claim 1 , wherein the organic layer comprises a polymeric component, a π-polarizable component, or a combination thereof.

6. The device of claim 5 , wherein the organic layer comprises a polymeric component comprising a polymer selected from poly(vinylphenol), polystyrene, and copolymers thereof.

7. The device of claim 5 , wherein the organic layer comprises a polymer blend, the polymer blend comprising a polymeric component and a component promoting substrate sorption, condensation, or intermolecular crosslinking.

8. The device of claim 5 , wherein the organic layer comprises a π-polarizable component that is coupled to at least one of a silyl moiety and a siloxane moiety.

9. The device of claim 8 , wherein the π-polarizable component comprises a non-linear optical chromophore.

10. The device of claim 5 , wherein the organic layer comprises a multi-layered composition, the multi-layered composition comprising periodically alternating layers of different materials.

11. The device of claim 10 , wherein at least some of the periodically alternating layers are coupled to an adjacent layer by a coupling layer comprising a siloxane matrix.

12. The device of claim 1 , wherein the substrate comprises a transparent material and is coupled to the inorganic-organic hybrid thin film composition.

13. The device of claim 12 , wherein the device is a completely transparent thin film transistor device.

14. The device of claim 1 , wherein the substrate comprises a flexible plastic material and is coupled to the inorganic-organic hybrid thin film composition.

15. The device of claim 14 , wherein the device is bendable up to a bending radius of curvature of about 4 cm without residual effects.

16. The device of claim 1 , wherein the inorganic semiconductor layer is physically adhered to the organic layer.

17. The device of claim 1 , wherein the inorganic semiconductor layer is physically adhered to the organic layer by adsorption.

18. The device of claim 1 , wherein the organic layer is chemically bonded to the inorganic semiconductor layer.

19. The device of claim 1 , wherein the device operates at an operating voltage (V G ) between about 1 V and about 20 V.

20. The device of claim 1 , wherein the device exhibits a field-effect mobility of greater than about 100 cm 2 V −1 s −1 at an operating voltage (V G ) between about 1 V and about 2 V.

Assignments (3)
CONFIRMATORY LICENSE Recorded Jan 6, 2015
From: NORTHWESTERN UNIVERSITY
To: NATIONAL SCIENCE FOUNDATION
Reel/Frame 034726/0805 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Nov 5, 2014
From: YOON, MYUNG-HAN
To: NORTHWESTERN UNIVERSITY
Reel/Frame 034109/0380 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jun 26, 2013
From: MARKS, TOBIN J.; FACCHETTI, ANTONIO; WANG, LIAN; YANG, YU
To: NORTHWESTERN UNIVERSITY
Reel/Frame 030693/0150 →
Continuity (4)
Continuation 13351050 · Jan 16, 2012
Continuation 11642217 · Dec 20, 2006
Provisional Application 60752159 · Dec 20, 2005
Related Publication 20130193421A1 · Aug 1, 2013