Granted Patent B2

US 9,118,334 · App. 13/839,079 · Granted Aug 25, 2015

Abstract

Claims (30)

1. A MEMS resonator system comprising:

a MEMS resonator having a movable member configured to oscillate at a natural resonant frequency;

an oscillator configured to provide a series of pulses having a frequency near the natural resonant frequency of the MEMS resonator and a duration; and,

kick start circuitry electronically coupled to the oscillator and the MEMS resonator, wherein the kick start circuitry is configured to receive the series of pulses from the oscillator, and provide the series of pulses to the MEMS resonator, wherein the frequency of the series of pulses is within 250 Hz of the natural frequency of the MEMS resonator.

2. A MEMS resonator system comprising:

a MEMS resonator having a movable member configured to oscillate at a natural resonant frequency;

an oscillator configured to provide a series of pulses having a frequency near the natural resonant frequency of the MEMS resonator and a duration;

kick start circuitry electronically coupled to the oscillator and the MEMS resonator, wherein the kick start circuitry is configured to receive the series of pulses from the oscillator, and provide the series of pulses to the MEMS resonator; and,

inverter circuitry electronically coupled to the kick start circuitry and the MEMS resonator, wherein the inverter circuitry is configured to receive the series of pulses as an input and provide the complement of the series of pulses as an output to the MEMS resonator.

3. A MEMS resonator system comprising:

a MEMS resonator having a movable member configured to oscillate at a natural resonant frequency and having a MEMS output and first and second MEMS inputs;

feedback circuitry electronically coupled to the MEMS output and configured to alter the phase and amplify the magnitude of a signal provided at the MEMS output to provide an altered signal;

an oscillator configured to provide a series of pulses having a frequency near the natural resonant frequency of the MEMS resonator and a having a duration;

kick start circuitry electronically coupled to the oscillator, wherein the kick start circuitry is configured to receive the series of pulses from the oscillator, and provide the series of pulses as an output;

an inverter electronically coupled to the kick start circuitry and configured to receive the series of pulses as an input and provide the complement of the series of pulses as a complementary series of pulses;

a switch electronically coupled to the feedback circuitry, kick start circuitry, and inverter, wherein the switch is configured to switch between providing the series of pulses and complementary series of pulses or the altered signal as a switched output;

driver circuitry electronically coupled to the switch and the first and second MEMS inputs of the MEMS resonator, wherein the driver circuitry is configured to provide the series of pulses to the first MEMS input and the complementary series of pulses to the second MEMS input when the switch provides the series of pulses and complementary series of pulses to the driver circuitry.

4. The MEMS resonator system as claimed in claim 3 , wherein the series of pulses has a fundamental frequency within 250 Hz of the natural frequency of the MEMS resonator.

5. A MEMS resonator system, as claimed in claim 3 , wherein the kick start circuitry is configured to provide a pre-determined number of pulses in the series of pulses to the MEMS resonator.

6. A method of accelerating the startup time of MEMS resonators in a system comprising a MEMS resonator and kick start circuitry, comprising:

generating a stream of pulses having a fundamental frequency near the resonant frequency of the MEMS resonator;

electronically coupling the stream of pulses to the MEMS resonator to provide to the MEMS resonator a pre-determined number of pulses sufficient to cause the MEMS resonator to oscillate at the resonant frequency of the MEMS resonator;

decoupling the stream of pulses from the MEMS resonator; and,

further including the steps of inverting the stream of pulses to create a complement of the stream of pulses, and electronically coupling the complement of the stream of pulses to the MEMS resonator.

7. A method of accelerating the startup time of MEMS resonators in a system comprising a MEMS resonator and kick start circuitry, comprising:

generating a stream of pulses having a fundamental frequency near the resonant frequency of the MEMS resonator;

electronically coupling the stream of pulses to the MEMS resonator to provide to the MEMS resonator a pre-determined number of pulses sufficient to cause the MEMS resonator to oscillate at the resonant frequency of the MEMS resonator;

decoupling the stream of pulses from the MEMS resonator; and,

further including the step of electronically coupling feedback circuitry to the MEMS resonator subsequent to the decoupling of the stream of pulses, wherein the feedback circuitry is configured to alter at least one of a phase and amplitude of a signal provided at an output of the MEMS resonator, and provide the altered signal to the input of the MEMS resonator.

8. A MEMS resonator system as claimed in claim 2 , wherein the kick start circuitry and feedback circuitry are electronically coupled to the MEMS resonator via a switch, and wherein the inverter circuitry is electronically coupled to the kick start circuitry and the MEMS resonator via the switch, and wherein the switch is further configured to select between providing of the series of pulses and complementary pulses, and the altered signal, to the MEMS resonator.

Assignments (25)