Semiconductor-on-insulator integrated circuit with interconnect below the insulator
View Patent ↗An integrated circuit fabricated on a semiconductor-on-insulator transferred layer is described. The integrated circuit includes an interconnect layer fabricated on the back side of the insulator. This interconnect layer connects active devices to each other through holes etched in the insulator. This structure provides extra layout flexibility and lower capacitance, thus enabling higher speed and lower cost integrated circuits.
1. A method of forming an integrated circuit assembly, the method comprising:
providing a semiconductor-on-insulator including:
an insulating layer having a first surface and a second surface;
a semiconductor layer having a first surface and a second surface, wherein the first surface of the semiconductor layer contacts the first surface of the insulating layer; and
a substrate layer contacting the second surface of the insulating layer;
forming transistors in the semiconductor layer;
coupling the second surface of the semiconductor layer to a handle layer;
removing the substrate layer;
forming a hole in the insulator layer, wherein the hole in the insulator layer extends from the second surface to the first surface of the insulator layer and exposes the first surface of the semiconductor layer; and
forming a metal interconnect layer on the second surface of the insulator layer, wherein the metal interconnect layer is disposed within the hole in the insulating layer, and wherein the metal interconnect layer electrically couples a plurality of the transistors to each other.
2. The method of claim 1 , further comprising, before the step of coupling the second surface of the semiconductor layer to a handle layer, forming a second metal interconnect layer coupled to the second surface of the semiconductor layer.
3. The method of claim 2 , wherein the second metal interconnect layer comprises a refractory metal.
4. The method of claim 1 , wherein the step of forming transistors in the semiconductor layer comprises forming a plurality of heavily doped regions extending from the second surface to the first surface of the semiconductor layer.
5. The method of claim 4 , wherein the hole in the insulator layer exposes at least one of the heavily doped regions extending from the second surface to the first surface of the semiconductor layer.
6. The method of claim 1 , further comprising, after the step of forming the hole in the insulator layer, introducing an active dopant into the semiconductor layer through the hole.
7. The method of claim 6 , wherein the step of introducing an active dopant into the semiconductor layer comprises:
implanting the dopant through the hole; and
annealing the structure.
8. The method of claim 1 ,
wherein the step of forming transistors in the semiconductor layer comprises forming regions of a metal-semiconductor compound on the second surface of the semiconductor layer; and
further comprising, after the step of forming the hole in the insulator layer, extending the hole in the insulator layer by removing a portion of the semiconductor layer within the hole so as to expose the region of the metal-semiconductor compound.
9. The method of claim 8 , wherein the metal-semiconductor compound comprises a metal silicide.
10. The method of claim 1 , wherein the semiconductor layer comprises silicon.
11. The method of claim 1 ,
wherein the step of forming transistors in the semiconductor layer comprises forming a field-effect transistor; and
wherein the hole in the insulating layer exposes a source region or a drain region of the field-effect transistor.
12. The method of claim 1 ,
wherein the step of forming transistors in the semiconductor layer comprises forming field-effect transistors; and
wherein the metal interconnect layer electrically couples only to drain regions of the field-effect transistors.
13. The method of claim 1 ,
wherein the plurality of transistors are electrically coupled to each other via the metal interconnect and an additional circuit element.