Adhesive bonding technique for use with capacitive micro-sensors
A micro-sensor device that includes a passivation-protected ASIC module and a micro-sensor module bonded to a patterned cap provides protection for signal conditioning circuitry while allowing one or more sensing elements in the micro-sensor module to be exposed to an ambient environment. According to a method of fabricating the micro-sensor device, the patterned cap can be bonded to the micro-sensor module using a planarizing adhesive that is chemically compatible with the sensing elements. In one embodiment, the adhesive material is the same material used for the dielectric active elements, for example, a photo-sensitive polyimide film.
1. A method of bonding a cap substrate to a sensor substrate, the method comprising:
covering the sensor substrate with a passivation layer;
patterning the passivation layer to expose bonding regions of the sensor substrate
dispensing a volume of a photo-sensitive adhesive so that the photo-sensitive adhesive flows into the bonding regions to coat the sensor substrate, the photo-sensitive adhesive made of an electrically insulating material;
patterning the photo-sensitive adhesive;
patterning the cap substrate;
aligning the cap substrate to the sensor substrate; and
applying pressure to the cap substrate, the photo-sensitive adhesive, and the sensor substrate at a temperature that is lower than a characteristic temperature of the photo-sensitive adhesive, to bond the cap substrate to the sensor substrate using the electrically insulating material to electrically isolate the cap substrate from the sensor substrate.
2. The method of claim 1 , further comprising etching cavities in the sensor substrate prior to aligning the cap substrate to the sensor substrate.
3. The method of claim 1 , wherein the sensor substrate includes capacitive micro-sensors.
4. The method of claim 1 , further comprising thinning the bonded substrates.
5. The method of claim 4 , further comprising:
dicing the thinned bonded substrates into micro-sensor modules;
stacking each micro-sensor module onto an ASIC module; and
assembling the stacked modules in a molded package.
6. A method of bonding a cap substrate to a sensor substrate, the method comprising:
covering the sensor substrate with a passivation layer;
patterning the passivation layer to expose bonding regions of the sensor substrate
dispensing a volume of a photo-sensitive adhesive so that the photo-sensitive adhesive flows into the bonding regions to coat the sensor substrate,. the photo-sensitive adhesive made of an electrically insulating material;
patterning the photo-sensitive adhesive;
patterning the cap substrate;
aligning the cap substrate to the sensor substrate; and
applying pressure to the cap substrate, the photo-sensitive adhesive, and the sensor substrate at a temperature that is lower than a characteristic temperature of the photo-sensitive adhesive to bond the cap substrate to the sensor substrate;
thinning the bonded substrates;
dicing the thinned bonded substrates into micro-sensor modules;
stacking each micro-sensor module onto an ASIC module;
assembling the stacked modules in a molded package, the assembling including:
encapsulating the stacked modules using an epoxy molding compound; and
wire-bonding the micro-sensor module and the ASIC module to one another and to a semiconductor substrate.
7. The method of claim 1 , wherein the photo-sensitive adhesive planarizes the capacitive micro-sensors.
8. The method of claim 1 , wherein the cap substrate is a patterned silicon substrate.
9. The method of claim 1 , wherein the cap substrate is a patterned glass substrate.
10. The method of claim 3 , wherein one or more of the capacitive micro-sensors includes an environmentally-sensitive dielectric active element.
11. The method of claim 10 , wherein the cap substrate has openings that expose the dielectric active element to an ambient environment.
12. The method of claim 10 , wherein the photo-sensitive adhesive is made of substantially the same material as the dielectric active element.
13. The method of claim 10 , wherein the photo-sensitive adhesive is chemically compatible with the dielectric active elements.
14. The method of claim 12 , wherein the photo-sensitive adhesive is made of polyimide.
15. A method of bonding a cap substrate to a sensor substrate, the method comprising:
covering the sensor substrate with a passivation layer;
patterning the passivation layer to expose bonding regions of the sensor substrate
dispensing a volume of a photo-sensitive adhesive so that the photo-sensitive adhesive flows into the bonding regions to coat the sensor substrate, the photo-sensitive adhesive made of an electrically insulating material;
patterning the photo-sensitive adhesive;
patterning the cap substrate;
aligning the cap substrate to the sensor substrate; and
applying pressure to bond the cap substrate, to the sensor substrate using the photo-sensitive adhesive, at a temperature that is lower than a characteristic temperature of the photo-sensitive adhesive;
dicing the bonded substrates into micro-sensor modules;
stacking each micro-sensor module onto an ASIC module;
encapsulating the stacked modules using an epoxy molding compound; and
wire-bonding the micro-sensor module and the ASIC module to one another and to a semiconductor substrate.