Semiconductor device and method of manufacturing the same
Even when a stiffener is omitted, the semiconductor device which can prevent the generation of twist and distortion of a wiring substrate is obtained. As for a semiconductor device which has a wiring substrate, a semiconductor chip by which the flip chip bond was made to the wiring substrate, and a heat spreader adhered to the back surface of the semiconductor chip, and which omitted the stiffener for reinforcing a wiring substrate and maintaining the surface smoothness of a heat spreader, a wiring substrate has a plurality of insulating substrates in which a through hole whose diameter differs, respectively was formed, and each insulating substrate contains a glass cloth.
1. A semiconductor device comprising:
a wiring substrate including a plurality of build-up substrates stacked with one another, each of the plurality of build-up substrates having an insulating layer with through holes and conductive wirings, the wiring substrate having a first surface and a second surface opposite to each other;
a semiconductor chip comprising a silicon substrate having a main surface and a rear surface opposite to each other, semiconductor elements on the main surface, insulating films over the semiconductor elements including a silicon oxide film and an interlayer dielectric film with a dielectric constant lower than that of the silicon oxide film, pad electrodes over the insulating films, and internal wiring layers electrically connecting to the semiconductor elements and the pad electrodes,
the semiconductor chip being mounted on the wiring substrate via first bump electrodes such that the main surface of the silicon substrate faces the first surface of the wiring substrate, and such that the pad electrodes of the semiconductor chip are electrically connected to conductive wirings of a first one of the plurality of build-up substrates of the wiring substrate via the first bump electrodes, respectively;
a resin layer between the semiconductor chip and the first one of build-up substrates and between the first bump electrodes; and
second bump electrodes being on the second surface of the wiring substrate, and being electrically connected to conductive wirings of a second one of the plurality of build-up substrates of the wiring substrate,
wherein each of the insulating layers of the plurality of build-up substrates contains glass cloths, respectively.
2. The semiconductor device according to claim 1 , wherein a thickness of each of the plurality of build-up substrates is the same thickness to one another.
3. The semiconductor device according to claim 1 , wherein the interlayer dielectric film is a porous film as compared with the silicon oxide film.
4. The semiconductor device according to claim 1 , wherein the interlayer dielectric film includes at least one of SiOC and SiOF films.
5. The semiconductor device according to claim 1 , wherein each of the first bump electrodes is a lead free solder bump.
6. The semiconductor device according to claim 1 , wherein the pad electrodes of the semiconductor chip comprises an aluminum layer, and
wherein the internal wiring layers of the semiconductor chip comprise Cu layers.
7. The semiconductor device according to claim 1 , wherein a heat spreader is mounted over the rear surface of the semiconductor chip via a heat dissipation adhesive.