Bonding structure of multilayer copper bonding wire
View Patent ↗A bonding structure of a ball-bonded portion is obtained by bonding a ball portion formed on a front end of a multilayer copper bonding wire. The multilayer copper bonding wire includes a core member that is mainly composed of copper, and an outer layer that is formed on the core member and is mainly composed of at least one noble metal selected from a group of Pd, Au, Ag and Pt. Further, a first concentrated portion of such noble metal(s) is formed in a ball-root region located at a boundary with the copper bonding wire in a surface region of the ball-bonded portion.
1. A bonding structure of a ball-bonded portion obtained by bonding to a bonding-target portion a ball portion formed on a front end of a multilayer copper bonding wire, wherein
said multilayer copper bonding wire comprises:
a core member mainly composed of copper; and
an outer layer formed on said core member and mainly composed of at least one noble metal selected from the group of Pd, Au, Ag and Pt,
wherein said bonding structure comprises a first concentrated portion having a high total noble metal level and being formed in a ball-root region, said ball-root region being in such a surface region of said ball-bonded portion as is located at a boundary with said multilayer copper bonding wire,
wherein said high total noble metal level accounts for all of said noble metals selected, and
wherein a total concentration of said at least one noble metal selected in said first concentrated portion is not lower than 0.05 mol % and not higher than 6 mol %.
2. The bonding structure according to claim 1 , wherein a thickness of said first concentrated portion formed in said ball-root region is not less than 1% and not more than 50% of a wire diameter, when observed on a cross section of said ball-bonded portion taken along a plane orthogonal to a bonded interface between said ball-bonded portion and said bonding-target portion.
3. The bonding structure according to claim 1 , wherein a total area of said first concentrated portion formed in said ball-root region occupies not less than 2% and not more than 30% of a cross-sectional area of said ball-bonded portion, when observed on said cross section of said ball-bonded portion taken along said plane orthogonal to said bonded interface between said ball-bonded portion and said bonding-target portion.
4. The bonding structure according to claim 1 , wherein only said first concentrated portion exists in said surface region of said ball-bonded portion, when observed on said cross section of said ball-bonded portion taken along said plane orthogonal to said bonded interface between said ball-bonded portion and said bonding-target portion.
5. The bonding structure according to claim 1 , wherein said at least one noble metal includes two or more kinds of noble metals in total that are Pd and at least one of Au and Ag, and a ratio of a total concentration of Au and Ag to a Pd concentration is not lower than 0.01 and not higher than 0.4.
6. The bonding structure according to claim 1 , wherein said outer layer of said multilayer copper bonding wire is formed to a thickness of not smaller than 0.01 μm and not larger than 0.4 μm.
7. The bonding structure according to claim 1 , wherein a diffusion layer having a concentration gradient of copper and said at least one noble metal is formed between said outer layer and core member of said multilayer copper bonding wire, said diffusion layer being formed to a thickness of not smaller than 0.003 μm and not larger than 0.15 μm.
8. The bonding structure according to claim 1 , wherein said outer layer of said multilayer copper bonding wire is mainly composed of Pd, and a concentrated layer of at least one of Au and Ag is formed in an interface between said outer layer and said core member.
9. The bonding structure according to claim 1 , wherein said outer layer of said multilayer copper bonding wire is mainly composed of Pd, and a concentrated layer of at least one of Au and Ag is formed on a surface of said outer layer.
10. A bonding structure of a ball-bonded portion obtained by bonding to a bonding-target portion a ball portion formed on a front end of a multilayer copper bonding wire, wherein
said multilayer copper bonding wire comprises:
a core member mainly composed of copper; and
an outer layer formed on said core member and mainly composed of at least one noble metal selected from the group of Pd, Au, Ag and Pt, wherein
said bonding structure comprises:
a first concentrated portion having a high total noble metal level and being formed in a ball-root region, said ball-root region being in such a surface region of said ball-bonded portion as is located at a boundary with said multilayer copper bonding wire; and
a second concentrated portion in which said at least one noble metal is highly concentrated, said second concentrated portion being formed in at least one location inside said ball-bonded portion when observed on said cross section of said ball-bonded portion taken along said plane orthogonal to said bonded interface between said ball-bonded portion and said bonding-target portion.
11. The bonding structure according to claim 10 , wherein a total area of said first concentrated portion and said second concentrated portion occupies not less than 5% and not more than 70% of said cross-sectional area of said ball-bonded portion, when observed on said cross section of said ball-bonded portion taken along said plane orthogonal to said bonded interface.
12. The bonding structure according to claim 10 , further comprising a third concentrated portion in which said at least one noble metal is highly concentrated, said third concentrated portion being formed in said bonded interface between said ball-bonded portion and said bonding-target portion.
13. The bonding structure according to claim 10 , wherein a total concentration of said at least one noble metal in said first concentrated portion is not lower than 0.05 mol % and not higher than 6 mol %.
14. The bonding structure according to claim 10 , wherein a thickness of said first concentrated portion formed in said ball-root region is not less than 1% and not more than 50% of a wire diameter, when observed on a cross section of said ball-bonded portion taken along a plane orthogonal to a bonded interface between said ball-bonded portion and said bonding-target portion.
15. The bonding structure according to claim 10 , wherein a total area of said first concentrated portion formed in said ball-root region occupies not less than 2% and not more than 30% of a cross-sectional area of said ball-bonded portion, when observed on said cross section of said ball-bonded portion taken along said plane orthogonal to said bonded interface between said ball-bonded portion and said bonding-target portion.
16. The bonding structure according to claim 10 , wherein said at least one noble metal includes two or more kinds of noble metals in total that are Pd and at least one of Au and Ag, and a ratio of a total concentration of Au and Ag to a Pd concentration is not lower than 0.01 and not higher than 0.4.
17. The bonding structure according to claim 10 , wherein said outer layer of said multilayer copper bonding wire is formed to a thickness of not smaller than 0.01 μm and not larger than 0.4 μm.
18. The bonding structure according to claim 10 , wherein a diffusion layer having a concentration gradient of copper and said at least one noble metal is formed between said outer layer and core member of said multilayer copper bonding wire, said diffusion layer being formed to a thickness of not smaller than 0.003 μm and not larger than 0.15 μm.
19. The bonding structure according to claim 10 , wherein said outer layer of said multilayer copper bonding wire is mainly composed of Pd, and a concentrated layer of at least one of Au and Ag is formed in an interface between said outer layer and said core member.
20. The bonding structure according to claim 10 , wherein said outer layer of said multilayer copper bonding wire is mainly composed of Pd, and a concentrated layer of at least one of Au and Ag is formed on a surface of said outer layer.
21. A bonding structure of a ball-bonded portion obtained by bonding to a bonding-target portion a ball portion formed on a front end of a multilayer copper bonding wire, wherein
said multilayer copper bonding wire comprises:
a core member mainly composed of copper; and
an outer layer formed on said core member and mainly composed of at least one noble metal selected from the group of Pd, Au, Ag and Pt, wherein
said bonding structure comprises:
a first concentrated portion having a high total noble metal level and being formed in a ball-root region, said ball-root region being in such a surface region of said ball-bonded portion as is located at a boundary with said multilayer copper bonding wire; and
a third concentrated portion in which said at least one noble metal is highly concentrated, said third concentrated portion being formed in said bonded interface between said ball-bonded portion and said bonding-target portion.
22. The bonding structure according to claim 21 , wherein a total concentration of said at least one noble metal in said first concentrated portion is not lower than 0.05 mol % and not higher than 6 mol %.
23. The bonding structure according to claim 21 , wherein a thickness of said first concentrated portion formed in said ball-root region is not less than 1% and not more than 50% of a wire diameter, when observed on a cross section of said ball-bonded portion taken along a plane orthogonal to a bonded interface between said ball-bonded portion and said bonding-target portion.
24. The bonding structure according to claim 21 , wherein a total area of said first concentrated portion formed in said ball-root region occupies not less than 2% and not more than 30% of a cross-sectional area of said ball-bonded portion, when observed on said cross section of said ball-bonded portion taken along said plane orthogonal to said bonded interface between said ball-bonded portion and said bonding-target portion.
25. The bonding structure according to claim 21 , wherein said at least one noble metal includes two or more kinds of noble metals in total that are Pd and at least one of Au and Ag, and a ratio of a total concentration of Au and Ag to a Pd concentration is not lower than 0.01 and not higher than 0.4.
26. The bonding structure according to claim 21 , wherein said outer layer of said multilayer copper bonding wire is formed to a thickness of not smaller than 0.01 μm and not larger than 0.4 μm.
27. The bonding structure according to claim 21 , wherein a diffusion layer having a concentration gradient of copper and said at least one noble metal is formed between said outer layer and core member of said multilayer copper bonding wire, said diffusion layer being formed to a thickness of not smaller than 0.003 μm and not larger than 0.15 μm.
28. The bonding structure according to claim 21 , wherein said outer layer of said multilayer copper bonding wire is mainly composed of Pd, and a concentrated layer of at least one of Au and Ag is formed in an interface between said outer layer and said core member.
29. The bonding structure according to claim 21 , wherein said outer layer of said multilayer copper bonding wire is mainly composed of Pd, and a concentrated layer of at least one of Au and Ag is formed on a surface of said outer layer.