Production method for high-purity lanthanum, high-purity lanthanum, sputtering target composed of high-purity lanthanum, and metal gate film containing high-purity lanthanum as main component
View Patent ↗A method for producing high-purity lanthanum having a purity of 4N or more excluding rare earth elements other than lanthanum and gas components, wherein lanthanum having a purity of 4N or more is produced by reducing, with distilled calcium, a lanthanum fluoride starting material that has a purity of 4N or more excluding rare earth elements other than lanthanum and gas components, and the obtained lanthanum is subjected to electron beam melting to remove volatile substances. The method for producing high-purity lanthanum, in which Al, Fe, and Cu are respectively contained in the amount of 10 wtppm or less. The method for producing high-purity lanthanum, in which total content of gas components is 1000 wtppm or less. The present invention aims to provide a technique capable of efficiently and stably providing high-purity lanthanum, a sputtering target composed of high-purity lanthanum, and a thin film for metal gate that contains high-purity lanthanum as a main component.
1. A method for producing high-purity lanthanum, comprising the steps of reducing, with distilled calcium, a lanthanum fluoride starting material that has a purity of 4N or more excluding rare earth elements other than lanthanum and gas components, and removing volatile substances by subjecting the obtained lanthanum to electron beam melting so that the purity excluding rare earth elements other than lanthanum and gas components is 4N5 or more, the content of Al and Fe is respectively 5 wtppm or less, the content of Cu is 1 wtppm or less, and the total content of gas components is 1000 wtppm or less.
2. The method for producing high-purity lanthanum according to claim 1 , wherein the high-purity lanthanum contains C in the amount of 200 wtppm or less.
3. The method for producing high-purity lanthanum according to claim 2 , wherein the high-purity lanthanum contains rare earth elements other than lanthanum in the amount of 10 wtppm or less.
4. The method according to claim 1 , wherein the high-purity lanthanum contains rare earth elements other than lanthanum in a total amount of 10 wtppm or less.