Defect inspection method and defect inspection apparatus
View Patent ↗A defect inspection method comprising: picking up an image of a subject under inspection to thereby acquire an inspection image; extracting multiple templates corresponding to multiple regions, respectively from design data of the subject under inspection; finding a first misregistration amount between the inspection image and the design data using a first template as any one template selected from among the plural templates; finding a second misregistration amount between the inspection image and the design data using a second template other than the first template, the second template being selected from among the plural templates, and the first misregistration-amount; and converting the design data, misregistration thereof being corrected using the first misregistration-amount, and the second misregistration-amount, into a design data image, and comparing the design data image with the inspection image to thereby detect a defect of the subject under inspection.
1. A defect inspection method comprising:
an inspection image acquisition step to pick up an image of a subject under inspection to thereby acquire an inspection image;
a template extraction step to extract a plurality of templates corresponding to a plurality of regions, respectively from design data of the subject under inspection;
a first misregistration-amount calculating step to find the first misregistration-amount between the inspection image and the design data using a first template as any one template selected from among the plural templates;
a second misregistration-amount calculating step to find the second misregistration-amount between the inspection image and the design data using a second template other than the first template, the second template being selected from among the plural templates, and the first misregistration-amount; and
a defect-inspection step to convert the design data, misregistration thereof being corrected using the first misregistration-amount, and the second misregistration-amount, into a design data image, and to compare the design data image with the inspection image to thereby detect a defect of the subject under inspection.
2. The defect inspection method according to claim 1 , wherein the plural templates differing in template size from each other are extracted in the template extraction step.
3. The defect inspection method according to claim 1 , wherein the first template is larger in template size than the second template.
4. The defect inspection method according to claim 1 , wherein a plurality of the second templates are provided.
5. The defect inspection method according to claim 1 , wherein a misregistration amount common to the inspection image in whole is calculated in the first misregistration-amount calculating step, and a localized misregistration amount of the inspection image is calculated in the second misregistration-amount calculating step.
6. The defect inspection method according to claim 1 , wherein the first template is higher in template reliability than the second template.
7. The defect inspection method according to claim 1 , wherein the plurality of templates are extracted with the use of a correlation degree between an image of a predetermined region of the design data and an image of a region in the vicinity of the predetermined region of the design data in the template extraction step.
8. The defect inspection method according to claim 1 , wherein the first misregistration-amount calculating step, and the second misregistration-amount calculating step each find a misregistration-amount with respect to the same region.
9. A defect inspection apparatus comprising:
an inspection image acquisition unit to pick up an image of a subject under inspection to thereby acquire an inspection image;
a template extraction unit to extract a plurality of templates corresponding to a plurality of regions, respectively from design data of the subject under inspection;
a matching unit including a first misregistration-amount calculating sub-unit to find the first misregistration-amount between the inspection image and the design data using a first template as any one template selected from among the plurality of templates, and a second misregistration-amount calculating sub-unit to find the second misregistration-amount between the inspection image and the design data using a second template other than the first template, the second template being selected from among the plural templates, and the first misregistration-amount; and
a defect-inspection unit to convert the design data, misregistration thereof being corrected using the first misregistration-amount, and the second misregistration-amount, into a design data image, and to compare the design data image with the inspection image to thereby detect a defect of the subject under inspection.
10. The defect inspection apparatus according to claim 9 , wherein the plural templates differing in template size from each other are extracted by the template extraction unit.
11. The defect inspection apparatus according to claim 9 , wherein the first template is larger in template size than the second template.
12. The defect inspection apparatus according to claim 9 , wherein a plurality of the second templates are provided.
13. The defect inspection apparatus according to claim 9 , wherein a misregistration amount common to the inspection image in whole is calculated by the first misregistration-amount calculating unit, and a localized misregistration amount of the inspection image is calculated by the second misregistration-amount calculating unit.
14. The defect inspection apparatus according to claim 9 , wherein the first template is higher in template reliability than the second template.
15. The defect inspection apparatus according to claim 9 , wherein the plural templates are extracted with the use of a correlation degree between an image of a predetermined region of the design data and an image of a region in the vicinity of the predetermined region of the design data by the template extraction unit.
16. The defect inspection apparatus according to claim 9 , wherein the first misregistration-amount calculating unit, and the second misregistration-amount calculating unit each find a misregistration-amount with respect to the same region.
17. A defect inspection method comprising:
an inspection image acquisition step to pick up an image of a subject under inspection to thereby acquire an inspection image;
a template extraction step to extract a plurality of templates corresponding to a plurality of regions, respectively from design data of the subject under inspection;
a misregistration-amount calculating step to find a misregistration-amount between the inspection image and the design data plural times using the plurality of templates; and
a defect-inspection step to convert the design data, misregistration thereof being corrected using a plurality of misregistration-amounts found by the misregistration-amount calculating step, into a design data image, and to compare the design data image with the inspection image to thereby detect a defect of the subject under inspection.
18. A defect inspection apparatus comprising:
an inspection image acquisition unit to pick up an image of a subject under inspection to thereby acquire an inspection image;
a template extraction unit to extract a plurality of templates corresponding to a plurality of regions, respectively from design data of the subject under inspection;
a misregistration-amount calculating unit to find a misregistration amount between the inspection image and the design data multiple times using the plurality of templates; and
a defect-inspection unit to convert the design data, misregistration thereof being corrected using a plurality of misregistration amounts found by the misregistration-amount calculating unit, into a design data image and to compare the design data image with the inspection image to thereby detect a defect of the subject under inspection.