Method for forming an electrical connection between metal layers
View Patent ↗A method of making a semiconductor device having a substrate includes forming a first interconnect layer over the substrate, wherein a first metal portion of a first metal type is within the first interconnect layer and has a first via interface location. An interlayer dielectric is formed over the first interconnect layer. An opening in the interlayer dielectric is formed over the via interface location of the first metal portion. A second interconnect layer is formed over the interlayer dielectric. A second metal portion and a via of the first metal type is within the second interconnect layer. The via is formed in the opening to form an electrical contact between the first metal portion and the second metal portion. The via is over the first via interface location. A first implant of the first metal type is aligned to the first via interface location.
1. A method of making a semiconductor device having a substrate, comprising:
forming a first interconnect layer over the substrate, wherein the first interconnect layer includes a first metal portion of a first metal type, and the first metal portion includes a first via interface location;
forming an interlayer dielectric over the first interconnect layer;
forming an opening in the interlayer dielectric over the first via interface location of the first metal portion;
forming a second interconnect layer in the interlayer dielectric and over the first interconnect layer, wherein the second interconnect layer includes a second metal portion and a via of the first metal type, wherein the via is formed in the opening to form an electrical contact between the first metal portion and the second metal portion, and the via is over the first via interface location; and
performing a first implant of the first metal type aligned to the first via interface location, wherein performing the first implant occurs after forming the second interconnect layer and forms an implanted region in the first metal portion at an interface with the via.
2. The method of claim 1 , further comprising performing a second implant of the first metal type to form an implanted region in the second metal portion at a top surface of the second metal portion.
3. The method of claim 1 , wherein:
forming the second interconnect layer comprises forming a trench in the interlayer dielectric, the trench having a bottom surface;
forming the opening comprises forming an opening from the bottom surface of the trench to the first interconnect layer;
forming the via comprises filling the opening with copper; and
forming the second interconnect layer comprises filling the trench with copper.
4. The method of claim 1 , wherein forming the second interconnect layer comprises forming a trench in the interlayer dielectric that extends to the opening and forming copper in the opening and the trench.
5. The method of claim 1 , wherein forming the second interconnect layer comprises forming a trench in the interlayer dielectric that extends to the opening and filling the trench and the extended opening with copper.
6. The method of claim 1 further comprising performing a second implant of the first metal type aligned to the first via interface location.
7. A method of making a semiconductor device having a substrate, comprising:
forming a first interconnect layer over the substrate, wherein the first interconnect layer includes a first metal portion of a first metal type, and the first metal portion includes a first via interface location;
forming an interlayer dielectric over the first interconnect layer;
forming an opening in the interlayer dielectric over the first via interface location of the first metal portion;
forming a second interconnect layer in the interlayer dielectric and over the first interconnect layer, wherein the second interconnect layer includes a second metal portion and a via of the first metal type, wherein the via is formed in the opening to form an electrical contact between the first metal portion and the second metal portion, and the via is over the first via interface location;
after forming the second interconnect layer, performing a first implant of the first metal type aligned to the first via interface location; and
after forming the second interconnect layer, performing a second implant of the first metal type aligned to the first via interface location, wherein the first implant forms a first implanted region and the second implant forms a second implanted region, wherein the first implanted region is in the first metal portion and the second implanted region is in the via.
8. The method of claim 6 , wherein the second implant forms a second implanted region in the second metal portion.
9. The method of claim 8 , further comprising performing a third implant of the first metal type aligned to the first via interface location, wherein the third implant forms a third implanted region, wherein the third implanted region is in the via.