IP Library Granted Patent US 9,512,529
Granted Patent B2
US 9,512,529 · App. 13/910,109 · Granted Dec 6, 2016

Electroplating baths of silver and tin alloys

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Quick Facts
Patent No.
US 9,512,529
App. No.
13/910,109
Granted
Dec 6, 2016
Kind
B2
Abstract

Silver and tin alloy electroplating baths include complexing agents which enable the electroplating of either silver rich or tin rich alloys. The silver and tin alloy electroplating baths are substantially free of lead. They may be used to electroplate silver and tin alloys in the manufacture of electronic components such as electrical connectors, finishing layers for metallic substrates, decorative applications and solder bumps.

Claims (24)

1. A tin/silver alloy electroplating bath comprising metal ions consisting of tin ions and silver ions, one or more compounds having a formula:

X—S—Y  (I)

wherein X and Y may be substituted or unsubstituted phenol groups, HO—R— or —R′S—R″—OH with the proviso that when X and Y are the same they are substituted or unsubstituted phenol groups, and wherein R, R′ and R″ are the same or different and are linear or branched alkylene radicals having 1 to 20 carbon atoms; and one or more mercaptotetrazole compounds having a formula:

wherein M is hydrogen, NH 4 , sodium or potassium and R 1 is substituted or unsubstituted, linear or branched (C 2 -C 20 ) alkyl, or substituted or unsubstituted (C 6 -C 10 )aryl, wherein the tin/silver electroplating bath is free of flavone compounds.

2. The electroplating bath of claim 1 , wherein a ratio of silver ions to tin ions ranges from 1-12.

3. The electroplating bath of claim 2 , wherein the ratio of silver ions to tin ions ranges from 1-6.

4. The electroplating bath of claim 1 , wherein X and Y are different and are HO—R— or —R′—S—R″—OH.

5. The electroplating bath of claim 1 , wherein a ratio of the compound of formula (III) to the compound of formula (I) is from 3-300.

6. A method of electroplating tin/silver alloy comprising:

a) contacting a substrate with a tin/silver electroplating bath comprising metal ions consisting of tin ions and silver ions, one or more compounds having a formula:

X—S—Y

wherein X and Y may be substituted or unsubstituted phenol group, HO—R— or —R'S—R″—OH with the proviso that when X and Y are the same they are substituted or unsubstituted phenol groups, and wherein R, R′ and R″ are the same or different and are linear or branched alkylene radicals having 1 to 20 carbon atoms; and one or more mercaptotetrazole compounds having a formula:

wherein M is hydrogen, NH 4 , sodium or potassium and R 1 is substituted or unsubstituted, linear or branched (C 2 -C 20 ) alkyl, or substituted or unsubstituted (C 6 -C 10 )aryl, wherein the tin/silver electroplating bath is free of flavone compounds; and

b) electroplating a silver and tin alloy on the substrate.

7. A method of electroplating a tin/silver alloy comprising:

a) providing a semiconductor die having a plurality of interconnect bump pads;

b) forming a seed layer over the interconnect bump pads;

c) contacting the semiconductor die with a tin/silver alloy electroplating bath comprising metal ions consisting of tin ions and silver ions, one or more compounds having a formula:

X—S—Y

wherein X and Y may be substituted or unsubstituted phenol group, HO—R— or —R′—S—R″—OH with the proviso that when X and Y are the same they are substituted or unsubstituted phenol groups, and wherein R, R′ and R″ are the same or different and are linear or branched alkylene radicals having 1 to 20 carbon atoms; and one or more mercaptotetrazole compounds having a formula:

wherein M is hydrogen, NH 4 , sodium or potassium and R 1 is substituted or unsubstituted, linear or branched (C 2 -C 20 ) alkyl, or substituted or unsubstituted (C 6 -C 10 )aryl, wherein the tin/silver alloy electroplating bath is free of flavone compounds;

d) electroplating silver and tin alloy interconnect bumps over the interconnect bump pads; and

e) reflowing the silver and tin alloy interconnect bumps.

8. The method of claim 7 , wherein the one or more mercaptotetrazoles are chosen from 1-(2-diethylaminoethyl)-5-mercapto-1,2,3,4-tetrazole, 1-(3-ureidophenyl)-5-mercaptotetrazole, 1-((3-N-ethyl oxalamido)phenyl)-5-mercaptotetrazole, 1-(4-acetamidophenyl)-5-mercapto-tetrazole and 1-(4-carboxyphenyl)-5-mercaptotetrazole.

Assignments (5)
SECURITY INTEREST Recorded Nov 3, 2025
From: QNITY ELECTRONICS, INC.
To: JPMORGAN CHASE BANK, N.A., AS COLLATERAL AGENT
Reel/Frame 073515/0243 →
SECURITY INTEREST Recorded Nov 3, 2025
From: QNITY ELECTRONICS, INC.
To: U.S. BANK TRUST COMPANY, NATIONAL ASSOCIATION, AS NOTES COLLATERAL AGENT
Reel/Frame 073517/0298 →
CHANGE OF NAME Recorded Oct 29, 2024
From: ROHM & HAAS ELECTRONIC MATERIALS LLC
To: DUPONT ELECTRONIC MATERIALS INTERNATIONAL, LLC
Reel/Frame 069272/0383 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Sep 13, 2016
From: FOYET, ADOLPHE; CLAUSS, MARGIT; ZHANG-BEGLINGER, WAN; WOERTINK, JULIA; QIN, YI; PRANGE, JONATHAN; LOPEZ MONTESINOS, PEDRO O.
To: ROHM AND HAAS ELECTRONIC MATERIALS LLC
Reel/Frame 039719/0053 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Mar 25, 2015
From: FOYET, ADOLPHE; CLAUSS, MARGIT; ZHANG-BEGLINGER, WAN; WOERTINK, JULIA; QIN, YI; PRANGE, JONATHAN; LOPEZ MONTESINOS, PEDRO O
To: ROHM AND HAAS ELECRONIC MATERIALS LLC
Reel/Frame 035251/0381 →