Semiconductor device and fabrication method thereof
A method for fabricating a semiconductor device is provided herein and includes the following steps. First, a first interlayer dielectric is formed on a substrate. Then, a gate electrode is formed on the substrate, wherein a periphery of the gate electrode is surrounded by the first interlayer dielectric. Afterwards, a patterned mask layer is formed on the gate electrode, wherein a bottom surface of the patterned mask layer is leveled with a top surface of the first interlayer dielectric. A second interlayer dielectric is then formed to cover a top surface and each side surface of the patterned mask layer. Finally, a self-aligned contact structure is formed in the first interlayer dielectric and the second interlayer dielectric.
1. A semiconductor device, comprising:
a metal gate electrode, disposed on a substrate;
a first interlayer dielectric, surrounding a periphery of the metal gate electrode;
a patterned mask layer, disposed on the metal gate electrode, wherein a bottom surface of the patterned mask layer is leveled with a top surface of the first interlayer dielectric;
a spacer disposed on the sidewalls of the patterned mask layer, wherein a bottom surface of the spacer is leveled with the bottom surface of the patterned mask layer;
a second interlayer dielectric, covering a top surface and the sidewalls of the patterned mask layer; and
a self-aligned contact structure disposed in the first interlayer dielectric and the second interlayer dielectric, and electrically connecting the substrate.
2. The semiconductor device of claim 1 , wherein a top surface of the metal gate electrode is substantially leveled with the top surface of the first interlayer dielectric.
3. The semiconductor device of claim 1 , wherein the first interlayer dielectric and the second interlayer dielectric comprise silicon oxide.
4. The semiconductor device of claim 1 , wherein the patterned mask layer comprises silicon nitride, silicon carbon nitride, silicon oxynitride or silicon carbide.
5. The semiconductor device of claim 1 , wherein a width of the patterned mask layer is substantially larger than a width of the metal gate electrode.
6. The semiconductor device of claim 1 , wherein the spacer comprises silicon nitride, silicon carbon nitride, silicon oxynitride or silicon carbide.
7. The semiconductor device of claim 1 , wherein the patterned mask layer and the spacer cover the metal gate electrode completely.
8. The semiconductor device of claim 1 , further comprising:
a gate spacer, disposed on sidewalls of the metal gate electrode; and
an etch stop layer, disposed between each of the gate spacers and the self-aligned contact structure.
9. The semiconductor device of claim 8 , wherein each of the gate spacers and each of the etch stop layers comprise silicon nitride, silicon carbon nitride, silicon oxynitride or silicon carbide.