IP Library › Granted Patent US 9,070,656
Granted Patent B2
US 9,070,656 · App. 13/915,778 · Granted Jun 30, 2015

Underfill-accommodating heat spreaders and related semiconductor device assemblies and methods

Inventors: Andy E. Hooper (Boise, ID); Xiao Li (Boise, ID); Shijian Luo (Boise, ID)
Assignee: Micron Technology, Inc.
H01L23/36H01L23/10H01L23/3675H01L21/563H01L24/16H01L24/32H01L24/73H01L24/83H01L25/0657H01L2224/16145H01L2224/16225H01L2224/32145H01L2224/32225H01L2224/73204H01L2224/73253H01L2224/83385H01L2225/06517H01L2225/06589H01L2924/16251H01L2225/06513H01L2225/06568
View Patent ↗
Loading inventors, assignments & file history…
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this patent's details
Quick Facts
Patent No.
US 9,070,656
App. No.
13/915,778
Granted
Jun 30, 2015
Kind
B2
Abstract

Heat spreaders for dissipating heat from semiconductor devices comprise a contact surface located within a recess on an underside of the heat spreader, the contact surface being configured to physically and thermally attach to a semiconductor device, and a trench extending into the heat spreader adjacent to the contact surface sized and configured to receive underfill material extending from the semiconductor device into the trench. Related semiconductor device assemblies may include these heat spreaders and methods may include physically and thermally attaching these heat spreaders to semiconductor devices such that underfill material extends from a semiconductor device into the trench.

Claims (31)

1. A heat spreader for dissipating heat from a semiconductor device assembly, comprising:

a contact surface located within a recess on an underside of the heat spreader, the contact surface being configured to physically and thermally attach to an adjacent semiconductor device; and

a trench adjacent to the contact surface, the trench extending from the contact surface into the heat spreader toward a topside of the heat spreader, the trench being sized and configured to receive underfill material extending from the semiconductor device assembly above the adjacent semiconductor device into the trench.

2. The heat spreader of claim 1 , wherein a width of the trench as measured in a direction parallel to the contact surface is between 0.5% and 25% of a total width of the heat spreader as measured in the same direction.

3. The heat spreader of claim 1 , wherein a depth of the trench as measured in a direction perpendicular to the contact surface is between 5% and 30% of a height of the heat spreader as measured in the same direction.

4. A semiconductor device assembly, comprising:

a heat spreader comprising:

a contact surface located within a recess on an underside of the heat spreader; and

a trench adjacent to the contact surface, the trench extending from the contact surface into the heat spreader toward a topside of the heat spreader;

a semiconductor device received within the recess, a surface of the semiconductor device in physical and thermal contact with the contact surface; and

underfill material extending laterally beyond a side of the semiconductor device, the underfill material extending at least partially into the trench.

5. The semiconductor device assembly of claim 4 , wherein a width of the trench as measured in a direction extending at least substantially parallel to the contact surface is less than 800 μm.

6. The semiconductor device assembly of claim 4 , wherein a depth of the trench as measured in a direction extending at least substantially perpendicular to the contact surface is greater than 100 μm.

7. The semiconductor device assembly of claim 4 , wherein a surface area of the contact surface is between 50% and 100% of a surface area of a surface of the semiconductor device to which the contact surface is attached.

8. The semiconductor device assembly of claim 4 , wherein the trench extends around a perimeter of the contact surface.

9. The semiconductor device assembly of claim 4 , wherein a cross-sectional shape of the trench is rectangular.

10. The semiconductor device assembly of claim 4 , further comprising a thermal interface material between the contact surface and the semiconductor device.

11. The semiconductor device assembly of claim 10 , wherein no material other than the thermal interface material is located between the contact surface and the semiconductor device.

12. The semiconductor device assembly of claim 10 , wherein a distance between the contact surface of the heat spreader and the semiconductor device is between 5 μm and 100 μm.

13. The semiconductor device assembly of claim 4 , wherein the heat spreader comprises another contact surface located within the recess, the other contact surface being physically and thermally attached to another semiconductor device, wherein the other semiconductor device is located within the recess.

14. The semiconductor device assembly of claim 13 , wherein the other semiconductor device is located underneath the semiconductor device, the other semiconductor device comprising a laterally protruding portion extending laterally beyond the semiconductor device, wherein the other contact surface is physically and thermally attached to the other semiconductor device at the laterally protruding portion.

15. The semiconductor device assembly of claim 14 , wherein the heat spreader comprises another trench adjacent to the laterally protruding portion of the other semiconductor device, the other trench extending into the heat spreader toward the topside of the heat spreader, wherein underfill material extends from the other semiconductor device into the other trench.

16. The semiconductor device assembly of claim 4 , wherein a height of the underfill material extending above an upper surface of the semiconductor device is between 0.5% and 25% of a height of the heat spreader.

17. The semiconductor device assembly of claim 16 , wherein the height of the underfill material is between 20 μm and 400 μm.

18. A method of accommodating excess underfill material in a semiconductor device assembly, comprising:

forming a trench in a heat spreader adjacent to a contact surface within a recess on an underside of the heat spreader, the trench extending from the contact surface into the heat spreader toward a topside of the heat spreader;

positioning a semiconductor device within the recess;

physically and thermally attaching the contact surface of the heat spreader to a surface of the semiconductor device; and

inserting underfill material extending above the surface of the semiconductor device into the trench.

19. The method of claim 18 , wherein inserting the underfill material into the trench comprises inserting the underfill material to a depth of between 10 μm and 400 μm into the trench.

20. The method of claim 18 , wherein physically and thermally attaching the contact surface of the heat spreader to the semiconductor device comprises attaching the contact surface to between 50% and 100% of a surface area of the surface of the semiconductor device.

Assignments (8)
RELEASE OF SECURITY INTEREST Recorded Nov 12, 2019
From: JPMORGAN CHASE BANK, N.A., AS COLLATERAL AGENT
To: MICRON TECHNOLOGY, INC.; MICRON SEMICONDUCTOR PRODUCTS, INC.
Reel/Frame 051028/0001 →
RELEASE OF SECURITY INTEREST Recorded Oct 9, 2019
From: MORGAN STANLEY SENIOR FUNDING, INC., AS COLLATERAL AGENT
To: MICRON TECHNOLOGY, INC.
Reel/Frame 050937/0001 →
RELEASE OF SECURITY INTEREST Recorded Aug 23, 2018
From: U.S. BANK NATIONAL ASSOCIATION, AS COLLATERAL AGENT
To: MICRON TECHNOLOGY, INC.
Reel/Frame 047243/0001 →
SECURITY INTEREST Recorded Jul 13, 2018
From: MICRON TECHNOLOGY, INC.; MICRON SEMICONDUCTOR PRODUCTS, INC.
To: JPMORGAN CHASE BANK, N.A., AS COLLATERAL AGENT
Reel/Frame 047540/0001 →
CORRECTIVE ASSIGNMENT TO CORRECT THE REPLACE ERRONEOUSLY FILED PATENT #7358718 WITH THE CORRECT PATENT #7358178 PREVIOUSLY RECORDED ON REEL 038669 FRAME 0001. ASSIGNOR(S) HEREBY CONFIRMS THE SECURITY INTEREST. Recorded Jun 8, 2017
From: MICRON TECHNOLOGY, INC.
To: U.S. BANK NATIONAL ASSOCIATION, AS COLLATERAL AGENT
Reel/Frame 043079/0001 →
PATENT SECURITY AGREEMENT Recorded Jun 2, 2016
From: MICRON TECHNOLOGY, INC.
To: MORGAN STANLEY SENIOR FUNDING, INC., AS COLLATERAL AGENT
Reel/Frame 038954/0001 →
SECURITY INTEREST Recorded May 12, 2016
From: MICRON TECHNOLOGY, INC.
To: U.S. BANK NATIONAL ASSOCIATION, AS COLLATERAL AGENT
Reel/Frame 038669/0001 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jun 13, 2013
From: HOOPER, ANDY E.; LI, XIAO; LUO, SHIJIAN
To: MICRON TECHNOLOGY, INC.
Reel/Frame 030604/0372 →
Continuity (1)
Related Publication 20140367844A1 · Dec 18, 2014