Die fracture detection and humidity protection with double guard ring arrangement
View Patent ↗An electronic apparatus includes a semiconductor substrate, outer and inner guard rings disposed along a periphery of the semiconductor substrate, and first and second contact pads electrically coupled to the outer and inner guard rings, respectively. The outer and inner guard rings are electrically coupled to one another to define a conduction path between the first and second contact pads. Each of the outer and inner guard rings includes an Ohmic metal layer having a plurality of gaps and further includes conductive bridges across the gaps. The gaps of the outer guard ring are laterally offset from the gaps of the inner guard ring such that the Ohmic metal layers of the outer and inner guard rings laterally overlap.
1. An electronic apparatus comprising:
a semiconductor substrate;
outer and inner guard rings disposed along a periphery of the semiconductor substrate;
first and second contact pads electrically coupled to the outer and inner guard rings, respectively;
wherein the outer and inner guard rings are electrically coupled to one another to define a conduction path between the first and second contact pads;
wherein each of the outer and inner guard rings comprises an Ohmic metal layer having a plurality of gaps and further comprises conductive bridges across the gaps;
wherein the gaps of the outer guard ring are laterally offset from the gaps of the inner guard ring such that the Ohmic metal layers of the outer and inner guard rings laterally overlap.
2. The electronic apparatus of claim 1 , wherein the outer guard ring comprises a plurality of metal segments distributed along and stacked upon the Ohmic metal layer such that the outer guard ring has a lower resistivity than the inner guard ring.
3. The electronic apparatus of claim 2 , wherein the metal segments of the outer guard ring are laterally offset from the gaps of the inner guard ring.
4. The electronic apparatus of claim 1 , wherein the conductive bridges comprise a metal layer having a lower resistivity than the Ohmic metal layer, and wherein the inner guard ring does not include any further conductive structures comprising the metal layer other than the conductive bridges.
5. The electronic apparatus of claim 1 , wherein the outer and inner guard rings are configured such that, for sections along the Ohmic metal layer between the conductive bridges of the inner guard ring, the inner guard ring is more brittle than the outer guard ring.
6. The electronic apparatus of claim 1 , wherein the inner guard ring comprises a loop section that departs from, and returns to, the periphery of the semiconductor substrate.
7. The electronic apparatus of claim 1 , further comprising an end connector that couples the outer and inner guard rings to one another, the end connector having a serpentine shape in which a segment of the outer guard ring is interposed such that the end connector and the segment laterally overlap.
8. The electronic apparatus of claim 7 , wherein the segment comprises an interconnect that departs from the periphery to reach the first contact pad.
9. The electronic apparatus of claim 1 , wherein the outer and inner guard rings are configured as a double wall loop disposed along the periphery of the semiconductor substrate.
10. A method of fabricating an electronic apparatus, the method comprising:
forming an Ohmic metal layer of outer and inner guard rings on a semiconductor substrate, the outer and inner guard rings being disposed along a periphery of the semiconductor substrate and patterned such that the Ohmic metal layer has a plurality of gaps;
depositing an interconnect metal layer to form conductive bridges of the outer and inner guard rings, each conductive bridge spanning a respective gap of the plurality of gaps;
wherein the outer and inner guard rings are electrically coupled to one another to define a conduction path between contact pads of the electronic apparatus;
wherein the gaps of the outer guard ring are laterally offset from the gaps of the inner guard ring such that the Ohmic metal layers of the outer and inner guard rings laterally overlap.
11. The method of claim 10 , wherein depositing the interconnect metal layer is configured to form a plurality of metal segments distributed along and stacked upon the Ohmic metal layer of the outer guard ring such that the outer guard ring has a lower resistivity than the inner guard ring.
12. The method of claim 11 , wherein the metal segments of the outer guard ring are laterally offset from the gaps of the inner guard ring.
13. The method of claim 10 , further comprising patterning the interconnect metal layer such that the inner guard ring does not include the metal interconnect layer other than the conductive bridges.
14. The method of claim 10 , wherein the outer and inner guard rings are configured such that, for sections along the Ohmic metal layer between the conductive bridges of the inner guard ring, the inner guard ring is more brittle than the outer guard ring.
15. The method of claim 10 , wherein forming the Ohmic metal layer is configured to form a loop section of the inner guard ring that departs from, and returns to, the periphery of the semiconductor substrate.
16. The method of claim 10 , wherein forming the Ohmic metal layer is configured to form an end connector that couples the outer and inner guard rings to one another, the end connector having a serpentine shape in which a segment of the outer guard ring is interposed such that the end connector and the segment laterally overlap.
17. The method of claim 16 , wherein depositing the interconnect metal layer is configured to form an interconnect that extends from the segment of the outer guard ring to reach one of the contact pads.
18. The method of claim 10 , wherein forming the Ohmic metal layer comprises patterning the Ohmic metal layer via a liftoff procedure.
19. A method of testing an electronic apparatus, the method comprising:
connecting the electronic apparatus to a test system to direct current through a conduction path comprising outer and inner guard rings disposed along a periphery of a semiconductor substrate of the electronic apparatus, each guard ring comprising an Ohmic metal layer having a plurality of gaps laterally offset from the gaps in the other guard ring;
measuring current through the conduction path; and
comparing the measured current with a predetermined current level indicative of a configuration of the conduction path for authentication of the electronic apparatus.
20. The method of claim 19 , further comprising comparing the measured current with a predetermined threshold current level to confirm integrity of the electronic apparatus.