Silicon carbide semiconductor device and method for manufacturing same
A method for manufacturing a silicon carbide semiconductor device includes the following steps. A silicon carbide substrate is prepared. A first heating step of heating the silicon carbide substrate in an atmosphere of oxygen is performed. A second heating step of heating the silicon carbide substrate to a temperature of 1300° C. or more and 1500° C. or less in an atmosphere of gas containing nitrogen atoms or phosphorus atoms is performed after the first heating step. A third heating step of heating the silicon carbide substrate in an atmosphere of a first inert gas is performed after the second heating step. Thus, the silicon carbide semiconductor device in which threshold voltage variation is small, and a method for manufacturing the same can be provided.
1. A method for manufacturing a silicon carbide semiconductor device, comprising the steps of:
preparing a silicon carbide substrate;
a first heating step of heating said silicon carbide substrate in an atmosphere of oxygen;
a second heating step of heating said silicon carbide substrate to a temperature of 1300° C. or more and 1500° C. or less in an atmosphere of gas containing nitrogen atoms or phosphorus atoms after said first heating step; and
a third heating step of heating said silicon carbide substrate in an atmosphere of a first inert gas after said second heating step,
wherein said first heating step includes forming an oxide film on a surface of said silicon carbide substrate,
wherein said second heating step is performed for a predetermined time to reduce dangling bonds at an interface of said oxide film and said silicon carbide substrate, and
wherein in said third heating step, said silicon carbide substrate is heated to 1300° C. or more and 1500° C. or less.
2. The method for manufacturing a silicon carbide semiconductor device according to claim 1 , wherein
in said first heating step, said silicon carbide substrate is heated to 1300° C. or more and 1500° C. or less.
3. The method for manufacturing a silicon carbide semiconductor device according to claim 1 , further comprising the step of replacing said oxygen by a second inert gas after said first heating step and before said second heating step.
4. The method for manufacturing a silicon carbide semiconductor device according to claim 1 , wherein
said first inert gas is one of argon gas, helium gas and nitrogen gas.
5. The method for manufacturing a silicon carbide semiconductor device according to claim 1 , wherein
said gas containing nitrogen atoms is one of nitrogen monoxide, dinitrogen monoxide, nitrogen dioxide and ammonia.
6. The method for manufacturing a silicon carbide semiconductor device according to claim 1 , wherein
said gas containing phosphorus atoms is phosphoryl chloride (POCl3).