Spin-on compositions of soluble metal oxide carboxylates and methods of their use
View Patent ↗The present disclosure relates to spin-on compositions containing at least one metal oxide dicarboxylate and an organic solvent into which the metal oxide dicarboxylate is soluble or colloidally stable. The dicarboxylate is capable of decomposing during heat treatment to give a cured metal oxide film. The present disclosure also relates to method of using the spin-on compositions.
1. A spin-on composition comprising at least one metal oxide dicarboxylate and an organic solvent, where the metal oxide dicarboxylate is soluble or colloidally stable in the solvent, and wherein the metal oxide dicarboxylate is capable of decomposing during heat treatment at a temperature between about 200° C. to about 300° C. for about 30 to about 200 seconds to give a cured metal oxide film and further where the solvent is comprised of ethylene glycol monoalkyl ethers, diethylene glycol dialkyl ethers, propylene glycol monoalkyl ethers, propylene glycol dialkyl ethers, acetate esters, hydroxyacetate esters, lactate esters, ethylene glycol monoalkylether acetates, propylene glycol monoalkylether acetates, alkoxyacetate esters, (non-)cyclic ketones, acetoacetate esters, pyruvate esters, propionate esters, or mixtures of these solvents.
2. The composition of claim 1 , wherein the carboxylate of the dicarboxylate is selected from a group consisting of a substituted C 3 -C 6 carboxylate, unsubstituted C 3 -C 6 carboxylate, saturated C 3 -C 6 carboxylate, unsaturated C 3 -C 6 carboxylate, branched C 3 -C 6 carboxylate and unbranched C 3 -C 6 carboxylate.
3. The composition of claim 1 , wherein the carboxylate of the dicarboxylate is propionate.
4. The composition of claim 1 , wherein the metal in the metal oxide dicarboxylate is at least one high refractive metal selected from Ti, V, Cr, Zr, Nb, Mo, Ru, Rh, Hf, Ta, W, Re, and Ir.
5. The composition of claim 1 , wherein the metal oxide dicarboxylate is a nanoparticle.
6. The composition of claim 5 wherein the carboxylate of the dicarboxylate is propionate.
7. The composition of claim 1 , wherein the metal oxide dicarboxylate is zirconium oxide dicarboxylate or titanium oxide dicarboxylate.
8. The composition of claim 7 , wherein the carboxylate of the dicarboxylate is propionate.
9. The composition of claim 1 , further comprising at least one polymer selected from a group consisting of an organic polymer, an inorganic polymer, and mixtures thereof.
10. The composition of claim 9 , where the polymer can comprise at least one unit of structure (1) comprising a hydrophobic moiety, at least one unit of structure (2) comprising a chromophore moiety, at least one unit of structure (3) comprising a crosslinking moiety (3) and optionally a unit comprising a group capable of crosslinking the polymer, where the structures 1-3 may be represented by,
where, R 1 to R 9 are independently selected from hydrogen and C 1 -C 4 alkyl; W 1 is a fully or partially fluorinated group; X is selected from a group consisting of F, H, and OH; W 2 is an organic moiety comprising a chromophore group, and W 3 Y comprises a crosslinking site.
11. A method of manufacturing an electronic device comprising:
a. applying a composition of claim 1 to form a metal oxide dicarboxylate film, and
b. heating the coated substrate, thereby forming a cured metal oxide film.
12. The method of claim 11 , wherein the metal content of the metal oxide film after the heating step is in the range of 10 to 85 weight %.
13. The method of claim 12 , wherein the metal is at least one high refractive metal selected from the group consisting of Ti, V, Cr, Zr, Nb, Mo, Ru, Rh, Hf, Ta, W, Re, and Ir.
14. The method of claim 11 , wherein a photoresist film is formed above the metal film.
15. The method of claim 14 , wherein the photoresist film is imaged with radiation in the range of about 12 nm to about 250 nm and developed to form a pattern.
16. The method of claim 11 , where the heating step is in the range of 200° C. to 500° C.
17. The method of claim 11 , where the metal is zirconium.
18. The method of claim 11 , where the metal is titanium.
19. The method of claim 11 , wherein the metal content of the metal oxide film after the heating step is in the range of 10 to 70 weight %.
20. A spin-on composition comprising at least one metal oxide dicarboxylate and an organic solvent, where the metal oxide dicarboxylate is soluble or colloidally stable in the solvent, and wherein the metal oxide dicarboxylate is capable of decomposing during heat treatment at a temperature between about 200° C. to about 300° C. for about 30 to about 200 seconds to give a cured metal oxide film and further wherein the metal oxide dicarboxylate is a nanoparticle.
21. A spin-on composition comprising at least one metal oxide dicarboxylate and an organic solvent, where the metal oxide dicarboxylate is soluble or colloidally stable in the solvent, and wherein the metal oxide dicarboxylate is capable of decomposing during heat treatment at a temperature between about 200° C. to about 300° C. for about 30 to about 200 seconds to give a cured metal oxide film and further comprising at least one polymer selected from a group consisting of an organic polymer, an inorganic polymer, and mixtures thereof.