Water-rich stripping and cleaning formulation and method for using same
View Patent ↗The present invention relates to water-rich formulations and the method using same, to remove bulk photoresists, post-etched and post-ashed residues, residues from Al back-end-of-the-line interconnect structures, as well as contaminations. The formulation comprises: hydroxylamine; corrosion inhibitor containing a mixture of alkyl dihydroxybenzene and hydroxyquinoline; an alkanolamine, a water-soluble solvent or the combination of the two; and at least 50% by weight of water.
1. A water-rich stripping and cleaning formulation, consisting essentially of:
from 1 to 30% by weight of at least one selected from a hydroxylamine, a hydroxylamine salt compound, and mixtures thereof;
from 0.1 to 5% by weight of a corrosion inhibitor containing a mixture of alkyl dihydroxybenzene and hydroxyquinoline;
one component selected from the group consisting of from 5% to 45% by weight of an alkanolamine which is miscible with said hydroxylamine, from 5% to 45% by weight of a water-soluble solvent, and combinations thereof; and
at least 50% by weight of water.
2. The formulation as claimed in claim 1 , wherein the alkyl dihydroxybenzene has linear or branched alkyl group containing 2-6 carbon atoms, and the hydroxyquinoline is selected from group consisting of 2-hydroxyquinoline, 4-hydroxyquinoline, 6-hydroxyquinoline, and 8-hydroxyquinoline.
3. The formulation as claimed in claim 1 , wherein the alkyl dihydroxybenzene is tertiary butyl catechol, and the hydroxyquinoline is 8 hydroxyquinoline.
4. The formulation as claimed in claim 1 , wherein the one component is the alkanolamine selected from the group consisting of monoethanolamine, aminoethoxyethanol, aminopropylmorpholine, monoethanolamine, N-methyl ethanolamine, N-ethyl ethanolamine, N,N-dimethylethanolamine, N,N-diethyl ethanolamine, N-methyl diethanolamine, N-ethyl diethanolamine, diethanolamine, triethanol amine, tertiarybutyldiethanol amine, isopropanolamine, 2-amino-1-propanol, 3-amino-1-propanol, 2-amino-1-butanol, isobutanolamine, 2-amino-2-ethoxypropanol, 2-amino-2-ethoxyethanol, and mixtures thereof.
5. The formulation as claimed in claim 4 , wherein the alkyl dihydroxybenzene is tertiary butyl catechol, the hydroxyquinoline is 8-hydroxyquinoline, and the alkanolamine is monoethanolamine.
6. The formulation as claimed in claim 1 , wherein the one component is the water-soluble solvent selected from the group consisting of ethylene glycol, propylene glycol, benzyl alcohol, dimethyl sulfoxide, dimethylurea, glycerol, dipropylene glycol monomethyl ether, n-methyl pyrrolidone, tetrahydrofurfural alcohol, tetramethoxyethane, and mixtures thereof.
7. The formulation as claimed in claim 6 , wherein the alkyl dihydroxybenzene is tertiary butyl catechol, the hydroxyquinoline is 8-hydroxyquinoline, and the water-soluble solvent is selected from the group consisting of ethylene glycol, propylene glycol, benzyl alcohol, dimethyl sulfoxide, dimethylurea, glycerol, dipropylene glycol monomethyl ether, n-methyl pyrrolidone, tetrahydrofurfural alcohol, tetramethoxyethane, and mixtures thereof.
8. The formulation as claimed in claim 1 , wherein the one component is the combination of the alkanolamine miscible with said hydroxylamine and the water-soluble solvent.
9. The formulation as claimed in claim 8 , wherein the alkanolamine is monoethanolamine, and the water-soluble solvent is selected from the group consisting of ethylene glycol, propylene glycol, benzyl alcohol, dimethyl sulfoxide, dimethylurea, glycerol, dipropylene glycol monomethyl ether, n-methyl pyrrolidone, tetrahydrofurfural alcohol, tetramethoxyethane, and mixtures thereof.
10. The formulation as claimed in claim 1 , wherein the alkyl dihydroxybenzene is tertiary butyl catechol, the hydroxyquinoline is 8-hydroxyquinoline, the alkanolamine is monoethanolamine, and the water-soluble solvent is selected from the group consisting of ethylene glycol, propylene glycol, benzyl alcohol, dimethyl sulfoxide, dimethylurea, glycerol, dipropylene glycol monomethyl ether, n-methyl pyrrolidone, tetrahydrofurfural alcohol, tetramethoxyethane, and mixtures thereof.
11. A method of removing photoresist, etch or ash residue, and contaminants from a semiconductor substrate, comprising:
contacting the semiconductor substrate with a formulation comprising:
from 1 to 30% by weight of at least one selected from a hydroxylamine, a hydroxylamine salt compound, and mixtures thereof;
from 0.1 to 5% by weight of a corrosion inhibitor containing a mixture of alkyl dihydroxybenzene and hydroxyquinoline;
one component selected from the group consisting of from 5% to 45% by weight of an alkanolamine which is miscible with said hydroxylamine,
from 5% to 45% by weight of a water-soluble solvent, and the combinations thereof; and
at least 50% by weight of water.
12. The method as claimed in claim 11 , wherein the alkyl dihydroxybenzene has linear or branched alkyl group contains 2-6 carbon atoms, and the hydroxyquinoline is selected from group consisting of 2-hydroxyquinoline, 4-hydroxyquinoline, 6-hydroxyquinoline, and 8 hydroxyquinoline.
13. The method as claimed in claim 11 , wherein the alkyl dihydroxybenzene is tertiary butyl catechol, and the hydroxyquinoline is 8 hydroxyquinoline.
14. The method as claimed in claim 11 , wherein the one component is the alkanolamine selected from the group consisting of monoethanolamine, aminoethoxyethanol, aminopropylmorpholine, monoethanolamine, N-methyl ethanolamine, N-ethyl ethanolamine, N,N-dimethylethanolamine, N,N-diethyl ethanolamine, N-methyl diethanolamine, N-ethyl diethanolamine, diethanolamine, triethanol amine, tertiarybutyldiethanol amine, isopropanolamine, 2-amino-1-propanol, 3-amino-1-propanol, 2-amino-1-butanol, isobutanolamine, 2-amino-2-ethoxypropanol, 2-amino-2-ethoxyethanol, and mixtures thereof.
15. The method as claimed in claim 14 , wherein the alkyl dihydroxybenzene is tertiary butyl catechol, the hydroxyquinoline is 8-hydroxyquinoline, and the alkanolamine is monoethanolamine.
16. The method as claimed in claim 11 , wherein the one component is the water-soluble solvent selected from the group consisting of ethylene glycol, propylene glycol, benzyl alcohol, dimethyl sulfoxide, dimethylurea, glycerol, dipropylene glycol monomethyl ether, n-methyl pyrrolidone, tetrahydrofurfural alcohol, tetramethoxyethane, and mixtures thereof.
17. The method as claimed in claim 16 , wherein the alkyl dihydroxybenzene is tertiary butyl catechol, the hydroxyquinoline is 8-hydroxyquinoline, and the water-soluble solvent is selected from the group consisting of ethylene glycol, propylene glycol, benzyl alcohol, dimethyl sulfoxide, dimethylurea, glycerol, dipropylene glycol monomethyl ether, n-methyl pyrrolidone, tetrahydrofurfural alcohol, tetramethoxyethane, and mixtures thereof.
18. The method as claimed in claim 11 , wherein the one component is the combination of the alkanolamine miscible with said hydroxylamine and the water-soluble solvent.
19. The method as claimed in claim 18 , wherein the alkanolamine is monoethanolamine, and the water-soluble solvent is selected from the group consisting of ethylene glycol, propylene glycol, benzyl alcohol, dimethyl sulfoxide, dimethylurea, glycerol, dipropylene glycol monomethyl ether, n-methyl pyrrolidone, tetrahydrofurfural alcohol, tetramethoxyethane, and mixtures thereof.
20. The method as claimed in claim 11 , wherein the alkyl dihydroxybenzene is tertiary butyl catechol, the hydroxyquinoline is 8-hydroxyquinoline, the alkanolamine is monoethanolamine, and the water-soluble solvent is selected from the group consisting of ethylene glycol, propylene glycol, benzyl alcohol, dimethyl sulfoxide, dimethylurea, glycerol, dipropylene glycol monomethyl ether, n-methyl pyrrolidone, tetrahydrofurfural alcohol, tetramethoxyethane, and mixtures thereof.