Microelectronic packages having frontside thermal contacts and methods for the fabrication thereof
View Patent ↗Microelectronic packages and methods for fabricating microelectronic packages are provided. In one embodiment, the method includes forming one or more redistribution layers over an encapsulated die having a frontside bond pad area and a frontside passivated non-bond pad area. The redistribution layers are formed to have a frontside opening over the non-bond pad area of the encapsulated die. A primary heat sink body is provided in the frontside opening and thermally coupled to the encapsulated die. A contact array is formed over the redistribution layers and is electrically coupled to a plurality bond pads located on the frontside bond pad area of the encapsulated die.
1. A method for producing a microelectronic package, comprising:
forming one or more redistribution layers over an encapsulated die around which a molded body having a fan-out area is formed, the encapsulated die having a frontside bond pad area and a frontside non-bond pad area, the redistribution layers formed to have a frontside opening over the non-bond pad area of the encapsulated die;
providing a primary heat sink body in the frontside opening and thermally coupled to the encapsulated die;
forming a contact array over the redistribution layers and electrically coupled to a plurality bond pads located on the frontside bond pad area of the encapsulated die; and
providing a peripheral heat sink body over the fan-out area, electrically-isolated from a plurality of interconnected lines formed within the redistribution layers, and in thermal contact with the primary heat sink body.
2. The method of claim 1 wherein the frontside opening is formed within a central region of the redistribution layers, and wherein the primary heat sink body is positioned over a central region of the encapsulated die.
3. The method of claim 1 wherein the contact array is disposed around the primary heat sink body.
4. The method of claim 1 wherein providing comprises adhesively attaching a metal slug directly to the frontside non-bond pad area of the encapsulated die.
5. The method of claim 1 wherein the primary heat sink body is exposed through the frontside of the microelectronic package.
6. The method of claim 1 wherein providing a peripheral heat sink body comprises forming a thermally-conductive layer over the fan-out area utilizing the lithographical patterning and metal deposition processes used to form the redistribution layers.
7. The method of claim 1 wherein the thermally-conductive layer has a substantially ring-shaped planform geometry and extends around the contact array.
8. The method of claim 1 wherein the primary heat sink body has planform dimensions less than the planform dimensions of the encapsulated semiconductor die.
9. The method of claim 1 further comprising depositing a thermally-conductive base layer directly onto the frontside non-bond pad area of the encapsulated die.
10. The method of claim 9 wherein providing the primary heat sink body comprises plating at least one layer of metal in the frontside opening and on the thermally-conductive base layer to produce the primary heat sink body.
11. The method of claim 9 wherein providing comprises attaching a metal slug to the thermally-conductive base layer.
12. The method of claim 1 further comprising:
forming a dielectric layer over the primary heat sink body; and
forming thermally-conductive contacts extending through the dielectric layer and contacting the primary heat sink body.
13. The method of claim 12 wherein the thermally-conductive contacts comprise solder balls.
14. The method of claim 1 wherein the forming comprises forming the redistribution layers over the encapsulated die while included within a molded panel containing a plurality of other encapsulated die, and wherein the method further comprises singulating the molded panel to define the sidewalls of the microelectronic package.
15. The method of claim 14 further comprising forming a peripheral heat sink body in thermal contact with the primary heat sink body along an outer perimeter of the microelectronic package such that the peripheral heat sink body is exposed through at least one sidewall of the microelectronic package after singulation of the molded panel.
16. A microelectronic package, comprising:
a semiconductor die having a frontside non-bond pad area and a frontside bond pad area;
a plurality of bond pads located over the semiconductor die and located within the frontside bond pad area;
a molded body in which the semiconductor die is embedded;
one or more redistribution layers located over the semiconductor die;
a contact array located over the one or more redistribution layers and electrically coupled to the plurality of bond pads therethrough; and
wherein the microelectronic package is a Redistributed Chip Package (RCP), wherein the molded body is comprised of a singulated piece of a molded RCP panel, wherein the molded body comprises a fan-out region surrounding the semiconductor die, and wherein the microelectronic package further comprises a peripheral heat sink body located over the fan-out region.
17. The microelectronic package of claim 16 wherein the primary heat sink body is generally centered with respect to the semiconductor die, at taken along an axis substantially orthogonal to the frontside surface of the semiconductor die; and wherein one or more redistribution layers circumscribe the primary heat sink body.
18. The microelectronic package of claim 16 further comprising a primary heat sink body in thermal contact with the semiconductor die and with the peripheral heat sink body, the primary heat sink body disposed over the frontside non-bond pad area of the semiconductor die.
19. A method for producing a microelectronic package, comprising:
forming one or more redistribution layers over an encapsulated die having a frontside bond pad area and a frontside non-bond pad area, the redistribution layers formed to have a frontside opening over the non-bond pad area of the encapsulated die;
during formation of the one or more redistribution layers, plating a thermally-conductive base layer onto the frontside non-bond pad area of the encapsulated die;
depositing a masking layer over the redistribution layers;
forming an additional opening in the masking layer aligning with the frontside opening provided in the redistribution layers;
after formation of the additional opening in the masking layer, plating at least one layer of metal in the frontside opening and onto the thermally-conductive base layer to produce a primary heat sink body in the frontside opening thermally coupled to the encapsulated die; and
forming a contact array over the redistribution layers and electrically coupled to a plurality bond pads located on the frontside bond pad area of the encapsulated die.
20. The method of claim 19 further comprising:
forming a dielectric layer extending over the primary heat sink body; and
forming electrically-inactive solder balls extending through the dielectric layer and contacting the primary heat sink body, the electrically-inactive solder balls providing an increased cumulative surface area for removing heat from the microelectronic package through the primary heat sink body.