Backscattering for localized annealing
View Patent ↗A method of fabricating an electronic apparatus includes forming an active layer over a wafer, forming a backscatter layer over the wafer, and directing radiation toward the wafer to anneal the active layer. The backscatter layer is not transparent to the radiation, more reflective than absorptive of the radiation, and positioned such that the backscatter layer inhibits exposure of the wafer to the radiation apart from the active layer.
1. An electronic apparatus comprising:
a substrate;
a backscatter layer supported by the substrate;
an active layer disposed over the backscatter layer, the active layer having an annealed configuration in accordance with a first thermal budget higher than a second thermal budget of the substrate;
wherein the active layer comprises a material absorptive of electromagnetic energy at a predetermined frequency at which the backscatter layer backscatters the electromagnetic energy, and
wherein the annealed configuration comprises an annealed section of the active layer and a non-annealed section of the active layer, the annealed and non-annealed sections having a layout defined by a pattern of the backscatter layer.
2. The electronic apparatus of claim 1 , wherein the backscatter layer comprises a thermal insulator material disposed between the active layer and the substrate.
3. The electronic apparatus of claim 1 , wherein the active layer comprises a semiconductor material, the semiconductor material comprising electrically activated dopant.
4. The electronic apparatus of claim 1 , wherein the active layer comprises a silicide layer.
5. The electronic apparatus of claim 1 , wherein the active layer comprises a first constituent layer and a second constituent layer bonded to the first constituent layer.
6. The electronic apparatus of claim 1 , wherein the active layer is selectively annealed.
7. An electronic apparatus comprising:
a substrate;
a backscatter layer supported by the substrate; and
an active layer disposed adjacent the backscatter layer;
wherein the active layer comprises an annealed section and a non-annealed section, the annealed and non-annealed sections having a layout that corresponds with a pattern of the backscatter layer.
8. The electronic apparatus of claim 7 , wherein the active layer is disposed between the backscatter layer and the substrate such that the non-annealed section is covered by the backscatter layer.
9. The electronic apparatus of claim 7 , wherein the backscatter layer is disposed between the active layer and the substrate such that the annealed section is disposed above and adjacent to the backscatter layer.
10. The electronic apparatus of claim 7 , further comprising a buried active layer disposed between the non-annealed section and the substrate.
11. The electronic apparatus of claim 10 , wherein the buried active layer is patterned to define a boundary, and wherein the backscatter layer is disposed adjacent the boundary of the buried active layer.
12. The electronic apparatus of claim 10 , wherein the backscatter layer is disposed in a hole in the buried active layer.
13. The electronic apparatus of claim 10 , wherein the buried active layer is configured to not backscatter light at wavelengths backscattered by the backscatter layer.
14. The electronic apparatus of claim 10 , wherein the buried active layer is not annealed.
15. The electronic apparatus of claim 7 , wherein the backscatter layer comprises a thermal insulator layer and a layer of a conductive material.
16. The electronic apparatus of claim 7 , wherein the active layer comprises an organic material.
17. An electronic apparatus comprising:
a substrate;
a backscatter layer supported by the substrate;
an active layer disposed over the backscatter layer, the active layer having an annealed configuration in accordance with a first thermal budget higher than a second thermal budget of the substrate; and
a buried active layer disposed between a non-annealed section of the active layer and the substrate, wherein the buried active layer has a lower thermal budget than the first thermal budget of the active layer;
wherein the active layer comprises a material absorptive of electromagnetic energy at a predetermined frequency at which the backscatter layer backscatters the electromagnetic energy.