IP Library Granted Patent US 8,952,501
Granted Patent B2
US 8,952,501 · App. 13/950,101 · Granted Feb 10, 2015

Chip package and method for forming the same

Inventors: Yu-Lung Huang (Daxi Township, TW); Chao-Yen Lin (New Taipei, TW); Wei-Luen Suen (New Taipei, TW); Chien-Hui Chen (Zhongli, TW)
Assignee: Xintec, Inc.
H01L23/49805H01L24/95H01L23/3121H01L21/561H01L21/6835H01L24/05H01L24/48H01L2221/68327H01L2221/6834H01L2221/68381H01L2224/0401H01L2224/04042H01L2224/05558H01L2224/16227H01L2224/48091H01L2224/48227H01L2924/14H01L2924/1461H01L24/16H01L2224/05624H01L2224/05644H01L2224/05647H01L2224/05655H01L2224/05669H01L2224/94H01L2224/05572H01L2924/10253H01L2924/12041H01L2224/16225
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Quick Facts
Patent No.
US 8,952,501
App. No.
13/950,101
Granted
Feb 10, 2015
Kind
B2
Abstract

An embodiment of the invention provides a chip package which includes: a semiconductor substrate having an upper surface and a lower surface; a device region or sensing region defined in the semiconductor substrate; a conducting pad located on the upper surface of the semiconductor substrate; at least two recesses extending from the upper surface towards the lower surface of the semiconductor substrate, wherein sidewalls and bottoms of the recesses together form a sidewall of the semiconductor substrate; a conducting layer electrically connected to the conducting pad and extending from the upper surface of the semiconductor substrate to the sidewall of the semiconductor substrate; and an insulating layer located between the conducting layer and the semiconductor substrate.

Claims (40)

1. A chip package, comprising:

a substrate having an upper surface and a lower surface;

a device region or sensing region defined in the substrate;

a conducting pad located on the upper surface of the substrate;

at least two recesses comprising a first recess and a second recess under the first recess, extending from the upper surface towards the lower surface of the substrate, wherein sidewalls and bottoms of the recesses together form a sidewall of the substrate;

an insulating layer overlaying the upper surface of the substrate; and

a conducting layer overlying the insulating layer, wherein the conducting layer is electrically connected to the conducting pad and extends from the upper surface of the substrate to the sidewall of the substrate.

2. The chip package as claimed in claim 1 , wherein at least a portion of the sidewall of the substrate inclines toward the upper surface of the substrate.

3. The chip package as claimed in claim 1 , wherein the substrate comprises a semiconductor substrate with a dielectric layer and a passivation layer overlaying the semiconductor substrate, and a portion of the dielectric layer and the passivation layer is etched to expose a surface of the semiconductor substrate.

4. The chip package as claimed in claim 1 , further comprising a circuit board, wherein the conducting layer is electrically connected to a contact pad on the circuit board through a conducting structure.

5. The chip package as claimed in claim 4 , wherein the conducting structure comprises a solder ball or a bonding wire.

6. The chip package as claimed in claim 5 , wherein the conducting structure is a solder ball, and the solder ball is located on a corner between the substrate and the circuit board.

7. The chip package as claimed in claim 5 , wherein the conducting structure is a bonding wire, and the bonding wire is disposed on the conducting layer on the sidewall of the substrate.

8. The chip package as claimed in claim 7 , wherein the bonding wire is disposed on the conducting layer on one of the bottoms of the recesses.

9. The chip package as claimed in claim 4 , wherein the conducting structure is disposed between the circuit board and the upper surface of the substrate.

10. The chip package as claimed in claim 3 , wherein the at least two recesses connect with each other, and at least a recess is formed from the semiconductor substrate.

11. The chip package as claimed in claim 1 , wherein the device region or sensing region comprises a fingerprint recognition region.

12. The chip package as claimed in claim 1 , wherein one of the recesses extends across an entire length of one side of the substrate.

13. The chip package as claimed in claim 12 , wherein the recess further extends along at least a partial length of an adjacent side.

14. The chip package as claimed in claim 12 , wherein the recess further extends along at least a partial length of two adjacent sides.

15. A method for forming a chip package, comprising:

providing a substrate having an upper surface and a lower surface, wherein at least a device region or sensing region is defined in the substrate, and at least a conducting pad is located on the upper surface of the substrate;

forming at least two recesses comprising a first recess and a second recess under the first recess extending from the upper surface towards the lower surface of the substrate, wherein sidewalls and bottoms of the recesses together form a sidewall of the substrate;

forming an insulating layer overlying the upper surface of the substrate;

forming a conducting layer overlying the insulating layer, wherein the conducting layer is electrically connected to the conducting pad and extends from the upper surface of the substrate to the sidewall of the substrate.

16. The method for forming a chip package as claimed in claim 15 , further comprising thinning the substrate before the recesses are formed.

17. The method for forming a chip package as claimed in claim 15 , further comprising:

providing a circuit board having a contact pad;

disposing the substrate overlying the circuit board; and

forming a conducting structure, wherein the conducting structure is electrically connected to the contact pad and the conducting layer.

18. The method for forming a chip package as claimed in claim 17 , wherein the conducting structure comprises a solder ball or a bonding wire.

19. The method for forming a chip package as claimed in claim 17 , wherein the conducting structure is disposed between the circuit board and the upper surface of the substrate.

20. The method for forming a chip package as claimed in claim 19 , wherein the conducting structure is electrically connected to the conducting layer directly on one of the bottoms of the recesses.

21. The method for forming a chip package as claimed in claim 15 , wherein the substrate comprises a semiconductor substrate with a dielectric layer and a passivation layer overlying the semiconductor substrate.

22. The method for forming a chip package as claimed in claim 21 , wherein a portion of the dielectric layer and the passivation layer is etched to expose a surface of the semiconductor substrate.

23. The method for forming a chip package as claimed in claim 22 , wherein the recesses are formed by using an etching process, and at least a recess is formed from the semiconductor substrate.

24. The method for forming a chip package as claimed in claim 15 , wherein one of the recesses extends across an entire length of one side of the substrate.

25. The method for forming a chip package as claimed in claim 24 , wherein the recess further extends along at least a partial length of an adjacent side.

26. The method for forming a chip package as claimed in claim 24 , wherein the recess further extends along at least a partial length of two adjacent sides.

27. The method for forming a chip package as claimed in claim 15 , wherein a plurality of chip packages are defined on the substrate, each chip package comprising at least the device region or sensing region, wherein the method further comprising dicing the substrate to separate the plurality of chip packages.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Aug 27, 2013
From: HUANG, YU-LUNG; LIN, CHAO-YEN; SUEN, WEI-LUEN; CHEN, CHIEN-HUI
To: XINTEC INC.
Reel/Frame 031095/0122 →
Continuity (3)
Continuation In Part 13105775 · May 11, 2011
Provisional Application 61333459 · May 11, 2010
Related Publication 20130307125A1 · Nov 21, 2013