Sputter and surface modification etch processing for metal patterning in integrated circuits
One embodiment of an integrated circuit includes a plurality of semiconductor devices and a plurality of conductive lines connecting the plurality of semiconductor devices, wherein at least some of the plurality of conductive lines have pitches of less than one hundred nanometers and sidewall tapers of between approximately eighty and ninety degrees. Another embodiment of an integrated circuit includes a plurality of semiconductor devices and a plurality of conductive lines connecting the plurality of semiconductor devices, wherein at least some of the plurality of conductive lines are fabricated by providing a layer of conductive metal in a multi-layer structure fabricated upon a wafer and sputter etching the layer of conductive metal using a methanol plasma, wherein a portion of the layer of conductive metal that remains after the sputter etching forms the one or more conductive lines.
1. An integrated circuit, comprising:
a plurality of semiconductor devices;
a plurality of conductive lines connecting the plurality of semiconductor devices, wherein at least some of the plurality of conductive lines have pitches of less than one hundred nanometers, and wherein at least some of the conductive lines are formed from a methanol plasma-etched metal; and
a plurality of liners each comprising two sections, wherein a first section of each of the plurality of liners is positioned directly between a respective one of the plurality of conductive lines and a layer of dielectric material, and wherein a second section of each of the plurality of liners comprises a portion that contacts a portion of the first section of each of the plurality of liners and also at least partially surrounds one of the plurality of conductive lines.
2. The integrated circuit of claim 1 , wherein at least one liner of the set of liners is in direct contact with a base of a respective one of the plurality of conductive lines.
3. The integrated circuit of claim 2 , wherein at least one liner of the set of liners is in direct contact with a sidewall of the respective one of the plurality of conductive lines.
4. The integrated circuit of claim 1 , wherein at least some of the plurality of conductive lines have sidewall tapers of between approximately eighty and ninety degrees.
5. The integrated circuit of claim 1 , wherein at least some of the plurality of conductive lines have line widths of less than forty nanometers.
6. The integrated circuit of claim 1 , wherein at least some of the plurality of conductive lines have substantially pyramidal profiles.
7. The integrated circuit of claim 6 , wherein the substantially pyramidal profiles are defined by sidewalls having a taper of approximately eighty degrees.
8. The integrated circuit of claim 1 , wherein at least some of the plurality of conductive lines comprise copper.
9. The integrated circuit of claim 1 , wherein at least some of the plurality of conductive lines comprise a copper alloy.
10. The integrated circuit of claim 1 , wherein at least some of the plurality of conductive lines comprise gold.
11. The integrated circuit of claim 1 , wherein at least some of the plurality of conductive lines comprise nickel.
12. The integrated circuit of claim 1 , wherein at least some of the plurality of conductive lines comprise cobalt.
13. The integrated circuit of claim 1 , wherein the integrated circuit comprises a complementary metal-oxide-semiconductor device.
14. The integrated circuit of claim 1 , wherein at least some of the plurality of liners comprise tantalum.
15. The integrated circuit of claim 1 , wherein at least some of the plurality of liners comprise tantalum nitride.
16. The integrated circuit of claim 1 , wherein at least some of the plurality of liners comprise cobalt.
17. The integrated circuit of claim 1 , wherein at least some of the plurality of liners comprise manganese.
18. The integrated circuit of claim 1 , wherein at least some of the plurality of liners comprise a manganese oxide.
19. The integrated circuit of claim 1 , wherein at least some of the plurality of liners comprise a manganese silicate.