Semiconductor package and manufacturing method
A metal plate covers an opening on the upper surface of a core substrate and exposes an outer edge of the upper surface of the core substrate. A conductive layer covers the lower surface of the core substrate. A semiconductor chip bonded to a first surface of the metal plate is exposed through the opening. A first insulating layer covers the upper and side surface of the metal plate and the outer edge of the upper surface of the core substrate. A second insulating layer fills the openings of the metal plate and the conductive layer and covers the outer edge of the lower surface of the core substrate, the conductive layer, and the semiconductor chip. The metal plate is thinner than the semiconductor chip. Total thickness of the conductive layer and the core substrate is equal to or larger than the thickness of the semiconductor chip.
1. A semiconductor package comprising:
a core substrate made of a reinforcement-containing insulating resin, the core substrate including a first surface, a second surface opposite to the first surface, and a first opening penetrating the core substrate from the first surface to the second surface;
a metal plate that covers an open end of the first opening on the first surface of the core substrate, the metal plate exposing an outer edge of the first surface of the core substrate and covering the first surface of the core substrate except for the outer edge;
a conductive layer that covers the second surface of the core substrate and including an opening communicating with the first opening, the conductive layer exposing an outer edge of the second surface of the core substrate and covering the second surface of the core substrate except for the outer edge and the first opening;
an electronic component bonded to a first surface of the metal plate exposed through the first opening;
a first insulating layer that covers a second surface of the metal plate opposite to the first surface of the metal plate, a side surface of the metal plate, and the outer edge of the first surface of the core substrate;
a second insulating layer that fills the first opening, the second insulating layer covering the outer edge of the second surface of the core substrate, the conductive layer, and the electronic component; and
a first wiring structure stacked on the second insulating layer, the first wiring structure including a first wiring layer electrically connected to the electronic component,
wherein the metal plate is thinner than the electronic component, and a total thickness of the conductive layer and the core substrate is equal to or larger than a thickness of the electronic component.
2. The semiconductor package according to claim 1 , further comprising:
a through electrode provided around the first opening, the through electrode filling a through hole penetrating the core substrate;
a first wiring pattern electrically connected to one end of the through electrode and surrounded by and separated from the metal plate on the first surface of the core substrate; and
a second wiring pattern electrically connected to the other end of the through electrode and separated from the conductive layer on the second surface of the core substrate.
3. The semiconductor package according to claim 2 , further comprising:
a second wiring structure including a second wiring layer that is stacked on the first insulating layer and electrically connected to the first wiring pattern; and
a solder resist layer formed on the first insulating layer to partially cover the first wiring layer, the second wiring layer including a pad, which is exposed from an opening of the solder resist layer and is configured to be connected to another semiconductor package, on the outermost side of the second wiring structure.
4. The semiconductor package according to claim 1 , wherein
the first wiring structure has an alternate stacked structure including the first wiring layer and an interlayer insulating layer stacked on the first wiring layer, and
the interlayer insulating layer is an outermost interlayer insulating layer on the opposite side to the first insulating layer, and is made of a reinforcement-containing insulating resin.
5. A semiconductor device comprising:
the semiconductor package according to claim 1 ; and
another semiconductor package stacked on the semiconductor package.