Microelectronic packages containing opposing devices and methods for the fabrication thereof
View Patent ↗Microelectronic packages and methods for fabricating microelectronic packages are provided. The fabrication method may be carried-out utilizing a preformed panel having a frontside cavity and a backside cavity in which first and second microelectronic devices are positioned, respectively. One or more frontside RDL layers are produced over the frontside of the preformed panel in ohmic contact with or otherwise electrically coupled to the first microelectronic device. Similarly, one or more backside RDL layers are formed over the backside of the preformed panel in ohmic contact with or otherwise electrically coupled to the second microelectronic device. A frontside contact array is produced over the frontside of the preformed panel and electrically coupled to at least the first microelectronic device through the frontside RDL layers. Lastly, the preformed panel is singulated to yield a microelectronic package including a package body in which the first and second microelectronic devices are embedded.
1. A method for fabricating a microelectronic package using a preformed panel having at least one frontside cavity and at least one backside cavity, the method comprising:
positioning first and second microelectronic devices in the frontside and backside cavities of the preformed panel, respectively, a circumferential clearance provided around the first microelectronic device when positioned within the frontside cavity;
producing one or more frontside redistribution layers over the frontside of the preformed panel electrically coupled to the first microelectronic device, the circumferential clearance at least partially filled with a photoimagable dielectric material during the production of the frontside redistribution layers;
producing one or more backside redistribution layers over the backside of the preformed panel electrically coupled to the second microelectronic device;
forming a frontside contact array over the frontside of the preformed panel and electrically coupled to at least the first microelectronic device through the frontside redistribution layers; and
singulating the preformed panel to yield a microelectronic package including a package body in which the first and second microelectronic devices are embedded.
2. The method of claim 1 wherein the first and second microelectronic devices comprise first and second semiconductor die each having an active surface over which a plurality of bond pads is formed, and wherein positioning comprises placing the first and second semiconductor die such that their respective active surfaces face in opposing directions.
3. The method of claim 1 wherein positioning comprises placing the first and second microelectronic devices in a back-to-back relationship.
4. The method of claim 1 wherein positioning comprises placing the first and second microelectronic devices in substantial alignment, as taken along an axis orthogonal to the frontside of the preformed panel.
5. The method of claim 1 further comprising forming a backside contact array over the backside of the preformed panel and electrically coupled to at least the second microelectronic device through the backside redistribution layers.
6. The method of claim 1 wherein the preformed panel is produced utilizing a molding process.
7. The method of claim 1 wherein the first microelectronic device comprises a semiconductor die having an active side over which a plurality of bond pads is formed, and wherein the frontside redistribution layers are produced over the active side of the semiconductor die and in ohmic contact with the bond pads.
8. The method of claim 7 wherein the active side of the semiconductor die is substantially coplanar with the frontside of the preformed panel when the semiconductor is positioned within the frontside cavity.
9. The method of claim 1 wherein the preformed panel is formed to include at least one prefabricated through package via, and wherein the frontside redistribution layers are produced in ohmic contact with the prefabricated through package via.
10. The method of claim 9 wherein the prefabricated through package via is molded into the preformed panel.
11. The method of claim 1 wherein the frontside redistribution layers are fabricated to include a first metal level, and wherein the method further comprises forming at least one through package via extending through the prefabricated package body and through the first metal level.
12. The method of claim 10 wherein forming at least one through package via comprises:
laser drilling an opening extending through first metal level and through the through package via; and
filling the opening with an electrically-conductive paste.
13. The method of claim 1 wherein the frontside and backside redistribution layers each comprise at least one metal level, and wherein the method further comprises forming at least one through package via extending from the outermost metal level of the frontside redistribution layers to the outermost metal level of the backside redistribution layers.
14. The method of claim 1 wherein the preformed panel is fabricated to include a partition wall separating the frontside cavity and the backside cavity, and wherein positioning the first and second microelectronic devices comprises:
bonding the first microelectronic device to a first surface of the partition wall; and
bonding the second microelectronic device to a second, opposing surface of the partition wall.
15. The method for fabricating a microelectronic package using a preformed panel having at least one frontside cavity and at least one backside cavity, the method comprising:
positioning first and second microelectronic devices in the frontside and backside cavities of the preformed panel, respectively;
producing one or more frontside redistribution layers over the frontside of the preformed panel electrically coupled to the first microelectronic device and comprising at least one metal level;
producing one or more backside redistribution layers over the backside of the preformed panel electrically coupled to the second microelectronic device and comprising at least one metal level;
forming at least one electrically inactive through package via extending from the outermost metal level of the frontside redistribution layers to the outermost metal level of the backside redistribution layers;
forming a frontside contact array over the frontside of the preformed panel and electrically coupled to at least the first microelectronic device through the frontside redistribution layers; and
singulating the preformed panel to yield a microelectronic package including a package body in which the first and second microelectronic devices are embedded.
16. A method for fabricating a microelectronic package using a preformed panel having at least one frontside cavity and at least one backside cavity, the frontside cavity connecting with the backside cavity to form an opening extending through the preformed panel, the method comprising:
positioning first and second microelectronic devices in the frontside and backside cavities of the preformed panel, respectively, positioning the first and second microelectronic devices comprising:
bonding the first microelectronic device to the second microelectronic device to produce a back-to-back device stack; and
positioning the back-to-back device stack in the opening;
producing one or more frontside redistribution layers over the frontside of the preformed panel electrically coupled to the first microelectronic device;
producing one or more backside redistribution layers over the backside of the preformed panel electrically coupled to the second microelectronic device;
forming a frontside contact array over the frontside of the preformed panel and electrically coupled to at least the first microelectronic device through the frontside redistribution layers; and
singulating the preformed panel to yield a microelectronic package including a package body in which the first and second microelectronic devices are embedded.
17. A microelectronic package, comprising:
a preformed package body having a frontside cavity and a backside cavity;
a first microelectronic device disposed within the frontside cavity;
a clearance provided between the first microelectronic device and sidewalls of the preformed package body defining the frontside cavity;
a second microelectronic device disposed within the backside cavity;
one or more frontside redistribution layers over the preformed package body in ohmic contact with the first microelectronic device, the frontside redistribution layers comprising a dielectric material filling the clearance and surrounding the first microelectronic device;
one or more backside redistribution layers over the preformed package body in ohmic contact with the first microelectronic device; and
a frontside contact array disposed over the frontside of the preformed package body and electrically coupled to at least the first microelectronic device through the frontside redistribution layers.
18. The microelectronic package of claim 17 wherein the first and second microelectronic devices are positioned in a back-to-back relationship.
19. The microelectronic package of claim 18 wherein a backside of the first microelectronic device is bonded to a backside of the second microelectronic device.
20. The microelectronic package of claim 18 wherein the preformed package body includes a partition wall separating the frontside cavity and the backside cavity, and wherein the first and second microelectronic devices are bonded to opposing surfaces of the partition wall.