Copper pillar bump and flip chip package using same
View Patent ↗Electrically conductive pillars with a solder cap are formed on a substrate with an electroplating process. A flip-chip die having solder wettable pads is attached to the substrate with the conductive pillars contacting the solder wettable pads.
1. A method of assembling a semiconductor device, comprising:
providing a substrate having a substrate body with an inner face having inner contact pads and an outer face having outer contact pads, and electrically conductive pillars that extend from the inner contact pads, wherein the step of providing the substrate includes:
providing a body of insulating material having the body inner and outer faces;
providing the substrate inner contact pads on the inner face of the substrate body;
providing the substrate outer contact pads on the outer face of the substrate body;
wherein the body of insulating material includes interconnectors embedded in the insulating material that interconnect the inner and outer contact pads;
providing a solder mask layer overlying the inner face of the substrate between the inner contact pads, wherein the solder mask layer has apertures over the inner contact pads that are narrower than the inner contact pads;
forming a resist layer covering the solder mask layer, the resist layer also having apertures over the inner contact pads, wherein a height of the resist layer is greater than a height of the solder mask layer;
forming the pillars through the solder mask layer on the inner contact pads within the apertures of the solder mask layer and the apertures of the resist layer;
forming solder caps on the remote ends of the pillars, wherein the solder caps are formed within the apertures of the resist layer; and
removing the resist layer such that after said removing, a height of exposed portions of the pillars is greater than a height of neck portions of the pillars embedded in the solder mask layer;
attaching an active face of a flip chip semiconductor die to the substrate inner face, wherein die bonding pads on the die active face receive the electrically conductive pillars; and
electrically connecting the pillars with the die bonding pads.
2. The method of assembling a semiconductor device of claim 1 , wherein the die bonding pads include a solder wettable layer.
3. The method of assembling a semiconductor device of claim 2 , wherein an exposed surface of the die bonding pads comprises an electro-less nickel with immersion gold coating.
4. The method of assembling a semiconductor device of claim 1 , wherein the step of electrically connecting the pillars with the die bonding pads includes performing a reflow process to connect the pillars to the die bonding pads.
5. The method of claim 1 , further comprising the step of attaching conductive balls to the substrate outer contact pads, wherein the conductive balls allow for connection of the semiconductor device to an external electrical device.
6. The method of claim 1 , wherein the pillars are formed of copper.
7. The method of claim 1 , wherein said apertures of the resist layer are wider than the apertures of the solder mask layer and the pillars have necks at the inner face into which extends the solder mask layer.
8. The method of claim 1 , wherein forming the pillars through the solder mask layer includes growing the pillars electrolytically within the apertures of the solder mask layer and the apertures of the resist layer.
9. The method of claim 8 , wherein forming the solder caps includes growing the solder caps electrolytically within said apertures of said resist layer.