Side vented pressure sensor device
View Patent ↗A semiconductor sensor device has a pressure sensing die and at least one other die mounted on a substrate, and electrical interconnections that interconnect the pressure sensing die and the at least one other die. An active region of the pressure sensing die is covered with a pressure sensitive gel material, and a cap having a cavity is mounted over the pressure sensing die such that the pressure sensing die is positioned within the cavity. The cap has a side vent hole that exposes the gel covered active region of the pressure sensing die to ambient atmospheric pressure outside the sensor device. Molding compound on an upper surface of the substrate encapsulates the at least one other die and at least a portion of the cap.
1. A method of assembling a semiconductor sensor device, the method comprising:
mounting a pressure sensing die and at least one other die on a substrate;
electrically interconnecting the pressure sensing die and the at least one other die;
covering an active region of the pressure sensing die with pressure sensitive gel material;
mounting a cap having a cavity formed therein over the pressure sensing die, wherein:
the pressure sensing die is positioned within the cavity; and
the cap has a side vent stack formed thereon;
encapsulating the at least one other die and at least a portion of the cap with a molding compound on an upper surface of the substrate; and
singulating through the substrate and the molding compound such that at least a portion of the side vent stack is severed from the cap, thereby forming a vent opening in the cap that exposes the gel-covered active region of the pressure sensing die to ambient atmospheric pressure outside the sensor device.
2. The method of claim 1 , wherein the encapsulating step comprises encapsulating all of the cap with the molding compound.
3. The method of claim 1 , wherein the encapsulating step comprises encapsulating all but a top of the cap with the molding compound.
4. The method of claim 1 , wherein:
the at least one other die comprises a micro-control unit (MCU) and an acceleration sensor die;
mounting the at least one other die on the substrate comprises mounting the MCU on the substrate and mounting the acceleration-sensing die on the MCU; and
the method further comprises electrically connecting the acceleration-sensing die to the MCU.
5. The method of claim 1 , further comprising assembling an other sensor device on the substrate adjacent to the sensor device, wherein performing the singulation through the substrate and the molding compound separates the sensor device from the other sensor device.
6. The method of claim 5 , wherein performing the singulation through the substrate and the molding compound leaves a portion of the side vent stack in molding compound of the other sensor device.
7. A semiconductor sensor device comprising:
a substrate;
a pressure sensing die and at least one other die mounted on a top side of the substrate;
electrical interconnections between the pressure sensing die and the at least one other die;
pressure sensitive gel material covering an active region of the pressure sensing die;
a cap having a cavity formed therein mounted over the pressure sensing die, wherein:
the pressure sensing die is positioned within the cavity such that the pressure sensing die is enclosed inside the cap and the substrate; and
the cap has a side vent hole formed thereon that exposes the gel covered active region of the pressure sensing die to ambient atmospheric pressure outside the sensor device, wherein the side vent hole is located between a top side of the cap and the top side of the substrate and extends in a plane parallel to said top sides; and
molding compound on an upper surface of the substrate encapsulating the at least one other die and at least a portion of the cap.
8. The sensor device of claim 7 , further comprising a vent stack formed on a side of the cap, wherein the side vent hole is formed in the vent stack.
9. The sensor device of claim 7 , further comprising at least a portion of a vent stack encapsulated in the molding compound, wherein the portion of the vent stack corresponds to a side vent hole of another sensor device that was separated from the sensor device during assembly by sawing through the vent stack of the other sensor device.
10. The sensor device of claim 7 , wherein the sensor device implements one of (i) a land grid array (LGA) and (ii) a ball grid array (BGA) type surface-mount package.
11. The sensor device of claim 7 , wherein the molding compound encapsulates all but the side vent hole of the cap.
12. The sensor device of claim 7 , wherein the molding compound encapsulates all but the side vent hole and a top of the cap.
13. The sensor device of claim 7 , wherein the at least one other die comprises a micro-control unit (MCU).
14. The sensor device of claim 13 , further comprising an acceleration-sensing die mounted on the MCU, wherein the acceleration-sensing die is electrically connected to the MCU.