IP Library Granted Patent US 9,105,854
Granted Patent B2
US 9,105,854 · App. 14/032,998 · Granted Aug 11, 2015

Transferable transparent conductive oxide

Inventors: Keith E. Fogel (Hopewell Junction, NY); Jeehwan Kim (White Plains, NY); Devendra K. Sadana (Pleasantville, NY); Tze-bin Song (Los Angeles, CA)
Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
H01L51/442
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Quick Facts
Patent No.
US 9,105,854
App. No.
14/032,998
Granted
Aug 11, 2015
Kind
B2
Abstract

A method for fabricating a photovoltaic device includes forming an adhesion layer on a substrate, forming a material layer on the adhesion layer and applying release tape to the material layer. The substrate is removed at a weakest interface between the adhesion layer and the substrate by mechanically pulling the release tape to form a transfer substrate including the adhesion layer, the material layer and the release tape. The transfer substrate is transferred to a target substrate to contact the adhesion layer to the target substrate. The transfer substrate includes a material sensitive to formation processes of the transfer substrate such that exposure to the formation processes of the transfer substrate is avoided by the target substrate.

Claims (26)

1. A method for fabricating a photovoltaic device, comprising:

forming an adhesion layer on a substrate;

forming a material layer on the adhesion layer;

applying release tape to the material layer;

removing the substrate at a weakest interface between the adhesion layer and the substrate by mechanically pulling the release tape to form a transfer substrate including the adhesion layer, the material layer and the release tape; and

transferring the transfer substrate to a target substrate to contact the adhesion layer to the target substrate, the target substrate including a material sensitive to formation processes of the transfer substrate, such that exposure to the formation processes of the transfer substrate is avoided by the target substrate.

2. The method as recited in claim 1 , wherein forming the adhesion layer includes forming a layer of one or more of: gold, silver, copper and platinum, graphene and carbon nanotubes.

3. The method as recited in claim 1 , wherein forming the material layer includes forming one or more of: a transparent conductor, a multi-layer structure, device structures, and a metal grid.

4. The method as recited in claim 1 , wherein the sensitive material includes an organic photovoltaic layer.

5. The method as recited in claim 4 , wherein the target substrate includes a transparent conductor.

6. The method as recited in claim 1 , wherein the sensitive material is exposed to temperatures not exceeding 120 degrees Celsius.

7. The method as recited in claim 1 , further comprising: removing the release tape using heat.

8. A method for fabricating a photovoltaic device, comprising:

forming a metal adhesion layer on a substrate;

forming a first transparent conductor layer on the adhesion layer;

applying thermal release tape to the first transparent conductor layer;

mechanically peeling the thermal release tape to remove the substrate at a weakest interface between the adhesion layer and the substrate;

forming a sensitive material on a second transparent conductor layer; and

bonding the adhesion layer to the sensitive material to form a photovoltaic device such that the sensitive material avoids exposure to formation processes of the adhesion layer and the first transparent conductor layer.

9. The method as recited in claim 8 , wherein forming the metal adhesion layer includes forming a layer of one or more of: gold, silver, copper and platinum.

10. The method as recited in claim 8 , further includes forming a metal grid on the first transparent conductor.

11. The method as recited in claim 8 , wherein the sensitive material includes an organic photovoltaic layer.

12. The method as recited in claim 8 , further comprising etching the adhesion layer prior to bonding to reduce its thickness.

13. The method as recited in claim 8 , wherein the sensitive material is exposed to temperatures not exceeding 120 degrees Celsius.

14. The method as recited in claim 8 , further comprising: removing the thermal release tape using heat.

15. The method as recited in claim 8 , wherein bonding includes one or more of applying pressure, applying adhesive and chemically bonding the adhesion layer to the sensitive material.

Assignments (6)
RELEASE OF SECURITY INTEREST Recorded May 12, 2021
From: WILMINGTON TRUST, NATIONAL ASSOCIATION
To: GLOBALFOUNDRIES U.S. INC.
Reel/Frame 056987/0001 →
RELEASE OF SECURITY INTEREST Recorded Nov 20, 2020
From: WILMINGTON TRUST, NATIONAL ASSOCIATION
To: GLOBALFOUNDRIES INC.
Reel/Frame 054636/0001 →
SECURITY AGREEMENT Recorded Nov 29, 2018
From: GLOBALFOUNDRIES INC.
To: WILMINGTON TRUST, NATIONAL ASSOCIATION
Reel/Frame 049490/0001 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Oct 5, 2015
From: GLOBALFOUNDRIES U.S. 2 LLC; GLOBALFOUNDRIES U.S. INC.
To: GLOBALFOUNDRIES INC.
Reel/Frame 036779/0001 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Sep 3, 2015
From: INTERNATIONAL BUSINESS MACHINES CORPORATION
To: GLOBALFOUNDRIES U.S. 2 LLC
Reel/Frame 036550/0001 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Sep 20, 2013
From: FOGEL, KEITH E.; KIM, JEEHWAN; SADANA, DEVENDRA K.; SONG, TZE-BIN
To: INTERNATIONAL BUSINESS MACHINES CORPORATION
Reel/Frame 031252/0387 →
Continuity (1)
Related Publication 20150084004A1 · Mar 26, 2015