IP Library Granted Patent US 9,065,015
Granted Patent B2
US 9,065,015 · App. 14/038,881 · Granted Jun 23, 2015

Forming light-emitting diodes using seed particles

Inventors: Jung-Tang Chu (Zhunan Township, TW); Ching-Hua Chiu (Hsinchu, TW); Hung-Wen Huang (Hsinchu, TW); Yea-Chen Lee (Zhubei, TW); Hsing-Kuo Hsia (Jhubei, TW)
Assignee: TSMC SOLID STATE LIGHTING LTD.
H01L33/32H01L33/325H01L33/30H01L21/02458H01L21/02488H01L21/0254H01L21/02639H01L21/0265H01L33/0075H01L33/0079H01L33/12H01L33/16
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Quick Facts
Patent No.
US 9,065,015
App. No.
14/038,881
Granted
Jun 23, 2015
Kind
B2
Abstract

A device includes a substrate; a group III-V semiconductor layer disposed over the substrate; and a seed layer disposed over the group III-V semiconductor layer. The substrate is a printed circuit board. The group III-V semiconductor layer includes a multiple quantum well (MQW) layer, a p-type doped layer, and an n-type doped layer. The seed layer includes a plurality of miniature elements. The miniature elements each contain a single-crystal material suitable for epitaxially growing the group III-V semiconductor layer. The miniature elements collectively cover less than 100% of a surface of the group III-V semiconductor layer.

Claims (39)

1. A device, comprising:

a substrate, wherein the substrate is a printed circuit board;

a group III-V semiconductor layer disposed over the substrate; and

a seed layer disposed over the group III-V semiconductor layer;

wherein:

the group III-V semiconductor layer includes a multiple quantum well (MQW) layer, a p-type doped layer, and an n-type doped layer;

the seed layer includes a plurality of miniature elements;

the miniature elements each contain a single-crystal material suitable for epitaxially growing the group III-V semiconductor layer; and

the miniature elements collectively cover less than 100% of a surface of the group III-V semiconductor layer.

2. The device of claim 1 , wherein the group III-V semiconductor layer includes gallium nitride.

3. The device of claim 2 , wherein a lattice constant mismatch between the single-crystal material of the seed layer and the group III-V semiconductor layer is sufficiently small to grow single-crystal gallium nitride on the single-crystal material.

4. The device of claim 1 , wherein the single-crystal material includes gallium nitride, silicon carbide, or aluminum nitride.

5. The device of claim 1 , wherein the seed layer covers more than 50% of the surface of the group III-V semiconductor layer.

6. The device of claim 1 , wherein the miniature elements have substantially similar shapes and sizes.

7. The device of claim 1 , wherein the miniature elements have varying shapes and sizes.

8. The device of claim 1 , wherein the miniature elements are randomly distributed over the surface of the group III-V semiconductor layer.

9. The device of claim 1 , wherein the miniature elements have an average diameter that is no less than about 1 micron.

10. A device, comprising:

a packaging substrate, wherein the packaging substrate contains circuitry printed or embedded thereon;

a group III-V semiconductor layer disposed over the packaging substrate; and

a plurality of miniature elements disposed over portions of the group III-V semiconductor layer, wherein the miniature elements contain a single-crystal material whose lattice constant mismatch with the group III-V semiconductor layer is sufficiently small such that epitaxial growth of the group III-V semiconductor layer can occur on the single-crystal material, wherein the group III-V semiconductor layer is disposed on a first side of the miniature elements, and wherein a second side of the miniature elements is free of being in contact with any layer containing a group III-V compound, the second side being opposite the first side.

11. The device of claim 10 , wherein:

the group III-V semiconductor layer includes gallium nitride; and

the single-crystal material includes gallium nitride, silicon carbide, or aluminum nitride.

12. The device of claim 10 , wherein the miniature elements have substantially similar shapes and sizes.

13. The device of claim 10 , wherein the miniature elements have varying shapes and sizes.

14. The device of claim 10 , wherein the miniature elements are randomly distributed over the surface of the group III-V semiconductor layer.

15. The device of claim 10 , wherein the miniature elements have an average diameter that is no less than about 1 micron.

16. A device, comprising:

a silicon substrate;

a first dielectric layer disposed over the silicon substrate;

a second dielectric layer disposed over the first dielectric layer, wherein the second dielectric layer is in direct contact with the first dielectric layer; and

a plurality of miniature elements each partially embedded within the second dielectric layer, wherein the miniature elements each contain a single-crystal material whose lattice constant mismatch with a group III-V semiconductor material is configured to be sufficiently small so that the group III-V semiconductor material can be epitaxially grown on the single-crystal material.

17. The device of claim 16 , further comprising: a semiconductor layer disposed over the second dielectric layer and the plurality of miniature elements, wherein the semiconductor layer contains the group III-V semiconductor material.

18. The device of claim 16 , wherein:

the group III-V semiconductor layer includes gallium nitride; and

the single-crystal material includes gallium nitride, silicon carbide, or aluminum nitride.

19. The device of claim 16 , wherein the miniature elements have varying shapes and sizes and are randomly distributed over a surface of the group III-V semiconductor layer.

20. The device of claim 1 , wherein the substrate is a packaging substrate.

Assignments (4)
CHANGE OF NAME Recorded Apr 22, 2026
From: EPISTAR CORPORATION
To: ENNOSTAR CORPORATION
Reel/Frame 075513/0783 →
CHANGE OF NAME Recorded Dec 2, 2015
From: TSMC SOLID STATE LIGHTING LTD.
To: CHIP STAR LTD.
Reel/Frame 037195/0724 →
MERGER Recorded Dec 2, 2015
From: CHIP STAR LTD.
To: EPISTAR CORPORATION
Reel/Frame 037195/0738 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Sep 27, 2013
From: CHU, JUNG-TANG; CHIU, CHING-HUA; HUANG, HUNG-WEN; LEE, YEA-CHEN; HSIA, HSING-KUO
To: TSMC SOLID STATE LIGHTING LTD.
Reel/Frame 031295/0226 →
Continuity (3)
Continuation 13227905 · Sep 8, 2011
Provisional Application 61409212 · Nov 2, 2010
Related Publication 20140021483A1 · Jan 23, 2014