Die assembly on thin dielectric sheet
View Patent ↗A die assembly formed on a thin dielectric sheet is described. In one example, a first and a second die have interconnect areas. A dielectric sheet, such as glass, silicon, or oxidized metal is applied over the interconnect areas of dies. Conductive vias are formed in the dielectric sheet to connect with pads of the interconnect areas. A build-up layer includes routing to connect pads of the first die interconnect area to pads of the second die interconnect area through the conductive vias and a cover is applied over the dies, the dielectric sheet, and the build-up layer.
1. A method comprising:
attaching a first and a second die to a carrier, the first and the second die each having interconnect areas on a side opposite the carrier;
attaching a dielectric sheet over the interconnect areas of the first and the second die, the dielectric sheet having a polished surface facing the dies, and being stable to 600° C.;
forming conductive vias in the dielectric sheet over the interconnect areas after attaching the dielectric sheet to connect with pads of the interconnect areas;
depositing build-up layers over the dielectric sheet, the build-up layers including routing to connect pads of the first die interconnect area to pads of the second die interconnect area through the conductive vias; and
packaging the dies, the dielectric sheet, and the build-up layers by mounting the dies to a package substrate through the build-up layers.
2. The method of claim 1 , wherein attaching the dielectric sheet comprises attaching a glass sheet with an adhesive.
3. The method of claim 1 , wherein attaching the dielectric sheet comprises attaching the dielectric sheet with direct oxide bonding.
4. The method of claim 1 , wherein forming conductive vias comprises etching via holes through the dielectric sheet to the pads.
5. The method of claim 4 , wherein forming conductive vias comprises filling the etched via holes with copper.
6. The method of claim 1 , further comprising depositing pads on the build-up layers for connection to a package substrate.
7. The method of claim 1 , further comprising removing the carrier before packaging.
8. The method of claim 1 , further comprising covering the dies with a molding compound.
9. The method of claim 1 , wherein packaging comprises removing the carrier, and then covering the dies.
10. The method of claim 9 , wherein the carrier is formed of a glass.
11. The method of claim 10 , further comprising applying underfill between the build-up layers and the package substrate.
12. The method of claim 1 , wherein packaging comprises:
applying a second dielectric carrier to the build-up layers opposite the first carrier;
removing the first carrier;
applying a molding compound over the dies;
removing the second dielectric carrier; and
attaching the dies to a package substrate through the build-up layers.
13. A integrated circuit die package fabricated according to claim 1 .
14. A computer system comprising:
a display;
a user interface; and
a processor package fabricated according to claim 1 .
15. The method of claim 1 , wherein attaching a dielectric sheet comprises attaching a dielectric sheet over many dies and then dicing through the dielectric sheet so that the first and second die are on one piece of the dielectric sheet after depositing build-up layers.