Trap rich layer with through-silicon-vias in semiconductor devices
View Patent ↗An integrated circuit chip is formed with a circuit layer, a trap rich layer and through-semiconductor-vias. The trap rich layer is formed above the circuit layer. The through-semiconductor-vias are also formed above the circuit layer. In some embodiments, the circuit layer is included in a wafer, and the trap rich layer and through-semiconductor-vias are included in another wafer. The two wafers are bonded together after formation of the trap rich layer and through-semiconductor-vias. Additionally, in some embodiments, yet another wafer may also be bonded to the wafer that includes the trap rich layer and through-semiconductor-vias. Furthermore, in some embodiments, another circuit layer may be formed in the wafer that includes the trap rich layer and through-semiconductor-vias.
1. A method of forming an integrated circuit chip comprising:
providing a semiconductor wafer with an active circuit layer;
forming a through-semiconductor-via in said semiconductor wafer; and
forming a first trap rich layer of said semiconductor wafer;
wherein said through-semiconductor-via passes through said first trap rich layer and a second trap rich layer that is separated from the first trap rich layer by a semiconductor substrate layer, further wherein a third trap rich layer isolates the through-semiconductor-via from the semiconductor substrate layer.
2. The method of claim 1 , wherein said trap first rich layer has a trap density that exceeds 10 11 cm −2 eV −1 .
3. The method of claim 1 , wherein said first trap rich layer is formed by implanting high energy particles into a bottom side of a substrate of said semiconductor wafer.
4. The method of claim 1 , further comprising:
forming the second trap rich layer on a bottom side of said semiconductor wafer; and
after forming said second trap rich layer on said bottom side of said semiconductor wafer,
depositing layers of material on said bottom side of said semiconductor wafer;
wherein said layers of material form an integrated passive device; and
said through-semiconductor-via forms a conductive electrical connection between said integrated passive device and said active circuit layer.
5. The method of claim 4 , wherein:
said second trap rich layer is formed by one of: depositing a layer of polysillicon on said bottom side of said semiconductor wafer, and implanting high energy particles into said bottom side of said semiconductor wafer.
6. The method of claim 1 , further comprising:
providing a second semiconductor wafer with a second circuit layer;
bonding a top side of said second semiconductor wafer to a bottom side of said semiconductor wafer via a bonding layer formed on said semiconductor wafer;
wherein said through-semiconductor-via:
is formed by etching into a top side of said semiconductor wafer prior to bonding said semiconductor wafer to said second semiconductor wafer, said etching using said bonding layer as an etch stop; and
forms a conductive electrical connection between said active circuit layer and said second circuit layer.
7. The method of claim 1 , further comprising:
providing a second semiconductor wafer with a second circuit layer; and
bonding a top side of said second semiconductor wafer to a bottom side of said semiconductor wafer;
wherein said through-semiconductor-via:
is formed by etching into said semiconductor wafer from said bottom side prior to bonding said semiconductor wafer to said second semiconductor wafer; and
forms a conductive electrical connection between said active circuit layer and said second circuit layer.
8. The method of claim 7 , further comprising:
forming the second trap rich layer on said semiconductor wafer, said second trap rich layer being above said second circuit layer in a finished device; and
said second trap rich layer is formed by one of: depositing a layer of polysilicon on said bottom side of said semiconductor wafer, and implanting high energy particles into said bottom side of said semiconductor wafer.
9. The method of claim 1 , further comprising:
bonding a handle wafer to a top side of said semiconductor wafer; and
thinning a substrate of said semiconductor wafer while said handle wafer is bonded to said semiconductor wafer;
wherein said semiconductor wafer includes a semiconductor-on-insulator structure and said active circuit layer is formed on a buried insulator layer of said semiconductor-on-insulator structure.
10. The method of claim 9 , wherein:
thinning said substrate of said semiconductor wafer comprises etching said substrate layer to expose a bottom side of said buried insulator layer using said buried insulator layer as an etch stop; and
forming said first trap rich layer comprises depositing a layer of material on said bottom side of said buried insulator layer.
11. The method of claim 9 , further comprising:
forming the second trap rich layer of said semiconductor wafer by implanting high energy particles in a bottom side of said substrate.
12. A method of forming an integrated circuit chip comprising:
providing a semiconductor wafer with an active circuit layer and a first trap rich layer; and
forming a through-semiconductor-via in said semiconductor wafer;
wherein said through-semiconductor-via is in contact with said first trap rich layer and a second trap rich layer that is separated from the first trap rich layer by a semiconductor substrate layer, further wherein a third trap rich layer isolates the through-semiconductor-via from the semiconductor substrate layer.
13. The method of claim 12 , further comprising:
providing a second semiconductor wafer with a second circuit layer; and
bonding a bottom side of said semiconductor wafer to a top side of said second semiconductor wafer;
wherein bonding said bottom side of said semiconductor wafer to said top side of said second semiconductor wafer forms a conductive electrical connection between a conductive contact in said second circuit layer and a sidewall contact in a wiring layer in said semiconductor wafer.
14. The method of claim 12 , further comprising:
thinning a substrate of said semiconductor wafer;
forming an insulator layer on a bottom side of said semiconductor wafer; and
forming a layer of copper on said insulator layer;
wherein said through-semiconductor-via forms a conductive electrical connection between said layer of copper and said active circuit layer; and
wherein said first trap rich layer is formed via a high energy implantation of charged particles in said substrate.
15. The method of claim 12 , further comprising:
thinning a substrate of said semiconductor wafer;
forming the second trap rich layer on a bottom side of said semiconductor wafer;
forming an insulator layer on said second trap rich layer; and
forming an integrated passive device layer on said insulator layer;
wherein said through-semiconductor-via forms a conductive electrical connection between said integrated passive device layer and said active circuit layer.
16. The method of claim 15 , wherein:
said second trap rich layer is formed by one of: depositing a layer of polysilicon on said bottom side of said semiconductor wafer, and implanting high energy particles into said bottom side of said semiconductor wafer.
17. The method of claim 16 , wherein:
forming said second trap rich layer comprises depositing a layer of polycrystalline semiconductor material on said bottom side of said semiconductor wafer; and
forming said insulator layer results in said insulator covering said first trap rich layer.