Method for wafer level reliability
View Patent ↗A method for ensuring wafer level reliability is provided. The method involves: forming a gate oxide layer having a thickness of less than 50 Å on a semiconductor substrate; forming a PMOS element having a channel length of less than 0.13 μm on the semiconductor substrate; and assessing hot carrier injection (HCI) for the PMOS element.
1. A method for ensuring wafer level reliability, the method comprising:
forming a gate oxide layer having a thickness of less than 50 Å on a semiconductor substrate;
forming a PMOS element having a channel length of less than 0.13 μm on the semiconductor substrate;
forming a high voltage NMOS element on a semiconductor substrate;
assessing substrate hot carrier injection (sub-HCI) for the high voltage NMOS element; and
assessing hot carrier injection (HCI) for the PMOS element.
2. The method of claim 1 , wherein a condition of gate and drain voltages satisfy an equation, Vg=Vd=Vop, during the process of assessing hot carrier injection (HCI), wherein Vg is gate voltage, Vd is drain voltage, and Vop is operating voltage.
3. The method of claim 1 , wherein a source voltage satisfies an equation, Vs=Vb, wherein Vs is source voltage, and Vb is bulk voltage.
4. The method of claim 1 , wherein a criterion for determining a reliability lifetime (L/T) in the HCI test is 0.2 year.
5. The method of claim wherein the assessing of the sub-HCI is implemented at a condition of gate and drain voltages satisfying an equation, Vg=Vd=Vop, wherein Vg is gate voltage, Vd is drain voltage, and Vop is operating voltage.
6. The method of claim 1 , wherein a predetermined voltage of less than the operating voltage is applied to a source to reduce a potential difference to a drain, wherein Vs=½ Vop, Vs is source voltage, and Vop is operating voltage.
7. The method of claim 1 , wherein a predetermined source voltage of 0 V and a predetermined bulk voltage that is equal to negative bias are applied to bulk silicon (Si) to enhance a vertical field effect to the gate and bulk.
8. The method of claim 1 , wherein a threshold voltage (Vth) shift ratio of less than 2% is used as a test criterion on the basis of subsequent to stress for a predetermined period of time.
9. The method of claim 1 , wherein the high voltage NMOS element has an operating voltage of 10-40 V.
10. The method of claim 1 , wherein the PMOS element has an operating voltage of 1-5 V.