Granted Patent B2

US 9,166,106 · App. 14/059,950 · Granted Oct 20, 2015

Abstract

Claims (30)

1. A method of making a LED structure that comprises a support and a plurality of nanowires located on the support, wherein each nanowire comprises a tip and a sidewall, wherein the method comprises reducing or eliminating the conductivity of the tips of the nanowires compared to the conductivity of the sidewalls during or after creation of the nanowires;

further comprising controlling nanowire growth conditions such that conductivity of the tips is reduced by at least one order of magnitude compared to the conductivity of the tips without the controlling of nanowire growth conditions;

wherein reducing or eliminating the conductivity of the tips comprises forming an insulating layer over the nanowires after the creation of the nanowires, wherein the insulating layer is formed over an array of nanowires so that the insulating layer is layered on the tips and the sidewalls, then the array is subjected to etching under conditions that removes all or part of the insulating layer on the sidewalls but that leaves at least a larger thickness part of the insulating layer on the tips, and the insulating layer comprises SiOx.

2. The method of claim 1 wherein at least one of:

(a) the SiOx comprises SiO2;

(b) the formed insulating layer has a larger thickness on the tips than on the sidewalls; and

(c) the etching comprises anisotropic etching.

3. A method of making a LED structure that comprises a support and a plurality of nanowires located on the support, wherein each nanowire comprises a tip and a sidewall, wherein the method comprises reducing or eliminating the conductivity of the tips of the nanowires compared to the conductivity of the sidewalls during or after creation of the nanowires;

further comprising controlling nanowire growth conditions such that conductivity of the tips is reduced by at least one order of magnitude compared to the conductivity of the tips without the controlling of nanowire growth conditions;

wherein the nanowires comprise a first conductivity type semiconductor core and a second conductivity type semiconductor shell, and the sidewalls and tips comprise the second conductivity type semiconductor shell formed as successive layers of lower conductivity material and higher conductivity material, wherein the higher conductivity material preferentially forms on the sidewalls compared to the tips.

4. The method of claim 3 further comprising forming a highly resistive material on the tips but not on the sidewalls of the nanowires.

5. The method of claim 4 wherein the highly resistive material is selectively formed on the tips after the shell is completed.

6. The method of claim 4 wherein the highly resistive material is selectively formed on the tips before the shell is completed.

7. The method of claim 6 wherein the highly resistive material comprises pGaN that comprises 2-5% Mg and is grown by MOCVD using a V/III ratio of 10-50.

8. The method of claim 3 wherein the first conductivity type semiconductor nanowire core is enclosed by the second conductivity type semiconductor shell for forming a pn or pin junction that in operation provides an active region for light generation, wherein the first conductivity type comprises n-type, the second conductivity type comprises p-type.

9. The method of claim 3 wherein the nanowire core is grown during production of the array of nanowires from a support that comprises an n-type buffer layer, wherein the support further comprises a dielectric masking layer, such that cores protrude from the buffer layer through openings in the masking layer, and the shells are located on the masking layer.

10. The method of claim 9 wherein at least one of:

(a) the support further comprises a substrate layer beneath the buffer layer and the substrate layer comprises Al 2 O 3 ; and

(b) the support further comprises a reflective layer and the reflective layer comprises Ag.

11. A method of making a LED structure that comprises a support and a plurality of nanowires located on the support, wherein each nanowire comprises a tip and a sidewall, wherein the method comprises reducing or eliminating the conductivity of the tips of the nanowires compared to the conductivity of the sidewalls during or after creation of the nanowires, the nanowires comprise a first conductivity type semiconductor core and a second conductivity type semiconductor shell, and the sidewalls and tips comprise the second conductivity type semiconductor shell formed as successive layers of lower conductivity material and higher conductivity material, wherein the higher conductivity material preferentially forms on the sidewalls compared to the tips wherein at least one of:

(a) the lower conductivity material comprises p-AlGaN and the higher conductivity material comprises p-GaN;

(b) the shell is formed to provide a plurality of the lower conductivity layers and a plurality of the higher conductivity layers on the sidewalls;

(c) the shell is formed to provide only a combined lower conductivity layer comprised of multiple films of the lower conductivity material on the tips;

(d) the shell is formed to provide a plurality of the lower conductivity layers and a plurality of the higher conductivity layers on the tips, wherein the thickness of the higher conductivity layers on the tips is less than that on the sidewalls, such that the tips are less conductive than the sidewalls; and

(e) the tips are nonconductive.

12. The method of claim 11 wherein: (a) the lower conductivity material comprises p-AlGaN and the higher conductivity material comprises p-GaN.

13. The method of claim 11 wherein: (b) the shell is formed to provide the plurality of the lower conductivity layers and the plurality of the higher conductivity layers on the sidewalls.

14. The method of claim 11 wherein: (c) the shell is formed to provide only the combined lower conductivity layer comprised of multiple films of the lower conductivity material on the tips.

15. The method of claim 11 wherein: (d) the shell is formed to provide the plurality of the lower conductivity layers and the plurality of the higher conductivity layers on the tips, wherein the thickness of the higher conductivity layers on the tips is less than that on the sidewalls, such that the tips are less conductive than the sidewalls.

16. The method of claim 11 wherein: (e) the tips are nonconductive.

Assignments (10)