Composition for forming N-type diffusion layer, method of forming N-type diffusion layer, and method of producing photovoltaic cell
View Patent ↗The composition for forming an n-type diffusion layer in accordance with the present invention contains a glass powder and a dispersion medium, in which the glass powder includes an donor element and a total amount of the life time killer element in the glass powder is 1000 ppm or less. An n-type diffusion layer and a photovoltaic cell having an n-type diffusion layer are prepared by applying the composition for forming an n-type diffusion layer, followed by a thermal diffusion treatment.
1. A method of forming an n-type diffusion layer, the method comprising: providing a composition for forming an n-type diffusion layer, the composition comprising a glass powder and a dispersion medium, wherein the glass powder includes a donor element and a total amount of a life time killer element in the glass powder is 1000 ppm or less, and wherein the glass powder has an average particle diameter of 3.5 μm or less; applying the composition for forming an n-type diffusion layer to a semiconductor substrate; and conducting a thermal diffusion treatment to diffuse the donor element into the semiconductor substrate.
2. The method of claim 1 , wherein the donor element is at least one selected from phosphorous (P) or antimony (Sb).
3. The method of claim 1 , wherein the glass powder comprises at least one donor element-containing material selected from P 2 O 3 , P 2 O 5 or Sb 2 O 3 , and at least one glass component material selected from SiO 2 , K 2 O, Na 2 O, Li 2 O, BaO, SrO, CaO, MgO, BeO, ZnO, PbO, CdO, SnO, ZrO 2 or MoO 3 .
4. The method of claim 1 , wherein the composition for forming an n-type diffusion layer further comprises a metal element that is crystallized upon reacting with the glass powder.
5. The method of claim 4 , wherein the metal element that is crystallized upon reacting with the glass powder is at least one selected from silver (Ag), silicon (Si) or zinc (Zn).
6. The method of claim 1 , wherein the life time killer element is at least one selected from iron (Fe), copper (Cu), nickel (Ni), manganese (Mn), chromium (Cr), tungsten (W) or gold (Au).
7. A method of producing a photovoltaic cell, the method comprising: providing a composition for forming an n-type diffusion layer, the composition comprising a glass powder and a dispersion medium, wherein the glass powder includes a donor element and a total amount of a life time killer element in the glass powder is 1000 ppm or less, and wherein the glass powder has an average particle diameter of 3.5 μm or less; applying the composition for forming an n-type diffusion layer to a semiconductor substrate; and conducting a thermal diffusion treatment to form an n-type diffusion layer in the semiconductor substrate by diffusion of the donor element; and forming an electrode on the n-type diffusion layer.
8. The method of claim 7 , wherein the donor element is at least one selected from phosphorous (P) or antimony (Sb).
9. The method of claim 7 , wherein the glass powder comprises at least one donor element-containing material selected from P 2 O 3 , P 2 O 5 or Sb 2 O 3 , and at least one glass component material selected from SiO 2 , K 2 O, Na 2 O, Li 2 O, BaO, SrO, CaO, MgO, BeO, ZnO, PbO, CdO, SnO, ZrO 2 or MoO 3 .
10. The method of claim 7 , wherein the composition for forming an n-type diffusion layer further comprises a metal element that is crystallized upon reacting with the glass powder.
11. The method of claim 10 , wherein the metal element that is crystallized upon reacting with the glass powder is at least one selected from silver (Ag), silicon (Si) or zinc (Zn).
12. The method of claim 7 , wherein the life time killer element is at least one selected from iron (Fe), copper (Cu), nickel (Ni), manganese (Mn), chromium (Cr), tungsten (W) or gold (Au).