Semiconductor device and method for manufacturing semiconductor device
A MOSFET includes a semiconductor substrate having a trench formed in a main surface, a gate oxide film, a gate electrode, and a source interconnection. A semiconductor substrate includes an n-type drift layer and a p-type body layer. The trench is formed to penetrate the body layer and to reach the drift layer. The trench includes an outer peripheral trench arranged to surround an active region when viewed two-dimensionally. On the main surface opposite to the active region when viewed from the outer peripheral trench, a potential fixing region where the body layer is exposed is formed. The source interconnection is arranged to lie over the active region when viewed two-dimensionally. The potential fixing region is electrically connected to the source interconnection.
1. A method of manufacturing a semiconductor device, comprising the steps of:
preparing a semiconductor substrate including a drift layer having a first conductivity type and a body layer having a second conductivity type, which is formed on said drift layer to include one main surface;
forming a trench to open on a side of said one main surface and to penetrate said body layer and reach said drift layer;
forming a first insulating film to include a wall surface of said trench;
forming a gate electrode to be in contact with said first insulating film; and
forming a first interconnection on said one main surface,
in said step of forming a trench, an outer peripheral trench arranged to surround an active region when viewed two-dimensionally being formed, and
in said step of forming a first interconnection, said first interconnection being formed to lie over said active region when viewed two-dimensionally and to electrically be connected to a potential fixing region which is said body layer exposed at said one main surface opposite to said active region when viewed from said outer peripheral trench,
said active region is formed on said one main surface of said semiconductor substrate; and
said active region includes a source region which is electrically connected to said first interconnection.
2. The method of manufacturing a semiconductor device according to claim 1 , wherein
in said step of forming a trench, said outer peripheral trench is formed simultaneously with said trench other than said outer peripheral trench.
3. The method of manufacturing a semiconductor device according to claim 1 , further comprising the step of forming an electric field relaxing region having the second conductivity type, which extends to be in contact with said outer peripheral trench in said drift layer and to reach said potential fixing region, wherein
in said step of forming an electric field relaxing region, said electric field relaxing region is formed through ion implantation.
4. The method of manufacturing a semiconductor device according to claim 1 , wherein
in said step of preparing a semiconductor substrate, a semiconductor substrate composed of silicon carbide is prepared.