IP Library Granted Patent US 9,355,927
Granted Patent B2
US 9,355,927 · App. 14/088,513 · Granted May 31, 2016

Semiconductor packaging and manufacturing method thereof

Inventors: Hsiu-Jen Lin (Hsinchu County, TW); Wen-Hsiung Lu (Taipei County, TW); Cheng-Ting Chen (Taichung, TW); Hsuan-Ting Kuo (Taichung, TW); Wei-Yu Chen (Taipei, TW); Ming-Da Cheng (Hsinchu County, TW); Chung-Shi Liu (Hsinchu County, TW)
Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
H01L23/3114H01L23/49816H01L23/49838H01L24/03H01L24/05H01L24/11H01L24/13H01L24/16H01L24/73H01L24/81H01L24/92H05K3/34H01L21/563H01L24/02H01L24/14H01L24/29H01L24/32H01L2224/0239H01L2224/02377H01L2224/02379H01L2224/0382H01L2224/0391H01L2224/03829H01L2224/03849H01L2224/0401H01L2224/05024H01L2224/05124H01L2224/05139H01L2224/05144H01L2224/05147H01L2224/05155H01L2224/05184H01L2224/05568H01L2224/05794H01L2224/05811H01L2224/10125H01L2224/11005H01L2224/119H01L2224/1191H01L2224/11334H01L2224/131H01L2224/13006H01L2224/1312H01L2224/13014H01L2224/13017H01L2224/13022H01L2224/13023H01L2224/13109H01L2224/13111H01L2224/13113H01L2224/13116H01L2224/13117H01L2224/13139H01L2224/13147H01L2224/13155H01L2224/14131H01L2224/16058H01L2224/16145H01L2224/16227H01L2224/2919H01L2224/32058H01L2224/32145H01L2224/32225H01L2224/73104H01L2224/73204H01L2224/812H01L2224/8121H01L2224/8123H01L2224/81191H01L2224/81192H01L2224/81815H01L2224/9212H01L2924/014H01L2924/0105H01L2924/12042H01L2924/15311H01L2924/181H01L2924/20105H01L2924/20106H01L2924/351
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Quick Facts
Patent No.
US 9,355,927
App. No.
14/088,513
Granted
May 31, 2016
Kind
B2
Abstract

The present disclosure provides a semiconductor package includes a contact pad, a device external to the contact pad and a solder bump on the contact pad. The device has a conductive contact pad corresponding to the contact pad. The solder bump connects the contact pad with the conductive contact pad. The solder bump comprises a height from a top of the solder bump to the contact pad; and a width which is a widest dimension of the solder bump in a direction perpendicular to the height. A junction portion of the solder bump in proximity to the contact pad comprises an hourglass shape.

Claims (40)

1. A method of manufacturing a semiconductor package, comprising:

forming a solder paste layer on a contact pad;

positioning a solder bump on the solder paste layer;

forming a first electrical connection between the solder bump and the contact pad;

encapsulating the solder paste layer and a lower portion of the solder bump, wherein the lower portion of the solder bump is in proximity to the contact pad;

forming a second electrical connection between the solder bump and an external device; and

forming an underfill layer surrounding and in contact with an upper portion of the solder bump, wherein the upper portion of the solder bump is in proximity to the external device.

2. The method of manufacturing a semiconductor package in claim 1 , wherein the forming the first electrical connection between the solder bump and the contact pad comprises heating the solder paste layer to a first temperature.

3. The method of manufacturing a semiconductor package in claim 2 , wherein a melting point of the solder paste is lower than the first temperature, and wherein the first temperature is lower than a melting point of the solder bump.

4. The method of manufacturing a semiconductor package in claim 3 , wherein the first temperature is lower than 170 degrees Celsius.

5. The method of manufacturing a semiconductor package in claim 1 , wherein the forming the second electrical connection between the solder bump and the external device comprises heating the solder paste layer and the solder bump to a second temperature.

6. The method of manufacturing a semiconductor package in claim 5 , wherein a melting point of the solder paste is lower than a melting point of the solder bump, and wherein the melting point of the solder bump is lower than the second temperature.

7. The method of manufacturing a semiconductor package in claim 6 , wherein the second temperature is at least 50 degrees Celsius greater than the first temperature.

8. The method of manufacturing a semiconductor package in claim 1 , wherein

the forming the solder paste layer on the contact pad comprises forming the solder paste with a thickness of T, and

the positioning the solder bump on the solder paste layer comprises positioning the solder bump with a width of W, wherein the width W is a widest dimension of the solder bump in a horizontal direction, and

wherein a W/T ratio is of from about 2 to about 5.

9. A method of manufacturing a semiconductor package, comprising:

forming a solder paste layer on a contact pad;

positioning a solder bump on the solder paste layer;

forming a first electrical connection between the solder bump and the contact pad;

encapsulating the solder paste layer and a lower portion of the solder bump with an encapsulant while keeping an upper portion of the solder bump being free from the encapsulant; and

forming a second electrical connection between the solder bump and an external device,

wherein the lower portion of the solder bump is in proximity to the contact pad.

10. The method of manufacturing a semiconductor package in claim 9 , wherein the forming the solder paste layer comprises blending Sn-containing solder particles in a rosin-based flux medium, wherein a melting temperature of the Sn-containing solder particles is lower than a melting temperature of the solder bump.

11. The method of manufacturing a semiconductor package in claim 10 , wherein the Sn-containing solder particles comprise SnBi x , SnSb x , SnPb x , SnGe x , SnAl x , SnGa x , SnIn x , SnTl x , or an arbitrary combinations thereof.

12. The method of manufacturing a semiconductor package in claim 9 , wherein the forming the first electrical connection comprises heating the solder paste layer to a first temperature lower than 170 degrees Celsius by an infrared lamp, a hot air pencil, a heated conveyor belt, or an oven.

13. The method of manufacturing a semiconductor package in claim 12 , wherein the first temperature is greater than a melting point of the solder paste layer and lower than a melting point of the solder bump.

14. The method of manufacturing a semiconductor package in claim 9 , wherein the forming the second electrical connection comprises heating the solder paste layer and the solder bump to a second temperature in a range of from about 240 to about 260 degrees Celsius by an infrared lamp, a hot air pencil, a heated conveyor belt, or an oven.

15. The method of manufacturing a semiconductor package in claim 14 , wherein the melting point of the solder bump and the melting point of the solder paste layer are lower than the second temperature.

16. The method of manufacturing a semiconductor package in claim 14 , wherein the encapsulating the solder paste layer and a lower portion of the solder bump is conducted after heating the solder paste layer to the first temperature and before heating the solder paste layer to the second temperature.

17. The method of manufacturing a semiconductor package in claim 16 , wherein the encapsulating the solder paste layer and a lower portion of the solder bump comprises forming a liquid molding compound.

18. The method of manufacturing a semiconductor package in claim 14 , further comprising forming an underfill layer surrounding an upper portion of the solder bump after heating the solder paste layer and the solder bump to the second temperature, wherein the upper portion of the solder bump is in proximity to the external device.

19. The method of manufacturing a semiconductor package in claim 9 , wherein forming the solder paste layer and positioning the solder bump comprise forming the solder paste layer with a thickness of from about 0.4 times to about 0.6 times of a height of the solder bump.

20. A method of manufacturing a semiconductor package, comprising:

providing a substrate with a solder paste layer;

positioning a solder bump on a solder paste layer;

heating the solder ball and the solder paste layer to a first temperature;

encapsulating the solder paste layer and a lower portion of the solder bump with an encapsulant while an upper portion of the solder bump being free from the encapsulant, wherein the lower portion of the solder bump is in proximity to the substrate; and

heating the solder ball and the solder paste layer to a second temperature, wherein the second temperature is greater than the first temperature.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Nov 25, 2013
From: LIN, HSIU-JEN; LU, WEN-HSIUNG; CHEN, CHENG-TING; KUO, HSUAN-TING; CHEN, WEI-YU; CHENG, MING-DA; LIU, CHUNG-SHI
To: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
Reel/Frame 031666/0303 →
Continuity (1)
Related Publication 20150145130A1 · May 28, 2015