Alkoxysilylamine compounds and applications thereof
View Patent ↗Described herein are alkoxysilylamine precursors having the following Formulae A and B: wherein R 1 and R 4 are independently selected from a linear or branched C 1 to C 10 alkyl group, a C 3 to C 12 alkenyl group, a C 3 to C 12 alkynyl group, a C 4 to C 10 cyclic alkyl group, and a C 6 to C 10 aryl group and wherein R 2 , R 3 , R 4 , R 5 , and R 6 are independently selected from the group consisting of hydrogen, a linear or branched C 1 to C 10 alkyl group, a C 2 to C 12 alkenyl group, a C 2 to C 12 alkynyl group, a C 4 to C 10 cyclic alkyl, a C 6 to C 10 aryl group, and a linear or branched C 1 to C 10 alkoxy group. Also described herein are deposition processes using at least one precursor have Formulae A and/or B described herein.
1. A precursor comprising at least one compound selected from the group consisting of ((MeO) 2 HSi) 2 NH, ((EtO) 2 HSi) 2 NH, ((MeO) 2 MeSi) 2 NH, ((EtO) 2 MeSi) 2 NH, ((MeO)MeHSi) 2 NH, ((EtO)MeHSi) 2 NH, ((MeO) 2 HSi) 2 NMe, ((EtO) 2 HSi) 2 NMe, ((MeO) 2 MeSi) 2 NMe, ((EtO) 2 MeSi) 2 NMe, ((MeO)MeHSi) 2 NMe, ((EtO)MeHSi) 2 NMe, ((MeO) 2 HSi) 2 NEt, ((EtO) 2 HSi) 2 NEt, ((MeO) 2 MeSi) 2 NEt, ((EtO) 2 MeSi) 2 NEt, ((MeO)MeHSi) 2 NEt, ((EtO)MeHSi) 2 NEt, ((MeO) 2 HSi) 2 NPr n , ((EtO) 2 HSi) 2 NPr n , ((MeO) 2 MeSi) 2 NPr n , ((EtO) 2 MeSi) 2 NPr n , ((MeO)MeHSi) 2 NPr n , ((EtO)MeHSi) 2 NPr n , ((MeO) 2 HSi) 2 NPr i , ((EtO) 2 HSi) 2 NPr i , ((MeO) 2 MeSi) 2 NPr i , ((EtO) 2 MeSi) 2 NPr i , ((MeO)MeHSi) 2 NPr i , ((EtO)MeHSi) 2 NPr i , ((MeO) 2 HSi) 2 NBu t , ((EtO) 2 HSi) 2 NBu t , ((MeO) 2 MeSi) 2 NBu t , ((EtO) 2 MeSi) 2 NBu t , ((MeO)MeHSi) 2 NBu t , ((EtO)MeHSi) 2 NBu t , ((EtO) 2 HSi) 3 N, ((MeO)MeHSi) 3 N, ((EtO)MeHSi) 3 N, ((MeO) 2 HSi) 2 NSiH 2 (OBu t ), ((EtO) 2 HSi) 2 NSiH 2 (OBu t ), ((MeO) 2 HSi) 2 NSiH(OEt) 2 , ((MeO) 2 HSi) 3 N, ((EtO) 2 HSi) 3 N, ((MeO)MeHSi) 3 N, ((EtO)MeHSi) 3 N, ((MeO) 2 HSi) 2 NSiH 2 (OBu t ), ((EtO) 2 HSi) 2 NSiH 2 (OBu t ), ((MeO) 2 HSi) 2 NSiH(OEt) 2 , and (( t BuO)H 2 Si) 3 N.
2. The precursor of claim 1 wherein the compound is tris(diethoxysilyl)amine.