IP Library Granted Patent US 9,287,240
Granted Patent B2
US 9,287,240 · App. 14/105,940 · Granted Mar 15, 2016

Stacked semiconductor die assemblies with thermal spacers and associated systems and methods

Inventors: Jian Li (Boise, ID); Steven K. Groothuis (Boise, ID); Michel Koopmans (Boise, ID)
Assignee: Micron Technology, Inc.
H01L25/0657H01L23/36H01L23/3731H01L23/3738H01L23/42H01L23/4334H01L23/5385H01L23/3128H01L23/4275H01L23/49827H01L2224/16145H01L2224/16225H01L2924/15311
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Quick Facts
Patent No.
US 9,287,240
App. No.
14/105,940
Granted
Mar 15, 2016
Kind
B2
Abstract

Stacked semiconductor die assemblies with thermal spacers and associated systems and methods are disclosed herein. In one embodiment, a semiconductor die assembly can include a thermally conductive casing defining a cavity, a stack of first semiconductor dies within the cavity, and a second semiconductor die stacked relative to the stack of first dies and carried by a package substrate. The semiconductor die assembly further includes a thermal spacer disposed between the package substrate and the thermally conductive casing. The thermal spacer can include a semiconductor substrate and plurality of conductive vias extending through the semiconductor substrate and electrically coupled to the stack of first semiconductor dies, the second semiconductor die, and the package substrate.

Claims (50)

1. A semiconductor die assembly, comprising:

a thermally conductive casing having a sidewall, wherein thermally conductive casing defines a cavity;

a stack of first semiconductor dies within the cavity;

a second semiconductor die mechanically and electrically coupled to the stack of first dies, the second semiconductor die having a face facing the toward the stack of first semiconductor dies, wherein the sidewall of the thermally conductive casing is attached directly to the face of the second semiconductor die by a thermal adhesive;

a package substrate carrying the second semiconductor die; and

a thermal spacer disposed between the package substrate and the thermally conductive casing, wherein the thermal spacer includes a semiconductor substrate and plurality of conductive vias extending through the semiconductor substrate and electrically coupled to the stack of first semiconductor dies, the second semiconductor die, and the package substrate.

2. The semiconductor die assembly of claim 1 wherein the thermal spacer is configured to transfer heat such that individual first semiconductor dies operate at a lower heat than without the thermal spacer.

3. The semiconductor die assembly of claim 1 wherein the thermal spacer is configured to electrically couple the second semiconductor die to the stack of first semiconductor dies without processing any signals communicated through the thermal spacer.

4. The semiconductor die assembly of claim 1 wherein the thermal spacer does not include memory nor logic circuitry.

5. The semiconductor die assembly of claim 1 wherein the thermal spacer is disposed within the cavity and between the second semiconductor die and the stack of first semiconductor dies.

6. The semiconductor die assembly of claim 1 wherein the thermal spacer is disposed outside of the cavity and between the second semiconductor die and the package substrate.

7. The semiconductor die assembly of claim 1 wherein the thermal spacer comprises a blank silicon die.

8. The semiconductor die assembly of claim 1 wherein the thermal spacer is disposed in the cavity, and wherein the die assembly further comprises an underfill material at least partially encapsulating the thermal spacer and the stack of first semiconductor dies.

9. The semiconductor die assembly of claim 1 wherein the thermal spacer includes conductive features attached to the plurality of conductive vias at one or more sides of the thermal spacer, and wherein the die assembly further comprises an underfill material at least partially encapsulating the conductive features.

10. The semiconductor die assembly of claim 9 wherein the conductive features are further attached to either the second semiconductor die or the stack of first semiconductor dies.

11. The semiconductor die assembly of claim 1 wherein:

the thermal spacer is a first thermal spacer;

the semiconductor die assembly further comprises a second thermal spacer stacked relative to and electrically coupled to the first thermal spacer; and

the first and second thermal spacers are disposed between the stack of first semiconductor dies and the second semiconductor die.

12. The semiconductor die assembly of claim 1 wherein:

the thermal spacer is a first thermal spacer;

the semiconductor die assembly further comprises a second thermal spacer stacked relative to and electrically coupled to the first thermal spacer;

the first thermal spacer is disposed between the second semiconductor die and the stack of first semiconductor dies; and

the second thermal spacer is disposed between the second semiconductor die and the package substrate.

13. A semiconductor die assembly, comprising:

a thermally conductive casing, wherein the thermally conductive casing defines a cavity;

a stack of first semiconductor dies within the cavity;

a second semiconductor die mechanically and electrically coupled to the stack of first dies;

a package substrate carrying the second semiconductor die; and

a thermal spacer disposed between the package substrate and the thermally conductive casing, wherein the thermal spacer includes a semiconductor substrate and plurality of conductive vias extending through the semiconductor substrate and electrically coupled to the stack of first semiconductor dies, the second semiconductor die, and the package substrate;

wherein the stack of first semiconductor dies has a first footprint;

wherein the second semiconductor die has a second footprint larger than the first footprint, wherein the second semiconductor die has a peripheral region extending laterally outward with respect to the stack of first semiconductor dies;

wherein the thermal spacer has a third footprint that is at least as large as the first footprint along at least one axis, but no larger than the second footprint along the at least one axis.

14. A semiconductor die assembly, comprising:

a logic die having a face;

a memory die stacked relative to the logic die;

a thermally conductive casing extending at least partially around the memory die and at least partially enclosing the memory die within an enclosure, wherein the thermally conductive casing has a sidewall attached directly to the face of the logic die by a thermal adhesive;

a thermal spacer outside of the enclosure, wherein the thermal spacer includes a peripheral portion extending beyond the memory die, and the thermal spacer is configured to carry the thermally conductive casing proximate the peripheral portion.

15. The semiconductor die assembly of claim 14 wherein the logic die and the thermal spacer have generally the same planform shape.

16. The semiconductor die assembly of claim 14 wherein the logic die has a generally larger planform shape than the thermal spacer.

17. The semiconductor die assembly of claim 14 wherein the logic die is disposed within the enclosure and between the thermal spacer and the memory die.

18. The semiconductor die assembly of claim 14 wherein the logic die has a generally larger planform shape than the memory die, but a generally smaller planform shape than the thermal spacer.

19. The semiconductor die assembly of claim 14 , further comprising a package substrate configured to carry the thermal spacer, wherein the thermal spacer and the package substrate have generally the same planform shape.

20. The semiconductor die assembly of claim 14 wherein the memory die is one of a plurality of memory dies electrically coupled together in a stack.

21. A semiconductor system, comprising:

a package substrate;

a thermally conductive casing having a conductive sidewall;

a plurality of semiconductor dies configured to be carried by the package substrate and at least partially disposed within the thermally conductive casing, the plurality of semiconductor dies including a plurality of memory dies, a logic die having a face, and a thermal spacer stacked relative the logic die and the memory dies, wherein the memory dies are stacked relative to the logic die; and

a driver electrically coupled to the plurality of semiconductor dies via the package substrate;

wherein the conductive sidewall is attached directly to the face of the logic die by a thermal adhesive.

Assignments (8)
RELEASE OF SECURITY INTEREST Recorded Nov 12, 2019
From: JPMORGAN CHASE BANK, N.A., AS COLLATERAL AGENT
To: MICRON TECHNOLOGY, INC.; MICRON SEMICONDUCTOR PRODUCTS, INC.
Reel/Frame 051028/0001 →
RELEASE OF SECURITY INTEREST Recorded Oct 9, 2019
From: MORGAN STANLEY SENIOR FUNDING, INC., AS COLLATERAL AGENT
To: MICRON TECHNOLOGY, INC.
Reel/Frame 050937/0001 →
RELEASE OF SECURITY INTEREST Recorded Aug 23, 2018
From: U.S. BANK NATIONAL ASSOCIATION, AS COLLATERAL AGENT
To: MICRON TECHNOLOGY, INC.
Reel/Frame 047243/0001 →
SECURITY INTEREST Recorded Jul 13, 2018
From: MICRON TECHNOLOGY, INC.; MICRON SEMICONDUCTOR PRODUCTS, INC.
To: JPMORGAN CHASE BANK, N.A., AS COLLATERAL AGENT
Reel/Frame 047540/0001 →
CORRECTIVE ASSIGNMENT TO CORRECT THE REPLACE ERRONEOUSLY FILED PATENT #7358718 WITH THE CORRECT PATENT #7358178 PREVIOUSLY RECORDED ON REEL 038669 FRAME 0001. ASSIGNOR(S) HEREBY CONFIRMS THE SECURITY INTEREST. Recorded Jun 8, 2017
From: MICRON TECHNOLOGY, INC.
To: U.S. BANK NATIONAL ASSOCIATION, AS COLLATERAL AGENT
Reel/Frame 043079/0001 →
PATENT SECURITY AGREEMENT Recorded Jun 2, 2016
From: MICRON TECHNOLOGY, INC.
To: MORGAN STANLEY SENIOR FUNDING, INC., AS COLLATERAL AGENT
Reel/Frame 038954/0001 →
SECURITY INTEREST Recorded May 12, 2016
From: MICRON TECHNOLOGY, INC.
To: U.S. BANK NATIONAL ASSOCIATION, AS COLLATERAL AGENT
Reel/Frame 038669/0001 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Dec 13, 2013
From: LI, JIAN; GROOTHUIS, STEVEN K.; KOOPMANS, MICHEL
To: MICRON TECHNOLOGY, INC.
Reel/Frame 031780/0827 →
Continuity (1)
Related Publication 20150170991A1 · Jun 18, 2015