Compositions and processes for depositing carbon-doped silicon-containing films

1. A composition for depositing a carbon-doped silicon containing film comprising:

a first precursor comprising at least one compound selected from the group consisting of:

(i) an organoaminoalkylsilane having a formula of R 5 Si(NR 3 R 4 ) x H 3−x wherein x=1, 2, 3;

(ii) an organoalkoxyalkylsilane having a formula of R 6 Si(OR 7 ) x H 3−x wherein x=1, 2, 3;

(iii) an organoaminosilane having a formula of R 8 N(SiR 9 (NR 10 R 11 )H) 2 ;

(iv) an organoaminosilane having a formula of R 8 N(SiR 9 LH) 2 and combinations thereof

wherein R 3 , R 4 , and R 7 are each independently selected from the group consisting of a C 1 to C 10 linear or branched alkyl group, a C 3 to C 10 cyclic alkyl group, a linear or branched C 2 to C 10 alkenyl group, a linear or branched C 2 to C 10 alkynyl group, a C 5 to C 10 aromatic group, and a C 3 to C 10 saturated or unsaturated heterocyclic group; R 5 and R 6 are each independently selected from the group consisting of a C 1 to C 10 linear or branched alkyl group, a C 3 to C 10 cyclic alkyl group, a linear or branched C 2 to C 10 alkenyl group, a linear or branched C 2 to C 10 alkynyl group, a C 5 to C 10 aromatic group, and a C 3 to C 10 saturated or unsaturated heterocyclic group and a halide atom; R 8 and R 9 are each independently selected from the group consisting of hydrogen, C 1 to C 10 linear or branched alkyl, a C 3 to C 10 cyclic alkyl group, a linear or branched C 2 to C 10 alkenyl group, a linear or branched C 2 to C 10 alkynyl group, a C 5 to C 10 aromatic group, and a C 3 to C 10 saturated or unsaturated heterocyclic group; and R 10 and R 11 are each independently selected from the group consisting of a C 1 to C 10 linear or branched alkyl group, a C 3 to C 10 cyclic alkyl group, a linear or branched C 2 to C 10 alkenyl group, a linear or branched C 2 to C 10 alkynyl group, a C 5 to C 10 aromatic group, and a C 3 to C 10 saturated or unsaturated heterocyclic group; wherein R 3 and R 4 can form a cyclic ring or an alkyl-substituted cyclic ring; and wherein R 10 and R 11 can form a cyclic ring or an alkyl-substituted cyclic ring; and L=Cl, Br, I and

further comprising a second precursor having the following formula: comprising an organoaminosilane having a formula Si(NR 1 R 2 )H 3 wherein R 1 and R 2 are each independently selected from the group consisting of a C 1 to C 10 linear or branched alkyl group, a C 3 to C 10 cyclic alkyl group, a linear or branched C 2 to C 10 alkenyl group, a linear or branched C 2 to C 10 alkynyl group, a C 5 to C 10 aromatic group, and a C 3 to C 10 saturated or unsaturated heterocyclic group and wherein R 1 and R 2 can form a cyclic ring or an alkyl-substituted cyclic ring; wherein the first precursor has the following formula ( i Pr 2 N)R 5 SiH 2 wherein R 5 is selected from the group consisting of Me, Et, n Pr, i Pr, n Bu, i Bu, s Bu, t Bu, isomers of pentyl, vinyl, phenyl, and alkyl substituted phenyl; and

the second precursor comprises ( i Pr 2 N)SiH 3 .

2. A composition for depositing a carbon-doped silicon containing film comprising:

a first precursor comprising at least one compound selected from the group consisting of:

(i) an organoaminoalkylsilane having a formula of R 5 Si(NR 3 R 4 ) x H 3−x wherein x=1, 2, 3;

(ii) an organoalkoxyalkylsilane having a formula of R 6 Si(OR 7 ) x H 3−x wherein x=1, 2, 3;

(iii) an organoaminosilane having a formula of R 8 N(SiR 9 (NR 10 R 11 )H) 2 ;

(iv) an organoaminosilane having a formula of R 8 N(SiR 9 LH) 2 and combinations thereof

wherein R 3 , R 4 , and R 7 are each independently selected from the group consisting of a C 1 to C 10 linear or branched alkyl group, a C 3 to C 10 cyclic alkyl group, a linear or branched C 2 to C 10 alkenyl group, a linear or branched C 2 to C 10 alkynyl group, a C 5 to C 10 aromatic group, and a C 3 to C 10 saturated or unsaturated heterocyclic group; R 5 and R 6 are each independently selected from the group consisting of a C 1 to C 10 linear or branched alkyl group, a C 3 to C 10 cyclic alkyl group, a linear or branched C 2 to C 10 alkenyl group, a linear or branched C 2 to C 10 alkynyl group, a C 5 to C 10 aromatic group, and a C 3 to C 10 saturated or unsaturated heterocyclic group and a halide atom; R 8 and R 9 are each independently selected from the group consisting of hydrogen, C 1 to C 10 linear or branched alkyl, a C 3 to C 10 cyclic alkyl group, a linear or branched C 2 to C 10 alkenyl group, a linear or branched C 2 to C 10 alkynyl group, a C 5 to C 10 aromatic group, and a C 3 to C 10 saturated or unsaturated heterocyclic group; and R 10 and R 11 are each independently selected from the group consisting of a C 1 to C 10 linear or branched alkyl group, a C 3 to C 10 cyclic alkyl group, a linear or branched C 2 to C 10 alkenyl group, a linear or branched C 2 to C 10 alkynyl group, a C 5 to C 10 aromatic group, and a C 3 to C 10 saturated or unsaturated heterocyclic group; wherein R 3 and R 4 can form a cyclic ring or an alkyl-substituted cyclic ring; and wherein R 10 and R 11 can form a cyclic ring or an alkyl-substituted cyclic ring; and L=Cl, Br, I and

further comprising a second precursor having the following formula: comprising an organoaminosilane having a formula Si(NR 1 R 2 )H 3 wherein R 1 and R 2 are each independently selected from the group consisting of a C 1 to C 10 linear or branched alkyl group, a C 3 to C 10 cyclic alkyl group, a linear or branched C 2 to C 10 alkenyl group, a linear or branched C 2 to C 10 alkynyl group, a C 5 to C 10 aromatic group, and a C 3 to C 10 saturated or unsaturated heterocyclic group and wherein R 1 and R 2 can form a cyclic ring or an alkyl-substituted cyclic ring; wherein the first precursor has the following formula ( s Bu 2 N)R 5 SiH 2 wherein R 5 is selected from the group consisting of Me, Et, n Pr, i Pr, n Bu, i Bu, s Bu, t Bu, isomers of pentyl, vinyl, phenyl, and alkyl substituted phenyl; and

the second precursor comprises ( s Bu 2 N)SiH 3 .

3. A composition for depositing a carbon-doped silicon containing film comprising:

a first precursor comprising at least one compound selected from the group consisting of:

(i) an organoaminoalkylsilane having a formula of R 5 Si(NR 3 R 4 ) x H 3−x wherein x=1, 2, 3;

(ii) an organoalkoxyalkylsilane having a formula of R 6 Si(OR 7 ) x H 3−x wherein x=1, 2, 3;

(iii) an organoaminosilane have a formula of R 8 N(SiR 9 (NR 10 R 11 )H) 2 ;

(iv) an organoaminosilane having a formula of R 8 N(SiR 9 LH) 2 and combinations thereof

wherein R 3 , R 4 , and R 7 are each independently selected from the group consisting of a C 1 to C 10 linear or branched alkyl group, a C 3 to C 10 cyclic alkyl group, a linear or branched C 2 to C 10 alkenyl group, a linear or branched C 2 to C 10 alkynyl group, a C 5 to C 10 aromatic group, and a C 3 to C 10 saturated or unsaturated heterocyclic group; R 5 and R 6 are each independently selected from the group consisting of a C 1 to C 10 linear or branched alkyl group, a C 3 to C 10 cyclic alkyl group, a linear or branched C 2 to C 10 alkenyl group, a linear or branched C 2 to C 10 alkynyl group, a C 5 to C 10 aromatic group, and a C 3 to C 10 saturated or unsaturated heterocyclic group and a halide atom; R 8 and R 9 are each independently selected from the group consisting of hydrogen, C 1 to C 10 linear or branched alkyl, a C 3 to C 10 cyclic alkyl group, a linear or branched C 2 to C 10 alkenyl group, a linear or branched C 2 to C 10 alkynyl group, a C 5 to C 10 aromatic group, and a C 3 to C 10 saturated or unsaturated heterocyclic group; and R 10 and R 11 are each independently selected from the group consisting of a C 1 to C 10 linear or branched alkyl group, a C 3 to C 10 cyclic alkyl group, a linear or branched C 2 to C 10 alkenyl group, a linear or branched C 2 to C 10 alkynyl group, a C 5 to C 10 aromatic group, and a C 3 to C 10 saturated or unsaturated heterocyclic group; wherein R 3 and R 4 can form a cyclic ring or an alkyl-substituted cyclic ring; and wherein R 10 and R 11 can form a cyclic ring or an alkyl-substituted cyclic ring; and L=Cl, Br, I and

further comprising a second precursor having the following formula: comprising an organoaminosilane having a formula Si(NR 1 R 2 )H 3 wherein R 1 and R 2 are each independently selected from the group consisting of a C 1 to C 10 linear or branched alkyl group, a C 3 to C 10 cyclic alkyl group, a linear or branched C 2 to C 10 alkenyl group, a linear or branched C 2 to C 10 alkynyl group, a C 5 to C 10 aromatic group, and a C 3 to C 10 saturated or unsaturated heterocyclic group and wherein R 1 and R 2 can form a cyclic ring or an alkyl-substituted cyclic ring; wherein the first precursor has the following formula: (2,6-dimethylpiperidino)R 5 SiH 2 wherein R 5 is selected from the group consisting of Me, Et, n Pr, i Pr, n Bu, i Bu, s Bu, t Bu, isomers of pentyl, vinyl, phenyl, and alkyl substituted phenyl; and

the second precursor comprises (2,6-dimethylpiperidino)SiH 3 .

4. A composition for depositing a carbon-doped silicon containing film comprising:

a first precursor comprising at least one compound selected from the group consisting of:

(i) an organoaminoalkylsilane having a formula of R 5 Si(NR 3 R 4 ) x H 3−x wherein x=1, 2, 3;

(ii) an organoalkoxyalkylsilane having a formula of R 6 Si(OR 7 ) x H 3−x wherein x=1, 2, 3;

(iii) an organoaminosilane having a formula of R 8 N(SiR 9 (NR 10 R 11 )H) 2 ;

(iv) an organoaminosilane having a formula of R 8 N(SiR 9 LH) 2 and combinations thereof

wherein R 3 , R 4 , and R 7 are each independently selected from the group consisting of a C 1 to C 10 linear or branched alkyl group, a C 3 to C 10 cyclic alkyl group, a linear or branched C 2 to C 10 alkenyl group, a linear or branched C 2 to C 10 alkynyl group, a C 5 to C 10 aromatic group, and a C 3 to C 10 saturated or unsaturated heterocyclic group; R 5 and R 6 are each independently selected from the group consisting of a C 1 to C 10 linear or branched alkyl group, a C 3 to C 10 cyclic alkyl group, a linear or branched C 2 to C 10 alkenyl group, a linear or branched C 2 to C 10 alkynyl group, a C 5 to C 10 aromatic group, and a C 3 to C 10 saturated or unsaturated heterocyclic group and a halide atom; R 8 and R 9 are each independently selected from the group consisting of hydrogen, C 1 to C 10 linear or branched alkyl, a C 3 to C 10 cyclic alkyl group, a linear or branched C 2 to C 10 alkenyl group, a linear or branched C 2 to C 10 alkynyl group, a C 5 to C 10 aromatic group, and a C 3 to C 10 saturated or unsaturated heterocyclic group; and R 10 and R 11 are each independently selected from the group consisting of a C 1 to C 10 linear or branched alkyl group, a C 3 to C 10 cyclic alkyl group, a linear or branched C 2 to C 10 alkenyl group, a linear or branched C 2 to C 10 alkynyl group, a C 5 to C 10 aromatic group, and a C 3 to C 10 saturated or unsaturated heterocyclic group; wherein R 3 and R 4 can form a cyclic ring or an alkyl-substituted cyclic ring; and wherein R 10 and R 11 can form a cyclic ring or an alkyl-substituted cyclic ring; and L=Cl, Br, I and

further comprising a second precursor having the following formula: comprising an organoaminosilane having a formula Si(NR 1 R 2 )H 3 wherein R 1 and R 2 are each independently selected from the group consisting of a C 1 to C 10 linear or branched alkyl group, a C 3 to C 10 cyclic alkyl group, a linear or branched C 2 to C 10 alkenyl group, a linear or branched C 2 to C 10 alkynyl group, a C 5 to C 10 aromatic group, and a C 3 to C 10 saturated or unsaturated heterocyclic group and wherein R 1 and R 2 can form a cyclic ring or an alkyl-substituted cyclic ring; wherein the first precursor has the following formula: (phenylmethylamino)R 5 SiH 2 wherein R 5 is selected from the group consisting of Me, Et, n Pr, i Pr, n Bu, i Bu, s Bu, t Bu, isomers of pentyl, vinyl, phenyl, and alkyl substituted phenyl; and

the second precursor (phenylmethylamino)SiH 3 .

5. A composition for depositing a carbon-doped silicon containing film comprising:

a first precursor having a formula of R 5 Si(NR 3 R 4 ) x H 3−x wherein x=1, 2, 3 wherein R 3 and R 4 are each independently selected from the group consisting of a C 1 to C 10 linear or branched alkyl group, a C 3 to C 10 cyclic alkyl group, a linear or branched C 2 to C 10 alkenyl group, a linear or branched C 2 to C 10 alkynyl group, a C 5 to C 10 aromatic group, and a C 3 to C 10 saturated or unsaturated heterocyclic group; R 5 is selected from the group consisting of a C 1 to C 10 linear or branched alkyl group, a C 3 to C 10 cyclic alkyl group, a linear or branched C 2 to C 10 alkenyl group, a linear or branched C 2 to C 10 alkynyl group, a C 5 to C 10 aromatic group, and a C 3 to C 10 saturated or unsaturated heterocyclic group, and a halide atom, and wherein R 3 and R 4 can form a cyclic ring or an alkyl-substituted cyclic ring and a second precursor comprising at least one member selected from the group consisting of ( i Pr 2 N)SiH 3 , ( s Bu 2 N)SiH 3 , (2,6-dimethylpiperidino)SiH 3 and (phenylmethylamino)SiH 3 .

6. The composition of claim 5 wherein the composition is provided in a stainless steel vessel.

7. A composition for depositing a carbon-doped silicon containing film comprising:

a first precursor having a formula of R 6 Si(OR 7 ) x H 3−x wherein x=1, 2, 3 and wherein R 7 is independently selected from the group consisting of a C 1 to C 10 linear or branched alkyl group, a C 3 to C 10 cyclic alkyl group, a linear or branched C 2 to C 10 alkenyl group, a linear or branched C 2 to C 10 alkynyl group, a C 5 to C 10 aromatic group, and a C 3 to C 10 saturated or unsaturated heterocyclic group; and R 6 is independently selected from the group consisting of a C 1 to C 10 linear or branched alkyl group, a C 3 to C 10 cyclic alkyl group, a linear or branched C 2 to C 10 alkenyl group, a linear or branched C 2 to C 10 alkynyl group, a C 5 to C 10 aromatic group, and a C 3 to C 10 saturated or unsaturated heterocyclic group, and a halide atom; R 8 and R 9 are each independently selected from the group consisting of hydrogen, C 1 to C 10 linear or branched alkyl, a C 3 to C 10 cyclic alkyl group, a linear or branched C 2 to C 10 alkenyl group, a linear or branched C 3 to C 10 alkynyl group, a C 5 to C 10 aromatic group, and a C 3 to C 10 saturated or unsaturated heterocyclic group and a second precursor comprising at least one member selected from the group consisting of ( i Pr 2 N)SiH 3 , ( s Bu 2 N)SiH 3 , (2,6-dimethylpiperidino)SiH 3 and (phenylmethylamino)SiH 3 .

8. The composition of claim 7 wherein the composition is provided in a stainless steel vessel.

9. A composition for depositing a carbon-doped silicon containing film comprising:

a first precursor having a formula R 8 N(SiR 9 (NR 10 R 11 )H) 2 wherein R 8 and R 9 are each independently selected from the group consisting of hydrogen, C 1 to C 10 linear or branched alkyl, a C 3 to C 10 cyclic alkyl group, a linear or branched C 2 to C 10 alkenyl group, a linear or branched C 3 to C 10 alkynyl group, a C 5 to C 10 aromatic group, and a C 3 to C 10 saturated or unsaturated heterocyclic group; and R 10 and R 11 are each independently selected from the group consisting of a C 1 to C 10 linear or branched alkyl group, a C 3 to C 10 cyclic alkyl group, a linear or branched C 2 to C 10 alkenyl group, a linear or branched C 3 to C 10 alkynyl group, a C 5 to C 10 aromatic group, and a C 3 to C 10 saturated or unsaturated heterocyclic group; and wherein R 10 and R 11 can form a cyclic ring or an alkyl-substituted cyclic ring and a second precursor comprising at least one member selected from the group consisting of ( i Pr 2 N)SiH 3 , ( s Bu 2 N)SiH 3 , (2,6-dimethylpiperidino)SiH 3 and (phenylmethylamino)SiH 3 .

10. The composition of claim 9 wherein the composition is provided in a stainless steel vessel.

11. A composition for depositing a carbon-doped silicon containing film comprising:

a first precursor having a formula of R 8 N(SiR 9 LH) 2 wherein R 8 and R 9 are independently selected from the group consisting of hydrogen, C 1 to C 10 linear or branched alkyl, a C 3 to C 10 cyclic alkyl group, a linear or branched C 2 to C 10 alkenyl group, a linear or branched C 3 to C 10 alkynyl group, a C 5 to C 10 aromatic group, and a C 3 to C 10 saturated or unsaturated heterocyclic group; and L is a halide selected from the group consisting of Cl, Br, I and a second precursor comprising at least one selected from the group consisting of ( i Pr 2 N)SiH 3 , ( s Bu 2 N)SiH 3 , (2,6-dimethylpiperidino)SiH 3 and (phenylmethylamino)SiH 3 .

12. The composition of claim 11 wherein the composition is provided in a stainless steel vessel.

13. An organoaminoalkylsilane comprising a formula of R 5 Si(NR 3 R 4 ) x H 3−x wherein R 3 and R 4 are independently selected from the group consisting of a C 1 to C 10 linear or branched alkyl group, a C 3 to C 10 cyclic alkyl group, a linear or branched C 2 to C 10 alkenyl group, a linear or branched C 2 to C 10 alkynyl group, a C 5 to C 10 aromatic group, and a C 3 to C 10 saturated or unsaturated heterocyclic group; and wherein R 3 and R 4 can also form a cyclic or alkyl substituted cyclic ring; R 5 is selected from the group consisting of a C 1 to C 10 linear or branched alkyl group, a C 3 to C 10 cyclic alkyl group, a linear or branched C 2 to C 10 alkenyl group, a linear or branched C 2 to C 10 alkynyl group, a C 5 to C 10 aromatic group, and a C 3 to C 10 saturated or unsaturated heterocyclic group; x=1.

14. The organoaminoalkylsilane of claim 13 wherein the organoaminoalkylsilane is selected from the group consisting of di-iso-propylaminomethylsilane, di-sec-butylaminomethylsilane, and di-iso-propylaminophenylsilane.

15. The organoaminoalkylsilane of claim 13 wherein the organoaminoalkylsilane comprises an organoaminoalkylsilane having a formula of (Me 2 N)R 5 SiH 2 wherein R 3 and R 4 are Me; R 5 is selected from the group consisting of Me, Et, n Pr, i Pr, n Bu, i Bu, s Bu, t Bu, and phenyl; and x=1.

16. The organoaminoalkylsilane of claim 13 wherein the organoaminoalkylsilane comprises an organoaminoalkylsilane having a formula of (Et 2 N)R 5 SiH 2 wherein R 3 and R 4 are Et; R 5 is selected from the group consisting of Me, Et, n Pr, i Pr, n Bu, i Bu, s Bu, t Bu and phenyl; and x=1.

17. The organoaminoalkylsilane of claim 13 wherein the organoaminoalkylsilane comprises an organoaminoalkylsilane having a formula of ( i Pr 2 N)R 5 SiH 2 wherein R 3 and R 4 are i Pr; R 5 is selected from the group consisting of Me, Et, n Pr, i Pr, n Bu, i Bu, s Bu, t Bu and phenyl; X=1.

18. The organoaminoalkylsilane of claim 13 wherein the organoaminoalkylsilane comprises an organoaminoalkylsilane having a formula of ( s Bu 2 N)R 5 SiH 2 wherein R 3 and R 4 are s Bu; R 5 is selected from the group consisting of Me, Et, n Pr, i Pr, n Bu, i Bu, s Bu, t Bu, isomers of pentyl, vinyl, phenyl, and alkyl substituted phenyl.

19. The organoaminoalkylsilane of claim 13 wherein the organoaminoalkylsilane comprises an organoaminoalkylsilane having a formula of (2,6-dimethylpiperidino)R 5 SiH 2 wherein R 3 and R 4 are an alkyl substituted cyclic ring 2,6-dimethylpiperidino; R 5 is selected from the group consisting of Me, Et, n Pr, i Pr, n Bu, i Bu, s Bu, t Bu, isomers of pentyl, vinyl, phenyl, and alkyl substituted phenyl; and x=1.

20. The organoaminoalkylsilane of claim 13 where the organoaminoalkylsilane comprises an organoaminoalkylsilane having a formula of (phenylmethylamino)R 5 SiH 2 wherein R 3 is phenyl; R 4 is methyl; R 5 is selected from the group consisting of Me, Et, n Pr, i Pr, n Bu, i Bu, s Bu, t Bu, isomers of pentyl, vinyl, phenyl, and alkyl substituted phenyl; and x=1.

21. The composition of claim 5 wherein the first precursor is selected from the group consisting of di-iso-propylaminomethylsilane, di-sec-butylaminomethylsilane, and di-iso-propylaminophenylsilane.

22. The organoaminoalkylsilane of claim 13 wherein R 5 is selected from the group consisting of Me, Et, n Pr, i Pr, n Bu, i Bu, s Bu, t Bu, isomers of pentyl, vinyl, phenyl, and alkyl substituted phenyl.

23. The organoaminoalkylsilane of claim 13 wherein R 3 and R 4 are independently selected from the group consisting of Me, Et, n Pr, i Pr, n Bu, i Bu, s Bu, and t Bu.

24. The organoaminoalkylsilane of claim 13 wherein R 3 and R 4 form a cyclic or alkyl substituted cyclic ring.